Jo Finders

1.6k citations

128 papers · 1.1k indexed · h-index 18

Impact in

Surfaces, Coatings and Films top 1%
- Electron and X-Ray Spectroscopy Techniques
- Optical Coatings and Gratings
Electrical and Electronic Engineering top 5%
- Advancements in Photolithography Techniques
- Integrated Circuits and Semiconductor Failure Analysis

Papers in

Surfaces, Coatings and Films 54
- Electron and X-Ray Spectroscopy Techniques 42
- Optical Coatings and Gratings 13
Electrical and Electronic Engineering 117
- Advancements in Photolithography Techniques 105
- Integrated Circuits and Semiconductor Failure Analysis 64
- Semiconductor materials and devices 10

Co-authors: Mircea Dusa Claire van Lare Frank Timmermans Eelco van Setten J. Geurts Sander F. Wuister Koen van Ingen Schenau A. Köhl
Journals: Journal of Micro/Nanolithography MEMS and MOEMS (5 papers)Journal of Crystal Growth (3 papers)Japanese Journal of Applied Physics (2 papers)Materials Science and Engineering B (2 papers)Journal of Electronic Materials (1 paper)
Partner nations: Netherlands Germany Belgium

In The Last Decade

Jo Finders

123 papers receiving 1.0k citations

Peers

Countries citing papers authored by Jo Finders

Since Specialization

Citations

This map shows the geographic impact of Jo Finders's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Jo Finders with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Jo Finders more than expected).

Fields of papers citing papers by Jo Finders

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Jo Finders. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Jo Finders. The network helps show where Jo Finders may publish in the future.

Co-authorship network

The 25 scholars most cited alongside Jo Finders, linked wherever they have co-authored with each other. Click a name or a connecting line to browse the papers they share.

Border = papers with Jo Finders Line = papers co-authored together Jo Finders links everyone, so they are left out of the graph.

