S. Mehta

821 citations

26 papers · 83 indexed · h-index 5

Impact in

Electrical and Electronic Engineering
- Semiconductor materials and devices
- Advancements in Semiconductor Devices and Circuit Design
- Ferroelectric and Negative Capacitance Devices
- Integrated Circuits and Semiconductor Failure Analysis
- Thin-Film Transistor Technologies
- Advanced Memory and Neural Computing
- Silicon Carbide Semiconductor Technologies
Electronic, Optical and Magnetic Materials
- Copper Interconnects and Reliability

Papers in

Structural Biology 1
Electronic, Optical and Magnetic Materials 8
- Copper Interconnects and Reliability 8

Co-authors: Kangguo Cheng S. Nguyen R. Divakaruni Takayuki Yamashita Richard G. Southwick Ernest Y. Wu J. H. StathisJing Li
Journals: Journal of Applied Physics (2 papers)ECS Journal of Solid State Science and Technology (1 paper)IEEE Transactions on Electron Devices (1 paper)ECS Transactions (2 papers)IETE Technical Review (1 paper)
Partner nations: United States Switzerland India

In The Last Decade

S. Mehta

23 papers receiving 78 citations

Peers

Countries citing papers authored by S. Mehta

Since Specialization

Citations

This map shows the geographic impact of S. Mehta's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by S. Mehta with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites S. Mehta more than expected).

Fields of papers citing papers by S. Mehta

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by S. Mehta. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by S. Mehta. The network helps show where S. Mehta may publish in the future.

Co-authors

The 25 scholars most cited alongside S. Mehta, linked wherever they have co-authored with each other. Click a name or a connecting line to browse the papers they share.

Border = papers with S. Mehta Line = papers co-authored together S. Mehta links everyone, so they are left out of the graph.

