Maxime Darnon

1.5k citations

98 papers · 1.1k indexed · h-index 18

Impact in

Electronic, Optical and Magnetic Materials top 10%
- Copper Interconnects and Reliability
Electrical and Electronic Engineering top 5%
- Semiconductor materials and devices
- Plasma Diagnostics and Applications
- solar cell performance optimization
- Silicon and Solar Cell Technologies

Papers in ⓘ

Electronic, Optical and Magnetic Materials 29
- Copper Interconnects and Reliability 28
Electrical and Electronic Engineering 90
- Semiconductor materials and devices 45
- solar cell performance optimization 36
- Silicon and Solar Cell Technologies 19
- Plasma Diagnostics and Applications 18

Co-authors: O. Joubert (23 shared papers)T. Chevolleau (19 shared papers)S. Banna (6 shared papers)N. Possémé (16 shared papers)David Tormey (9 shared papers)Camille Petit‐Etienne (13 shared papers)Abdelatif Jaouad (32 shared papers)Maïté Volatier (28 shared papers)
Journals: Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena (13 papers)Journal of Vacuum Science & Technology A Vacuum Surfaces and Films (6 papers)Solar Energy Materials and Solar Cells (5 papers)IEEE Journal of Photovoltaics (3 papers)Energies (3 papers)
Partner nations: France Canada United States

In The Last Decade

Maxime Darnon

93 papers receiving 1.1k citations

Peers

Countries citing papers authored by Maxime Darnon

Since Specialization

Citations

This map shows the geographic impact of Maxime Darnon's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Maxime Darnon with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Maxime Darnon more than expected).

Fields of papers citing papers by Maxime Darnon

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Maxime Darnon. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Maxime Darnon. The network helps show where Maxime Darnon may publish in the future.

Co-authors

The 25 scholars most cited alongside Maxime Darnon, linked wherever they have co-authored with each other. Click a name or a connecting line to browse the papers they share.

Border = papers with Maxime Darnon Line = papers co-authored together Maxime Darnon links everyone, so they are left out of the graph.

All Works

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20 of 20 papers shown

Showing the 20 most-cited of 98 papers — load more, or switch the sort, to bring in the rest.