All Works

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20 of 20 papers shown

#	Work
1	Controlling the resist profile in EUV imaging using source mask optimization 博史小山, طلال الزهيري, Francesco Raffaello, Chi-Hung Chiang, James Lee, Т. В. Ицкович, Jo Finders	2025	0
2	High-NA EUV imaging in action: tackling the depth-of-focus challenge for superior resolution and LCDU Eelco van Setten, Shuang Jiao, (unknown), طلال الزهيري, (unknown), 博史小山, Rashid Ghorbani Afkhami, Jan van Schoot, Jo Finders, 敏子米川, I. F. Nazmiev, Lang Zhang, Stephen Hsu, Martin Duffy	2025	0
3	Holistic assessment and control of total CDU Jo Finders, Т. В. Ицкович, G. G. Sahasrabudhe, Ruben Maas, Matteo Iervolino, C. Cassadou, S. Ulbrand, Eelco van Setten, Claire van Lare	2024	1
4	Enhancing lithography precision: characterizing resist profiles in semiconductor manufacturing with rapid probe microscopy Xuhao Zhao, Vishal Panchal, Richard Thorogate, Ione de Brito-Ashurst, Ao Yu, Andrew D. L. Humphris, Т. В. Ицкович, Jo Finders	2024	2
5	Fundamental understanding and experimental verification of bright versus dark field imaging Natalia Davydova, Jo Finders, J. Zgadzaj, Eelco van Setten, Claire van Lare, Joern-Holger Franke, Andreas Frommhold, 昇松村, Aphroditi Avdelidou, Andreas Verch, Tetsuhiko Maeda, L® thi Bich-Thuy, Timon Fliervoet	2020	12
6	E-beam based EUV mask characterization for studying mask induced wafer effects Т. В. Ицкович, Qing Tian, Emily Gallagher, Sandra Viberg, Jo Finders, Yuan Wang, Jan Mulkens, 山本広一, Kevin W. Gao	2018	2
7	Influence of litho patterning on DSA placement errors Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Sander F. Wuister, O. Mukasa, Riski Dwi Rahayu, Jing Yan Liu, K Hooftman, Jo Finders	2014	12
8	Driving imaging and overlay performance to the limits with advanced lithography optimization Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Jan Mulkens, Jo Finders, Rupali B Patle, Paul Hinnen, Yuan Wang, V K Reshma	2012	5
9	Impact of reticle absorber on the imaging properties in ArFi lithography Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Jo Finders, 冨田雄一, Matthew T. Strickland, A.K.Y. Ngai, Takaaki Kuniya, Ondřej Pacák, Hierro Hasller Freitas de Azevedo, José Manuel Molina-Villar, Masaru HIGUCHI, 马腾跃, 啓泉田, Moch Aziz Burhanudin, Walton Fehr, The Texas Bank and Trust Company, Jeffrey M. Kozma, Mark Bovens	2012	5
10	Mask 3D effects: impact on imaging and placement Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Jo Finders, 郝勇 Hao Yong	2011	20
11	Imaging enhancements by polarized illumination: theory and experimental verification Shanmugapriya Shanmugam, 牛吉峰, Wei Xinhong, Mark van de Kerkhof, Л А Дахно, Haico Kok, G. H. P. M. Swinkels, Jo Finders, Jan Mulkens, Thyago Thallyson da Silva Pinto, Tilmann Heil	2005	8
12	Optimizing and enhancing optical systems to meet the low k 1 challenge Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Donis G. Flagello, Robert Socha, Xuelong Shi, Hermann Dersch, 俞惠良, Mark van de Kerkhof, 牛吉峰, 李万忍, Tetsuhiko Maeda, O.F.J. Noordman, M.H.P. Moers, P Bauer, Jo Finders, Alexey M. Litovchenko, K. Ajeena, Alison L. Crocker, H. Haidner, Lucile Bennassar, Furio Radin, Paul Graeupner	2003	18
13	65-nm full-chip implementation using double dipole lithography Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Stephen D. H. Hsu, M.Y. Shevtsov, T. J. A., Md. Shabbir Ajam Ulubbi, Reeta Talka, 胡乐安, D. Picchio, Xuelong Shi, Alessandra Forti, Sukanto Sukanto, Jo Finders, Antoine Younan, Robert Socha, Will Conley, José M. Moreno-Nogueira, Muhammad Adriansyah Hasbad, Petar	2003	7
14	Aberration's impact on subresolution contact hole process windows in ultrathin imaging resist Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Molly Kathleen Powers, Jo Finders, Mircea Dusa	2003	0
15	<title>Low-k1 imaging: how low can we go?</title> Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Jo Finders, Sukanto Sukanto, Koen van Ingen Schenau, Mircea Dusa, Peter Jenkins	2000	5
16	Mask error factor: causes and implications for process latitude Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Hermann Dersch, Jo Finders, Koen van Ingen Schenau, Takashi Karasaki, Jun Pablo H. Kindica	1999	22
17	Proximity Effects Correction for Advanced Optical Lithography Processes Japanese Journal of Applied Physics ·Alexander Tritchkov, Jo Finders, John N. Randall, Kurt Ronse, 常森寛行	1998	1
18	Interfaces of InGaAs/InP multi quantum wells studied by raman spectroscopy physica status solidi (a) ·J. Geurts, R Trautwein, Jo Finders, A. Köhl, K. Heime	1995	5
19	The n-type doping of and growth of two-dimensional electron gas structures with DEAlH-NMe3 as Al source Journal of Crystal Growth ·R. Hövel, John R. Vanderkolk, Копылова Алеся Викторовна, H. Zörnig, J. Woitok, Jo Finders, K. Heime	1995	1
20	Composition of selectively grown InxGa1−xAs structures from locally resolved Raman spectroscopy Journal of Crystal Growth ·Jo Finders, J. Geurts, A. Köhl, M. Weyers, Lucía Gabriela Barbu, Oliver Kayser, P. Balk	1991	50

About Jo Finders

Jo Finders is a scholar working on Surfaces, Coatings and Films, Electrical and Electronic Engineering, Biomedical Engineering, Structural Biology and Industrial and Manufacturing Engineering, having authored 128 papers that have together received 1.1k indexed citations. Recurring topics across this work include Advancements in Photolithography Techniques (105 papers), Integrated Circuits and Semiconductor Failure Analysis (64 papers), Electron and X-Ray Spectroscopy Techniques (42 papers), Advanced Surface Polishing Techniques (17 papers), Optical Coatings and Gratings (13 papers), Semiconductor Quantum Structures and Devices (11 papers), Semiconductor materials and devices (10 papers) and Nanofabrication and Lithography Techniques (9 papers). The work is most often cited by research in Surfaces, Coatings and Films (423 citations), Electrical and Electronic Engineering (1.0k citations), Radiation (134 citations), Structural Biology (14 citations) and Hardware and Architecture (52 citations). Jo Finders has collaborated with scholars based in Netherlands, Germany and Belgium. Frequent co-authors include Mircea Dusa, Claire van Lare, Frank Timmermans, Eelco van Setten, J. Geurts, Sander F. Wuister, Koen van Ingen Schenau, A. Köhl, Robert Socha and Jan van Schoot. Their work appears in journals such as Journal of Micro/Nanolithography MEMS and MOEMS, Journal of Crystal Growth, Japanese Journal of Applied Physics, Materials Science and Engineering B and Journal of Electronic Materials.

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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