Jan Willem Maes

1.7k citations

85 papers · 1.0k indexed · h-index 16

Electrical and Electronic Engineering top 5%
- Semiconductor materials and devices 71
- Advancements in Semiconductor Devices and Circuit Design 30
- Ferroelectric and Negative Capacitance Devices 21
- Integrated Circuits and Semiconductor Failure Analysis 18
Materials Chemistry top 10%
- Electronic and Structural Properties of Oxides 13
Electronic, Optical and Magnetic Materials
- Copper Interconnects and Reliability 18
Surfaces, Coatings and Films
Atomic and Molecular Physics, and Optics
- Semiconductor materials and interfaces 10
Mechanics of Materials
- Metal and Thin Film Mechanics 10

Co-authors: Stefan De Gendt Thierry Conard Marc Heyns Wilfried Vandervorst Edward Young Matty Caymax M. Tuominen W.F.A. Besling
Cited by: Electrical and Electronic Engineering Materials Chemistry Electronic, Optical and Magnetic Materials
Journals: Applied Physics Letters (1 paper)Journal of Applied Physics (1 paper)Journal of The Electrochemical Society (6 papers)
Partner nations: Belgium United States Netherlands

In The Last Decade

Jan Willem Maes

80 papers receiving 962 citations

Peers

Countries citing papers authored by Jan Willem Maes

Since Specialization

Citations

This map shows the geographic impact of Jan Willem Maes's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Jan Willem Maes with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Jan Willem Maes more than expected).

Fields of papers citing papers by Jan Willem Maes

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Jan Willem Maes. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Jan Willem Maes. The network helps show where Jan Willem Maes may publish in the future.

Co-authorship network

The 25 scholars most cited alongside Jan Willem Maes, linked wherever they have co-authored with each other. Click a name or a connecting line to browse the papers they share.

Border = papers with Jan Willem Maes Line = papers co-authored together Jan Willem Maes links everyone, so they are left out of the graph.

