Sebastian Engelmann

2.8k total citations
107 papers, 2.3k citations indexed

About

Sebastian Engelmann is a scholar working on Electrical and Electronic Engineering, Materials Chemistry and Mechanics of Materials. According to data from OpenAlex, Sebastian Engelmann has authored 107 papers receiving a total of 2.3k indexed citations (citations by other indexed papers that have themselves been cited), including 100 papers in Electrical and Electronic Engineering, 20 papers in Materials Chemistry and 16 papers in Mechanics of Materials. Recurrent topics in Sebastian Engelmann's work include Semiconductor materials and devices (57 papers), Plasma Diagnostics and Applications (30 papers) and Photonic and Optical Devices (25 papers). Sebastian Engelmann is often cited by papers focused on Semiconductor materials and devices (57 papers), Plasma Diagnostics and Applications (30 papers) and Photonic and Optical Devices (25 papers). Sebastian Engelmann collaborates with scholars based in United States, Japan and Canada. Sebastian Engelmann's co-authors include Robert L. Bruce, G. S. Oehrlein, Eric Joseph, Dominik Metzler, David B. Graves, D. Nest, Tymon Barwicz, F. Weilnboeck, Swetha Kamlapurkar and Marwan Khater and has published in prestigious journals such as The Journal of Chemical Physics, ACS Nano and Applied Physics Letters.

In The Last Decade

Sebastian Engelmann

104 papers receiving 2.2k citations

Peers

Countries citing papers authored by Sebastian Engelmann

Since Specialization

Citations

This map shows the geographic impact of Sebastian Engelmann's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Sebastian Engelmann with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Sebastian Engelmann more than expected).

Fields of papers citing papers by Sebastian Engelmann

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Sebastian Engelmann. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Sebastian Engelmann. The network helps show where Sebastian Engelmann may publish in the future.

Co-authorship network of co-authors of Sebastian Engelmann

This figure shows the co-authorship network connecting the top 25 collaborators of Sebastian Engelmann. A scholar is included among the top collaborators of Sebastian Engelmann based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with Sebastian Engelmann. Sebastian Engelmann is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