All Works

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20 of 20 papers shown

#	Work
1	Two-dimensional dopant potential mapping in a fin field effect transistor by off-axis electron holography Journal of Applied Physics ·M. Gribelyuk, S. Mehta, Jeffrey B. Johnson, Ann Zinkivskay	2022	1
2	Improved Air Spacer for Highly Scaled CMOS Technology IEEE Transactions on Electron Devices ·Kangguo Cheng, Дмитрий Петрович Голоскоков, Heng Wu, Juntao Li, S. Nguyen, Jingyun Zhang, Miaomiao Wang, S. Mehta, 加藤綾子, Rena M. Conti, Ю. А. Алябышева, Julien Frougier, Andrew Greene, Zohar Bloom-Ackerman, B. Haran, R. Divakaruni	2020	9
3	Improved Air Spacer Co-Integrated with Self-Aligned Contact (SAC) and Contact over Active Gate (COAG) for Highly Scaled CMOS Technology Kangguo Cheng, Дмитрий Петрович Голоскоков, Heng Wu, Juntao Li, S. Nguyen, Jingyun Zhang, Miaomiao Wang, S. Mehta, 加藤綾子, Rena M. Conti, Ю. А. Алябышева, Julien Frougier, Andrew Greene, Zohar Bloom-Ackerman, Bala Haran, R. Divakaruni	2020	9
4	Multiphonon-Electron Coupling Enhanced Defect Generation and Breakdown Mechanism in MOL New Spacer Dielectrics for 7nm/5nm Technology Nodes and Beyond Ernest Y. Wu, Richard G. Southwick, S. Mehta, Baozhen Li, Miaomiao Wang	2020	1
5	A Systematic Study on BEOL Defectivity Control for Future AI Application Wenjun Zhong, Ahmad Sakrani, Heidar Shakarami, Zixue Guo, S. Mehta, Wagner Neder Issa, 陽平橋本, Wei‐Tsu Tseng, Jaime Pérez-Alemany	2020	1
6	Pinch Off Plasma Chemical Vapor Deposition Process and Material Technology for Nano-Device Air Gap/Spacer Formation ECS Meeting Abstracts ·S. Nguyen, Amédée le Faure, Kangguo Cheng, Christian Penny, Дмитрий Петрович Голоскоков, S. Mehta, Zohar Bloom-Ackerman, Liying Jiang, D. Canaperi	2018	1
7	UV Assisted Densification of Perhydropolysilazane (PHPS) Based Spin-On Glass in High Aspect Ratio Gap Fill Structure ECS Transactions ·S. Mehta, H. Sheng, R. Krishnan, Bala Haran, J Nouveau, Z. Bayindir, SOPHIE MARSHALL, Kathrin M. E. Gihr, Jinping Liu, J. Shepard, Bertold Gießmann	2018	3
8	Pinch-Off Plasma CVD Deposition Process and Material Technology for Nano-Device Air Gap/Spacer Formation ECS Transactions ·S. Nguyen, Amédée le Faure, Sushant Jadhav, Christian Penny, Дмитрий Петрович Голоскоков, Jing Li, S. Mehta, Zohar Bloom-Ackerman, Liying Jiang, D. Canaperi	2018	1
9	Time dependent dielectric breakdown of SiN, SiBCN and SiOCN spacer dielectrics Richard G. Southwick, Ernest Y. Wu, S. Mehta, J. H. Stathis	2017	7
10	Effect of low temperature anneals and nonthermal treatments on the properties of gap fill oxides used in SiGe and III-V devices Journal of Applied Physics ·E. Todd Ryan, P. Morin, Anita Madan, S. Mehta	2016	2
11	Air spacer for 10nm FinFET CMOS and beyond Kangguo Cheng, C. Surisetty, Raja Muthinti, Zhe Liu, Haotian Tang, Stan Tsai, Takayuki Yamashita, H. Bu, R. Divakaruni, N. Noguchi, Chun Wing Yeung, S. Nguyen, K. Wettig, Xiren Miao, Brenda Luu, S. Mehta, Akihiro KANESHIGE	2016	20
12	Tunneling currents and reliability of atomic-layer-deposited SiBCN for low-κ spacer dielectrics Richard G. Southwick, 키타자와 다이수케, Mohit Bajaj, S. Mehta, T. Yamashita, Suresh Gundapaneni, R. K. Pandey, Ernest Y. Wu, K. V. R. M. Murali, Sidney Cohen, J. H. Stathis	2014	3
13	Enabling the use of ion implantation for ultra-thin FDSOI n-MOSFETs M. Vinet, Arvind Kumar, L. Grenouillet, S. Ponoth, N. Possémé, V. Destefanis, S. Mehta, N. Loubet, Y. Le Tiec, F. Monsieur, Darney Martínez, Nicolas Daval, B. Doris, O. Faynot, T. Poiroux	2012	1
14	Assessment of fully-depleted planar CMOS for low power complex circuit operation Zhibin Ren, S. Mehta, Jian Cai, S. Wu, 麦麦提.吐尔逊, T. Kanarsky, S. Kanakasabapathy, L. F. Edge, Brandon Tanji, Karoline Giele Martins de Aguiar, Bruno Lyra, K. Paulsen, P. Kulkarni, R.B. Lincoln, Kangguo Cheng, A. Khakifirooz, B. Doris, H. Bu, Dev Prakash Singh Rathour	2011	4
15	Optimization of Etching∕Deposition Phenomena for BF[sub 3] and B[sub 2]H[sub 6] Plasma Doping using PULSION® AIP conference proceedings ·Susan B. Felch, Tyler Parker, 季銘陶, Frank Torregrosa, О.Ю. Фетисова, Laurent Roux, V V Komarov, S. Mehta, Jiro Matsuo, Masataka Kase, Takaaki Aoki, Toshio Seki	2011	2
16	Spacer-defined double patterning for 20nm and beyond logic BEOL technology Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Ryoung-Han Kim, Chiew-Seng Koay, Sean Burns, Eugenia Friedman, John Arnold, E. W. Hayne, S. Mehta, Martin Burkhardt, Matthew Colburn, Harry Levinson	2011	4
17	Spacer defined double patterning for sub-72 nm pitch logic technology Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Ryoung-Han Kim, Erin Mclellan, Eugenia Friedman, John Arnold, Sivananda Kanakasabapathy, S. Mehta, Yuansheng Ma, Martin Burkhardt, Jason P. Cain, H C Gillen, Matthew Colburn, Harry Levinson	2010	2
18	Lightly Porous SiCOH 2.7 Dielectric Film Development for 65/45/32 nm Advanced Nanoelectronic CMOS Devices ECS Meeting Abstracts ·S. Nguyen, Annie Kovacs Bosch, Mark Sherwood, N. Klymko, S. A. Cohen, E. Simonyi, A. Grill, H. Shobha, Christiam Paúl Aguirre-Merino, Van Delft F L, S. Molis, K. Malone, E. Liniger, Marie-Ève Delage, S. M. Gates, Dan Edelstein, S. Mehta, T. Ivers	2008	1
19	Integration of ALD-TaN Liners on Nanoporous Dielectrics MRS Proceedings ·Bum Ki Moon, Takashi Iijima, S. G. Malhotra, A. Simon, T. M. Shaw, Paul Hechinger, Catherine B. Labelle, Carlos Henrique da Silva Dittz, T. Bolom, Derren Dunn, P. Flaitz, S. Mehta, Anastasia Valtopoulou, V. McGahay	2005	2
20	Evaluation of different wafer charging metrology protocols for thin dielectrics Javed A. Kamran, Susan B. Felch, Soma Aryana, S. Mehta	2003	1

About S. Mehta

S. Mehta is a scholar working on Structural Biology, Electronic, Optical and Magnetic Materials, Surfaces, Coatings and Films, Electrical and Electronic Engineering and Industrial and Manufacturing Engineering, having authored 26 papers that have together received 83 indexed citations. Recurring topics across this work include Semiconductor materials and devices (19 papers), Advancements in Semiconductor Devices and Circuit Design (12 papers), Copper Interconnects and Reliability (8 papers), Integrated Circuits and Semiconductor Failure Analysis (4 papers), Metal and Thin Film Mechanics (3 papers), Advancements in Photolithography Techniques (2 papers), Advanced Surface Polishing Techniques (2 papers) and Electronic and Structural Properties of Oxides (2 papers). The work is most often cited by research in Electrical and Electronic Engineering (79 citations), Electronic, Optical and Magnetic Materials (16 citations), Surfaces, Coatings and Films (5 citations), Structural Biology (1 citation) and Hardware and Architecture (3 citations). S. Mehta has collaborated with scholars based in United States, Switzerland and India. Frequent co-authors include Kangguo Cheng, S. Nguyen, R. Divakaruni, Takayuki Yamashita, Richard G. Southwick, Ernest Y. Wu, J. H. Stathis, Jing Li, Harry Levinson and Bala Haran. Their work appears in journals such as Journal of Applied Physics, ECS Journal of Solid State Science and Technology, IEEE Transactions on Electron Devices, ECS Transactions and IETE Technical Review.

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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