#	Work
1	Pulsed high-density plasmas for advanced dry etching processes Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ·S. Banna, Ankur Agarwal, Gilles Cunge, Maxime Darnon, Erwine Pargon, O. Joubert	2012	146
2	Mechanisms of porous dielectric film modification induced by reducing and oxidizing ash plasmas Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ·N. Possémé, T. Chevolleau, David Tormey, Maxime Darnon, O. Louveau, O. Joubert	2007	69
3	Reducing damage to Si substrates during gate etching processes by synchronous plasma pulsing Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ·Camille Petit‐Etienne, Maxime Darnon, Laurent Vallier, Erwine Pargon, Gilles Cunge, F. Boulard, O. Joubert, S. Banna, Thorsten Lill	2010	60
4	Toward Successful Integration of Porous Low-k Materials: Strategies Addressing Plasma Damage ECS Journal of Solid State Science and Technology ·Krystelle Lionti, Willi Volksen, Teddie Magbitang, Maxime Darnon, Géraud Dubois	2014	46
5	Undulation of sub-100nm porous dielectric structures: A mechanical analysis Applied Physics Letters ·Maxime Darnon, T. Chevolleau, O. Joubert, S. Maı̂trejean, J.-Ch. Barbé, J. Torres	2007	41
6	Evolution of Bulk c-Si Properties during the Processing of GaP/c-Si Heterojunction Cell Energy Procedia ·Renaud Varache, Maxime Darnon, Médéric Descazeaux, M. Martin, T. Baron, D. Muñoz	2015	33
7	Ion flux and ion distribution function measurements in synchronously pulsed inductively coupled plasmas Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ·M. Brihoum, Gilles Cunge, Maxime Darnon, David Gahan, O. Joubert, Nicholas Braithwaite	2013	32
8	Towards a controlled patterning of 10 nm silicon gates in high density plasmas Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ·E. Pargon, Maxime Darnon, O. Joubert, T. Chevolleau, L. Vallier, L. Mollard, Thorsten Lill	2005	25
9	Optimization of photovoltaic panel tilt angle for short periods of time or multiple reorientations Energy Conversion and Management X ·Yanis Prunier, David Chuet, Sylvain Nicolay, Gwénaëlle Hamon, Maxime Darnon	2023	24
10	Time-resolved ion flux, electron temperature and plasma density measurements in a pulsed Ar plasma using a capacitively coupled planar probe Plasma Sources Science and Technology ·Maxime Darnon, Gilles Cunge, Nicholas Braithwaite	2014	24
11	Impact of low-k structure and porosity on etch processes Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ·Maxime Darnon, Nicolas Casiez, T. Chevolleau, Géraud Dubois, Willi Volksen, T. Frot, R. Hurand, Thibaut L. David, N. Possémé, N. Rochat, Christophe Licitra	2012	24
12	Roughening of porous SiCOH materials in fluorocarbon plasmas Journal of Applied Physics ·F. Bailly, David Tormey, T. Chevolleau, Maxime Darnon, N. Possémé, R. Bouyssou, J. Ducoté, O. Joubert, Christophe Cardinaud	2010	24
13	Patterning of narrow porous SiOCH trenches using a TiN hard mask Microelectronic Engineering ·Maxime Darnon, T. Chevolleau, David Eon, R. Bouyssou, B. Pelissier, L. Vallier, O. Joubert, N. Possémé, David Tormey, F. Bailly, J. Torres	2008	23
14	Miniaturization of InGaP/InGaAs/Ge solar cells for micro‐concentrator photovoltaics Progress in Photovoltaics Research and Applications ·Pierre Albert, Abdelatif Jaouad, Gwénaëlle Hamon, Maïté Volatier, Christopher E. Valdivia, Yannick Deshayes, Karin Hinzer, Laurent Béchou, Vincent Aimez, Maxime Darnon	2021	21
15	Modifications of dielectric films induced by plasma ashing processes: Hybrid versus porous SiOCH materials Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ·Maxime Darnon, T. Chevolleau, David Tormey, N. Possémé, J. Ducoté, Christophe Licitra, L. Vallier, O. Joubert, J. Torres	2008	21
16	Silicon recess minimization during gate patterning using synchronous plasma pulsing Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ·Camille Petit‐Etienne, Erwine Pargon, Sylvain David, Maxime Darnon, Laurent Vallier, O. Joubert, S. Banna	2012	21
17	Atomic-scale silicon etching control using pulsed Cl2 plasma Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ·Camille Petit‐Etienne, Maxime Darnon, P. Bodart, Marc Fouchier, G. Cunge, Erwine Pargon, L. Vallier, O. Joubert, S. Banna	2012	20
18	Pulsed Cl₂/Ar inductively coupled plasma processing: 0D model versus experiments Journal of Physics D Applied Physics ·E. Despiau-Pujo, M. Brihoum, P. Bodart, Maxime Darnon, G. Cunge	2014	20
19	Influence of plasma process on III-V/Ge multijunction solar cell via etching Solar Energy Materials and Solar Cells ·Mathieu de Lafontaine, E. Pargon, Camille Petit‐Etienne, Guillaume Gay, Abdelatif Jaouad, Marie-Josée Gour, Maïté Volatier, S. Fafard, Vincent Aimez, Maxime Darnon	2019	17
20	Synchronous Pulsed Plasma for Silicon Etch Applications ECS Transactions ·Maxime Darnon, Camille Petit‐Etienne, Erwine Pargon, Gilles Cunge, L. Vallier, P. Bodart, Moritz Haas, S. Banna, Thorsten Lill, O. Joubert	2010	16

About Maxime Darnon

Maxime Darnon is a scholar working on Electronic, Optical and Magnetic Materials, Electrical and Electronic Engineering, Mechanics of Materials, Ceramics and Composites and Energy Engineering and Power Technology, having authored 98 papers that have together received 1.1k indexed citations. Recurring topics across this work include Semiconductor materials and devices (45 papers), solar cell performance optimization (36 papers), Copper Interconnects and Reliability (28 papers), Silicon and Solar Cell Technologies (19 papers), Plasma Diagnostics and Applications (18 papers), Metal and Thin Film Mechanics (16 papers), Nanowire Synthesis and Applications (15 papers) and Advanced Surface Polishing Techniques (12 papers). The work is most often cited by research in Electronic, Optical and Magnetic Materials (351 citations), Electrical and Electronic Engineering (951 citations), Mechanics of Materials (368 citations), Ceramics and Composites (29 citations) and Materials Chemistry (234 citations). Maxime Darnon has collaborated with scholars based in France, Canada and United States. Frequent co-authors include O. Joubert, T. Chevolleau, S. Banna, N. Possémé, David Tormey, Camille Petit‐Etienne, Abdelatif Jaouad, Maïté Volatier, Gilles Cunge and Willi Volksen. Their work appears in journals such as Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films, Solar Energy Materials and Solar Cells, IEEE Journal of Photovoltaics and Energies.

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