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20 of 20 papers shown

#	Work	Indexed citations
1	The 2021 release of the Quantemol database (QDB) of plasma chemistries and reactions 2022 ·Plasma Sources Science and Technology ·Jonathan Tennyson, Sebastian Mohr, (unknown), (unknown), (unknown), (unknown), Bingqing Liu, L. L. Alves, Klaus Bartschat, Annemie Bogaerts, Sebastian Engelmann, Timo Gans, Andrew Gibson, Satoshi Hamaguchi, (unknown), C. Hill, Deborah O’Connell, Shahid Rauf, Kevin van ’t Veer, Oleg Zatsarinny	16
2	Significance of plasma-photoresist interactions for atomic layer etching processes with extreme ultraviolet photoresist 2020 ·Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ·(unknown), (unknown), Sebastian Engelmann, Robert L. Bruce, Eric Joseph, Dominik Metzler, G. S. Oehrlein	6
3	Advances in Interfacing Optical Fibers to Nanophotonic Waveguides Via Mechanically Compliant Polymer Waveguides 2020 ·IEEE Journal of Selected Topics in Quantum Electronics ·Tymon Barwicz, Alexander Janta-Polczynski, (unknown), Kengo Watanabe, Richard N. Langlois, Yoichi Taira, (unknown), Hidetoshi Numata, Bo Peng, Swetha Kamlapurkar, Sebastian Engelmann, Paul Fortier, Nicolas Boyer	15
4	Selective atomic layer etching of HfO2 over silicon by precursor and substrate-dependent selective deposition 2020 ·Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ·(unknown), Chen Li, Sebastian Engelmann, Robert L. Bruce, Eric Joseph, Dominik Metzler, G. S. Oehrlein	19
5	Integrated Metamaterial Interfaces for Self-Aligned Fiber-to-Chip Coupling in Volume Manufacturing 2018 ·IEEE Journal of Selected Topics in Quantum Electronics ·Tymon Barwicz, Bo Peng, (unknown), Alexander Janta-Polczynski, Thomas Houghton, Marwan Khater, Swetha Kamlapurkar, Sebastian Engelmann, Paul Fortier, Nicolas Boyer, William M. J. Green	41
6	Towards co-packaging of photonics and microelectronics in existing manufacturing facilities 2018 ·(unknown), Yoichi Taira, (unknown), Swetha Kamlapurkar, Sebastian Engelmann, Paul Fortier, Nicolas Boyer, Tymon Barwicz, Alexander Janta-Polczynski, (unknown), (unknown), (unknown), Richard N. Langlois, (unknown)	6
7	Experimental realization of deep-subwavelength confinement in dielectric optical resonators 2018 ·Science Advances ·Shuren Hu, Marwan Khater, Rafael Salas‐Montiel, E. Kratschmer, Sebastian Engelmann, William M. J. Green, Sharon M. Weiss	125
8	High performance PMOS with strained high-Ge-content SiGe fins for advanced logic applications 2017 ·Pouya Hashemi, Takashi Ando, Karthik Balakrishnan, Siyuranga O. Koswatta, (unknown), J. A. Ott, K. Chan, J. Bruley, Sebastian Engelmann, Vijay Narayanan, E. Leobandung, (unknown)	6
9	Effects of ultraviolet and vacuum ultraviolet synchrotron radiation on organic underlayers to modulate line-edge roughness of fine-pitch poly-silicon patterns 2017 ·Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ·Hiroyuki Miyazoe, Sebastian Engelmann, Michael Guillorn, (unknown), Weiyi Li, (unknown), J. L. Shohet, Nicholas Fuller	3
10	Novel, High-Throughput, Fiber-to-Chip Assembly Employing Only Off-the-Shelf Components 2017 ·Nicolas Boyer, Alexander Janta-Polczynski, (unknown), (unknown), (unknown), Swetha Kamlapurkar, Sebastian Engelmann, Paul Fortier, Tymon Barwicz	17
11	A Novel Approach to Photonic Packaging Leveraging Existing High-Throughput Microelectronic Facilities 2016 ·IEEE Journal of Selected Topics in Quantum Electronics ·Tymon Barwicz, Yoichi Taira, (unknown), Nicolas Boyer, Yves Martin, Hidetoshi Numata, Jae-Woong Nah, (unknown), Alexander Janta-Polczynski, (unknown), (unknown), Marwan Khater, Swetha Kamlapurkar, Sebastian Engelmann, Yurii A. Vlasov, Paul Fortier	71
12	He plasma pretreatment of organic masking materials for performance improvement during pattern transfer by plasma etching 2016 ·Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ·Dominik Metzler, F. Weilnboeck, Sebastian Engelmann, Robert L. Bruce, G. S. Oehrlein	5
13	Evaluation of ALE processes for patterning 2016 ·Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·(unknown), Nathan Marchack, Robert L. Bruce, Hiroyuki Miyazoe, Sebastian Engelmann, Eric Joseph	2
14	First demonstration of high-Ge-content strained-Si<inf>1−x</inf>Ge<inf>x</inf> (x=0.5) on insulator PMOS FinFETs with high hole mobility and aggressively scaled fin dimensions and gate lengths for high-performance applications 2014 ·Pouya Hashemi, Karthik Balakrishnan, Sebastian Engelmann, J. A. Ott, A. Khakifirooz, Ashish Baraskar, Marinus Hopstaken, J. Newbury, K. Chan, E. Leobandung, (unknown), Dae-Gyu Park	22
15	Assembly of mechanically compliant interfaces between optical fibers and nanophotonic chips 2014 ·Tymon Barwicz, Yoichi Taira, Hidetoshi Numata, Nicolas Boyer, (unknown), Swetha Kamlapurkar, (unknown), Simon Laflamme, Sebastian Engelmann, Yurii A. Vlasov, Paul Fortier	24
16	Density scaling with gate-all-around silicon nanowire MOSFETs for the 10 nm node and beyond 2013 ·Sarunya Bangsaruntip, Karthik Balakrishnan, (unknown), Josephine Chang, Markus Brink, Isaac Lauer, Robert L. Bruce, Sebastian Engelmann, A. Pyzyna, G. M. Cohen, Lynne Gignac, Chris Breslin, J. Newbury, D. Klaus, A. Majumdar, J.W. Sleight, Michael Guillorn	79
17	The effects of plasma exposure on low- k dielectric materials 2012 ·Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·J. L. Shohet, Ren He, (unknown), (unknown), (unknown), (unknown), Qinghuang Lin, (unknown), (unknown), G. A. Antonelli, Sebastian Engelmann, Nicholas Fuller, (unknown), Yoshio Nishi	3
18	Scaling of SOI FinFETs down to fin width of 4 nm for the 10nm technology node 2011 ·Symposium on VLSI Technology ·Josephine Chang, Michael Guillorn, P. M. Solomon, (unknown), Sebastian Engelmann, A. Pyzyna, J. A. Ott, Wilfried Haensch	11
19	Hydrogen silsesquioxane-based hybrid electron beam and optical lithography for high density circuit prototyping 2009 ·Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ·(unknown), (unknown), (unknown), J. Patel, Maxime Darnon, A. Pyzyna, Eric Joseph, Sebastian Engelmann, J. A. Ott, J. Newbury, (unknown), (unknown), Pranav Joshi, (unknown), (unknown), Wendy Graham, (unknown), Jürgen Parisi, Y. Zhang, (unknown)	10
20	Studies of plasma surface interactions during short time plasma etching of 193 and 248nm photoresist materials 2006 ·Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ·Xuefeng Hua, Sebastian Engelmann, G. S. Oehrlein, Ping Jiang, P. Lazzeri, Erica Iacob, M. Anderle	39

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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