S. A. Cohen

1.2k citations

47 papers · 793 indexed · h-index 16

Electronic, Optical and Magnetic Materials top 10%
- Copper Interconnects and Reliability 27
Electrical and Electronic Engineering top 10%
- Semiconductor materials and devices 28
- Silicon and Solar Cell Technologies 6
- Integrated Circuits and Semiconductor Failure Analysis 6
- Advancements in Semiconductor Devices and Circuit Design 4
Mechanics of Materials top 10%
- Metal and Thin Film Mechanics 5
Ceramics and Composites
Atomic and Molecular Physics, and Optics top 10%
- Semiconductor materials and interfaces 9
Biomedical Engineering
- Advanced Surface Polishing Techniques 5

Co-authors: T. O. Sedgwick V. R. Deline A. E. Michel J. B. Lasky G. S. Oehrlein Kenneth P. Rodbell M. Liehr Kelvin G. Lynn
Cited by: Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering Mechanics of Materials
Journals: Journal of Biological Chemistry (1 paper)Applied Physics Letters (5 papers)Journal of Applied Physics (4 papers)
Partner nations: United States Germany Austria

In The Last Decade

S. A. Cohen

46 papers receiving 743 citations

Peers

Countries citing papers authored by S. A. Cohen

Since Specialization

Citations

This map shows the geographic impact of S. A. Cohen's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by S. A. Cohen with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites S. A. Cohen more than expected).

Fields of papers citing papers by S. A. Cohen

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by S. A. Cohen. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by S. A. Cohen. The network helps show where S. A. Cohen may publish in the future.

Co-authorship network

The 25 scholars most cited alongside S. A. Cohen, linked wherever they have co-authored with each other. Click a name or a connecting line to browse the papers they share.

Border = papers with S. A. Cohen Line = papers co-authored together S. A. Cohen links everyone, so they are left out of the graph.