All Works

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20 of 20 papers shown

#	Work
1	Backside Power Delivery With Relaxed Overlay for Backside Patterning Using Extreme Wafer Thinning and Molybdenum-Filled Slit Nano Through Silicon Vias IEEE Transactions on Electron Devices ·Peng Zhao,Liesbeth Witters,Anne Jourdain,Michele Stucchi,N. Jourdan,Jan Willem Maes,H. Bana,C. Zhu,Rami Chukka,Farid Sebaai,K. Vandersmissen,N. Heylen,D. Montero,S. Wang,K. D’havé,Filip Schleicher,Joeri De Vos,Gerald Beyer,Andy Miller,Eric Beyne	2024	2
2	Pure-Metal Replacement Gate for Reliable 30 nm Pitch Scaled 3D NAND Flash S. Rachidi,S. Ramesh,Davide Tierno,Gabriele Luca Donadio,Antoine Pacco,Jan Willem Maes,Yongbin Jeong,A. Arreghini,G. Van den bosch,M. Rosmeulen	2024	1
3	DRAM-Peri FinFET - A Thermally-Stable High-Performance Advanced CMOS RMG Platform with Mo-Based pWFM for sub-10nm DRAM Jhuma Ganguly,H. Arimura,R. Ritzenthaler,H. Bana,Jan Willem Maes,J. G. Lai,S. Brus,W. Maqsood,Ritam Sarkar,Balakrishnan Kannan,E. Capogreco,Vladimir Machkaoutsan,Sungwon Yoon,A. Spessot,Michael Givens,Naoto Horiguchi	2024	0
4	Selective ALD Mo Deposition in 10nm Contacts Marleen H. van der Veen,Jan Willem Maes,Olalla Varela Pedreira,C. Zhu,Davide Tierno,Sukanya Datta,N. Jourdan,Stefan Decoster,Chen Wu,Moataz Mousa,Youngchul Byun,Herbert Struyf,S. Park,Zsolt Tökei	2023	2
5	Record mobility (μ<inf>eff</inf> ∼3100 cm²/V-s) and reliability performance (V<inf>ov</inf>∼0.5V for 10yr operation) of In<inf>0.53</inf>Ga<inf>0.47</inf>As MOS devices using improved surface preparation and a novel interfacial layer Abhitosh Vais,A. Alian,Laura Nyns,J. Franco,Sonja Sioncke,V. Putcha,Hao Yu,Y. Mols,R. Rooyackers,Dennis Lin,Jan Willem Maes,Qi Xie,Michael Givens,Fu Tang,Xiaoqiang Jiang,A. Mocuta,Nadine Collaert,K. De Meyer,Aaron Thean	2016	7
6	Impact of sequential infiltration synthesis on pattern fidelity of DSA lines Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Arjun Singh,W. Knaepen,Şafak Sayan,Ziad El Otell,Boon Teik Chan,Jan Willem Maes,Roel Gronheid	2015	11
7	Tailoring switching and endurance / retention reliability characteristics of HfO<inf>2</inf> / Hf RRAM with Ti, Al, Si dopants Y. Y. Chen,R. Roelofs,A. Redolfi,R. Degraeve,D. Crotti,A. Fantini,Sergiu Clima,B. Govoreanu,Masanori Komura,L. Goux,L. Zhang,Attilio Belmonte,Qiyuan Xie,Jan Willem Maes,Geoffrey Pourtois,M. Jurczak	2014	29
8	« Die Joden zijn bij mij per toeval gevonden » Hoe protestanten Joden redden in de omgeving van Antwerpen en Leuven (1942–1944) Industrias Culturais (Universidade de Coimbra) ·Jan Willem Maes	2011	1
9	Ozone-Based Metal Oxide Atomic Layer Deposition: Impact of N[sub 2]/O[sub 2] Supply Ratio in Ozone Generation Electrochemical and Solid-State Letters ·Annelies Delabie,Matty Caymax,Sven Gielis,Jan Willem Maes,Laura Nyns,M. Popovici,Johan Swerts,Hilde Tielens,Jozef Peeters,Sven Van Elshocht	2010	15
10	Atomic Layer Deposition of Strontium Titanate Films Using Sr([sup t]Bu[sub 3]Cp)[sub 2] and Ti(OMe)[sub 4] Journal of The Electrochemical Society ·M. Popovici,Sven Van Elshocht,N. Menou,Johan Swerts,Dieter Pierreux,Annelies Delabie,Bert Brijs,Thierry Conard,Karl Opsomer,Jan Willem Maes,Dirk J. Wouters,J. A. Kittl	2009	55
11	Characterization of the annealing impact on La2O3/HfO2 and HfO2/La2O3 stacks for MOS applications Microelectronic Engineering ·Diane Rébiscoul,S. Favier,Jean‐Paul Barnes,Jan Willem Maes,F. Martín	2009	13
12	Impact of Hf-Precursor Choice on Scaling and Performance of High-k Gate Dielectrics ECS Transactions ·Jan Willem Maes,Yanina Fedorenko,Annelies Delabie,Lars‐Aåke Ragnarsson,Johan Swerts,Laura Nyns,Sven Van Elshocht,Chang-Gong Wang,G. D. Wilk	2007	5
13	Atomic Layer Deposition of Hafnium Silicate from HfCl[sub 4], SiCl[sub 4], and H[sub 2]O Electrochemical and Solid-State Letters ·Yanina Fedorenko,Johan Swerts,Jan Willem Maes,E. Tois,Suvi Haukka,C.-G. Wang,G. D. Wilk,Annelies Delabie,W. Deweerd,Stefan De Gendt	2007	16
14	Evaluation of Atomic Layer Deposited NbN and NbSiN as Metal Gate Materials Journal of The Electrochemical Society ·N. Van Hoornick,H. De Witte,T. Witters,Chao Zhao,Thierry Conard,Hannu Huotari,Johan Swerts,T. Schram,Jan Willem Maes,Stefan De Gendt,Marc Heyns	2006	14
15	Building Economic Self-Reliance: Trickle Up's Microenterprise Seed Capital for the Extreme Poor in Rural India ScholarsArchive (Brigham Young University) ·Jan Willem Maes,Malika Basu	2005	2
16	The mechanism of mobility degradation in MISFETs with Al/sub 2/O/sub 3/ gate dielectric Kazuyoshi Torii,Y. Shimamoto,Shinichi Saito,Osamu Tonomura,Masahiko Hiratani,Y. Manabe,Matty Caymax,Jan Willem Maes	2003	16
17	Characterisation of ALCVD Al2O3–ZrO2 nanolaminates, link between electrical and structural properties Journal of Non-Crystalline Solids ·W.F.A. Besling,Edward Young,Thierry Conard,Chao Zhao,R. Carter,Wilfried Vandervorst,Matty Caymax,Stefan De Gendt,Marc Heyns,Jan Willem Maes,M. Tuominen,Suvi Haukka	2002	77
18	Gate stack preparation with high-k materials in a cluster tool Stefan De Gendt,Marc Heyns,Thierry Conard,H. Hohira,Olivier Richard,W. Vandervorst,Matty Caymax,Jan Willem Maes,M. Tuominen	2002	1
19	Measurement system for 2D magnetic properties of electrical steel sheets: design and performance Ghent University Academic Bibliography (Ghent University) ·Dimitre Makaveev,M. Wulf,Johan Gyselinck,Jan Willem Maes,Luc Dupré,Jan Melkebeek	2000	9
20	A New HF Vapor Process for Native Oxide Removal, Suited for Cluster Applications Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena ·A. B. Storm,Hessel Sprey,Jan Willem Maes,E.H.A. Granneman,Roland Blank,Erika Röhr,Matty Caymax,Marc Heyns	1998	2

About Jan Willem Maes

Jan Willem Maes is a scholar working on Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials and Business and International Management, having authored 85 papers that have together received 1.0k indexed citations. Recurring topics across this work include Semiconductor materials and devices (71 papers), Advancements in Semiconductor Devices and Circuit Design (30 papers), Ferroelectric and Negative Capacitance Devices (21 papers), Copper Interconnects and Reliability (18 papers), Integrated Circuits and Semiconductor Failure Analysis (18 papers), Electronic and Structural Properties of Oxides (13 papers), Semiconductor materials and interfaces (10 papers) and Metal and Thin Film Mechanics (10 papers). The work is most often cited by research in Electrical and Electronic Engineering (842 citations), Materials Chemistry (516 citations) and Electronic, Optical and Magnetic Materials (129 citations). Jan Willem Maes has collaborated with scholars based in Belgium, United States and Netherlands. Frequent co-authors include Stefan De Gendt, Thierry Conard, Marc Heyns, Wilfried Vandervorst, Edward Young, Matty Caymax, M. Tuominen, W.F.A. Besling, Johan Swerts and Wei‐Bor Tsai. Their work appears in journals such as Applied Physics Letters, Journal of Applied Physics and Journal of The Electrochemical Society.

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