Chen Wu

590 total citations
37 papers, 460 citations indexed

About

Chen Wu is a scholar working on Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials and Atomic and Molecular Physics, and Optics. According to data from OpenAlex, Chen Wu has authored 37 papers receiving a total of 460 indexed citations (citations by other indexed papers that have themselves been cited), including 37 papers in Electrical and Electronic Engineering, 30 papers in Electronic, Optical and Magnetic Materials and 12 papers in Atomic and Molecular Physics, and Optics. Recurrent topics in Chen Wu's work include Semiconductor materials and devices (33 papers), Copper Interconnects and Reliability (30 papers) and Semiconductor materials and interfaces (12 papers). Chen Wu is often cited by papers focused on Semiconductor materials and devices (33 papers), Copper Interconnects and Reliability (30 papers) and Semiconductor materials and interfaces (12 papers). Chen Wu collaborates with scholars based in Belgium, United States and Germany. Chen Wu's co-authors include Mikhaı̈l R. Baklanov, Zs. Tôkei, Kristof Croes, Kris Vanstreels, J. Bömmels, A. Leśniewska, Ivan Ciofi, Olalla Varela Pedreira, Christoph Adelmann and Ph. Roussel and has published in prestigious journals such as Applied Physics Letters, Journal of Applied Physics and Langmuir.

In The Last Decade

Chen Wu

32 papers receiving 452 citations

Peers

Chen Wu

EEE

EOMM

MC

AMPO

MM

T. Spooner United States

H. Shobha United States

Ahila Krishnamoorthy Singapore

Hualiang Shi United States

Chien Chiang United States

Gayle Murdoch Belgium

Kai‐Erik Elers Finland

D. Canaperi United States

Thierry Mourier France

David De Roest Belgium

T. Spooner United States

Chen Wu

412 ×1.1

EEE

312 ×1.1

EOMM

83 ×0.9

MC

109 ×1.4

AMPO

76 ×1.0

MM

Citations per year, relative to Chen Wu Chen Wu (= 1×) peers T. Spooner

Countries citing papers authored by Chen Wu

Since Specialization

Citations

This map shows the geographic impact of Chen Wu's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Chen Wu with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Chen Wu more than expected).

Fields of papers citing papers by Chen Wu

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Chen Wu. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Chen Wu. The network helps show where Chen Wu may publish in the future.

Co-authorship network of co-authors of Chen Wu

This figure shows the co-authorship network connecting the top 25 collaborators of Chen Wu. A scholar is included among the top collaborators of Chen Wu based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with Chen Wu. Chen Wu is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

Sort: Min cites: Since: Top N: Style:

20 of 20 papers shown

1.

Murdoch, Gayle, Anshul Gupta, Chen Wu, et al.. (2024). Airgap Integration in MP18 Two-Level Semi-damascene Interconnects with Fully Self-aligned Vias. 1–3.

2.

Hermans, Yannick, et al.. (2024). Enabling 0.33NA EUV lithography patterning towards MP16 SADP semi-damascene metallization, setting the benchmark for High-NA EUV. 48–48.

3.

Fang, Yu, A. Leśniewska, Ivan Ciofi, et al.. (2024). BEOL tip-to-tip dielectric reliability characterization using a design-representative test structure. Lirias. 1–7. 1 indexed citations

4.

Hermans, Yannick, Chen Wu, Filip Schleicher, et al.. (2023). BEOL N2: M2 through SAxP process from MP21 to MP26: 193i SAQP vs EUV SADP. 57–57. 1 indexed citations

5.

Veen, Marleen H. van der, Jan Willem Maes, Olalla Varela Pedreira, et al.. (2023). Selective ALD Mo Deposition in 10nm Contacts. 1–3. 2 indexed citations

6.

Hermans, Yannick, Chen Wu, Gerardo Martínez, et al.. (2023). Improving uniformity of 3-level High Aspect Ratio Supervias. 1–3.

7.

Wu, Chen, Adrian Chasin, Andrea Padovani, et al.. (2019). Role of Defects in the Reliability of HfO₂/Si-Based Spacer Dielectric Stacks for Local Interconnects. IRIS UNIMORE (University of Modena and Reggio Emilia). 117. 1–6. 2 indexed citations

8.

Pedreira, Olalla Varela, et al.. (2019). Cobalt and Ruthenium drift in ultra-thin oxides. Microelectronics Reliability. 100-101. 113407–113407. 9 indexed citations

9.

Croes, Kristof, Christoph Adelmann, Christopher Wilson, et al.. (2018). Interconnect metals beyond copper: reliability challenges and opportunities. 5.3.1–5.3.4. 63 indexed citations

10.

Witt, C., Kong Boon Yeap, A. Leśniewska, et al.. (2018). Testing The Limits of TaN Barrier Scaling. 54–56. 31 indexed citations

11.

Wu, Chen, et al.. (2018). Non-invasive soft breakdown localisation in low k dielectrics using photon emission microscopy and thermal laser stimulation. Microelectronics Reliability. 92. 73–78. 2 indexed citations

12.

Wu, Chen, et al.. (2017). Considering percolation path growth in low-k dielectric TDDB measurements. 115. 1–3. 1 indexed citations

13.

Pedreira, Olalla Varela, Kristof Croes, A. Leśniewska, et al.. (2017). Reliability study on cobalt and ruthenium as alternative metals for advanced interconnects. 6B–2.1. 62 indexed citations

14.

Wu, Chen, Ivan Ciofi, J. Bömmels, et al.. (2015). Towards understanding intrinsic degradation and breakdown mechanisms in SiOCH low-k dielectrics. Journal of Applied Physics. 117(6). 8 indexed citations

15.

Wu, Chen, A. Leśniewska, Olalla Varela Pedreira, et al.. (2015). Correlation between stress-induced leakage current and dielectric degradation in ultra-porous SiOCH low-k materials. Journal of Applied Physics. 118(16). 12 indexed citations

16.

Zhao, Larry, et al.. (2015). Communication—The Impact of TaN Barrier Processes on Different Ultra Low-k Dielectrics. ECS Journal of Solid State Science and Technology. 4(12). N160–N162. 2 indexed citations

17.

Wu, Chen, et al.. (2014). Electrical Reliability Challenges of Advanced Low-k Dielectrics. ECS Journal of Solid State Science and Technology. 4(1). N3065–N3070. 50 indexed citations

18.

Li, Yunlong, Kristof Croes, Stefaan Van Huylenbroeck, et al.. (2014). Impact of Cu TSVs on BEOL metal and dielectric reliability. 3E.1.1–3E.1.5. 10 indexed citations

19.

Wu, Chen, Y. Barbarin, Ivan Ciofi, et al.. (2013). Correlation between field dependent electrical conduction and dielectric breakdown in a SiCOH based low-k (k = 2.0) dielectric. Applied Physics Letters. 103(3). 12 indexed citations

20.

Croes, Kristof, Ph. Roussel, Y. Barbarin, et al.. (2013). Low field TDDB of BEOL interconnects using >40 months of data. 2F.4.1–2F.4.8. 31 indexed citations

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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