All Works

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20 of 20 papers shown

#	Work
1	Advanced single precursor based pSiCOH k = 2.4 for ULSI interconnects Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ·Deepika Priyadarshini,S. Nguyen,H. Shobha,E. Liniger,James H.-C. Chen,Huai Huang,S. A. Cohen,A. Grill	2017	12
2	Highly Robust Advanced Single Precursor Based k 2.4 ILD for Beol Cu Interconnects ECS Meeting Abstracts ·Deepika Priyadarshini,S. Nguyen,H. Shobha,E. Todd Ryan,Steven M Gates,Huai Huang,James Chen,E. Liniger,S. A. Cohen,Chao-Kun Hu,Anita Madan,Ellen Adams,S. Molis,Thomas J Haigh,Griselda Bonilla,T. Standaert,D. Canaperi,A. Grill	2015	1
3	Low-field TDDB reliability data to enable accurate lifetime predictions E. Liniger,S. A. Cohen,Griselda Bonilla	2014	14
4	Contamination mitigation of hydrogen silsesquioxane resist processed with Na+-containing developer for nanoscale CMOS device patterning Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ·Markus Brink,Isaac Lauer,Sebastian Engelmann,Amlan Majumdar,S. A. Cohen,E. Kratschmer,Michael Guillorn	2014	2
5	Robust Ultrathin (20-25 nm)Trilayer Dielectric Low k Cu Damascene Cap for Sub-30 nm Nanoelectric Devices ECS Transactions ·S. Nguyen,Thomas J Haigh,M. Tagami,A. Grill,S. A. Cohen,H. Shobha,Chao-Kun Hu,Ed Adams,E. Liniger,T. M. Shaw,Tien Cheng,Hakeem Yusuff,Yiheng Xu,Tze‐Man Ko,S. Molis,T. Spooner,Spyridon Skordas,Xiaohu Liu,Griselda Bonilla,Dan Edelstein	2012	4
6	Integration of a Manufacturing Grade, k = 2.0 Spin-On Material in a Single Damascene Structure ECS Journal of Solid State Science and Technology ·Willi Volksen,Sampath Purushothaman,Maxime Darnon,Mike F. Lofaro,S. A. Cohen,J. P. Doyle,Nicholas Fuller,Teddie Magbitang,Philip M. Rice,Leslie Krupp,Hisashi Nakagawa,Youhei Nobe,Terukazu Kokubo,Géraud Dubois	2012	13
7	Mechanical Enhancement of Low-k Organosilicates by Laser Spike Annealing Journal of The Electrochemical Society ·Willi Volksen,Géraud Dubois,A. J. Kellock,Teddie Magbitang,Robert D. Miller,Dolores C. Miller,S. A. Cohen,E. Simonyi,Lynher Ramirez,David A. Markle,Shaoyin Chen,Senquan Zhou,Xiaoru Wang,Yun Wang	2008	9
8	The Gay Liberation Youth Movement in New York S. A. Cohen	2007	7
9	Chemical-Mechanical Polishing of SiCOH-Based Low-k Dielectrics ECS Meeting Abstracts ·Wei‐Tsu Tseng,Akihisa Sakamoto,S. Ponoth,Duk Ho Hong,Laertis Economikos,Stephen C. Vogt,Adam Ticknor,S. A. Cohen,Robin Wanner,Ben Kim	2006	1
10	Gate oxide breakdown under Current Limited Constant Voltage Stress B.P. Linder,J. H. Stathis,R. Wachnik,Ernest Y. Wu,S. A. Cohen,Abhishek Ray,A. Vayshenker	2002	66
11	Doppler broadening positron annihilation spectroscopy: A technique for measuring open-volume defects in silsesquioxane spin-on glass films Applied Physics Letters ·Mihail P. Petkov,Marc H. Weber,Kelvin G. Lynn,Kenneth P. Rodbell,S. A. Cohen	1999	33
12	Characterization of Thin Dielectric Films as Copper Diffusion Barriers using Triangular Voltage Sweep MRS Proceedings ·S. A. Cohen,J. Liu,L. Gignac,T. Ivers,D. Armbrust,Kenneth P. Rodbell,S. M. Gates	1999	6
13	Characterization of Thin Dielectric Films as Copper Diffusion Barriers Using Triangular Voltage Sweep MRS Proceedings ·S. A. Cohen,J. Liu,L. Gignac,T. Ivers,D. Armbrust,Kenneth P. Rodbell,S. M. Gates	1999	3
14	Properties Development During Curing of Low Dielectric-Constant Spin-On Glasses MRS Proceedings ·Robert F. Cook,E. Liniger,D. Klaus,E. Simonyi,S. A. Cohen	1998	14
15	Influence of the Cure Process on the Properties of Hydrogen Silsesquioxane Spin-On-Glass MRS Proceedings ·D. Többen,P. Weiganda,M. J. Shapiro,S. A. Cohen	1996	15
16	Assessment of Engraftment and Function of Human Tonsillar and Blood Mononuclear Cells in Immunodeficient Mice Advances in experimental medicine and biology ·Boris Albini,David Nadal,C-K. Chen,Erika Schläpfer,Basab K. Mookerjee,Thomas M. Stulnig,Pearay L. Ogra,Georg Wick,S. A. Cohen	1995	1
17	Determinants of differential liver-colonizing potential of variants of the MCA-38 murine colon cancer cell line Clinical & Experimental Metastasis ·James J. Piscatelli,S. A. Cohen,Charles S. Berensont,Peter Lance	1995	6
18	Electrical Properties of Chemical‐Mechanical Polished Tetraethyl Orthosilicate Films With and Without Capping Layers Journal of The Electrochemical Society ·S. A. Cohen,M. Jaso,A. A. Bright	1992	2
19	Low pressure chemical vapor deposition of oxide from SiH4/O2: Chemistry and effects on electrical properties Applied Physics Letters ·M. Liehr,S. A. Cohen	1992	32
20	SiO₂ Growth and Annealing by Lamp heating MRS Proceedings ·Z. A. Weinberg,T.N. Nguyen,S. A. Cohen,R. Kalish	1985	5

About S. A. Cohen

S. A. Cohen is a scholar working on Electronic, Optical and Magnetic Materials, Electrical and Electronic Engineering and Ceramics and Composites, having authored 47 papers that have together received 793 indexed citations. Recurring topics across this work include Semiconductor materials and devices (28 papers), Copper Interconnects and Reliability (27 papers), Semiconductor materials and interfaces (9 papers), Silicon and Solar Cell Technologies (6 papers), Integrated Circuits and Semiconductor Failure Analysis (6 papers), Metal and Thin Film Mechanics (5 papers), Advanced Surface Polishing Techniques (5 papers) and Advancements in Semiconductor Devices and Circuit Design (4 papers). The work is most often cited by research in Electronic, Optical and Magnetic Materials (269 citations), Electrical and Electronic Engineering (612 citations) and Mechanics of Materials (163 citations). S. A. Cohen has collaborated with scholars based in United States, Germany and Austria. Frequent co-authors include T. O. Sedgwick, V. R. Deline, A. E. Michel, J. B. Lasky, G. S. Oehrlein, Kenneth P. Rodbell, M. Liehr, Kelvin G. Lynn, B.P. Linder and Marc H. Weber. Their work appears in journals such as Journal of Biological Chemistry, Applied Physics Letters and Journal of Applied Physics.

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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