Joern-Holger Franke

1.7k total citations
51 papers, 1.4k citations indexed

About

Joern-Holger Franke is a scholar working on Electrical and Electronic Engineering, Surfaces, Coatings and Films and Biomedical Engineering. According to data from OpenAlex, Joern-Holger Franke has authored 51 papers receiving a total of 1.4k indexed citations (citations by other indexed papers that have themselves been cited), including 48 papers in Electrical and Electronic Engineering, 23 papers in Surfaces, Coatings and Films and 11 papers in Biomedical Engineering. Recurrent topics in Joern-Holger Franke's work include Advancements in Photolithography Techniques (36 papers), Electron and X-Ray Spectroscopy Techniques (21 papers) and Integrated Circuits and Semiconductor Failure Analysis (16 papers). Joern-Holger Franke is often cited by papers focused on Advancements in Photolithography Techniques (36 papers), Electron and X-Ray Spectroscopy Techniques (21 papers) and Integrated Circuits and Semiconductor Failure Analysis (16 papers). Joern-Holger Franke collaborates with scholars based in Belgium, Netherlands and Germany. Joern-Holger Franke's co-authors include Harald Fuchs, Dingyong Zhong, Armido Studer, Hendrik Wagner, Hong‐Ying Gao, Lifeng Chi, Haiming Zhang, T. Blömker, Gerald Kehr and Santhosh Kumar Podiyanachari and has published in prestigious journals such as Science, Physical Review Letters and Angewandte Chemie International Edition.

In The Last Decade

Joern-Holger Franke

46 papers receiving 1.3k citations

Peers — A (Enhanced Table)

Peers by citation overlap · career bar shows stage (early→late) cites · hero ref

Name h Career Trend Papers Cites
Joern-Holger Franke Belgium 13 926 893 678 446 170 51 1.4k
Yuan‐Qiu‐Qiang Yi China 24 1.6k 1.8× 330 0.4× 485 0.7× 390 0.9× 197 1.2× 57 2.0k
Atsushi Yokoo Japan 18 482 0.5× 372 0.4× 438 0.6× 385 0.9× 92 0.5× 52 977
Paul A. Staniec United Kingdom 17 917 1.0× 407 0.5× 412 0.6× 249 0.6× 125 0.7× 27 1.3k
Liangliang Cai China 19 551 0.6× 767 0.9× 613 0.9× 421 0.9× 143 0.8× 36 1.1k
Gabriela Borin Barin Switzerland 19 678 0.7× 553 0.6× 1.2k 1.8× 495 1.1× 159 0.9× 48 1.5k
Tomas Marangoni United States 17 433 0.5× 327 0.4× 790 1.2× 261 0.6× 193 1.1× 27 979
Leif Lafferentz Germany 5 721 0.8× 664 0.7× 510 0.8× 454 1.0× 49 0.3× 5 1.0k
Sybille Fischer Germany 14 642 0.7× 860 1.0× 629 0.9× 407 0.9× 106 0.6× 23 1.2k
Shuaigang Xiao United States 17 354 0.4× 319 0.4× 774 1.1× 124 0.3× 258 1.5× 29 989
Frank Palmino France 19 522 0.6× 538 0.6× 457 0.7× 577 1.3× 50 0.3× 77 1.1k

Countries citing papers authored by Joern-Holger Franke

Since Specialization
Citations

This map shows the geographic impact of Joern-Holger Franke's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Joern-Holger Franke with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Joern-Holger Franke more than expected).

Fields of papers citing papers by Joern-Holger Franke

Since Specialization
Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Joern-Holger Franke. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Joern-Holger Franke. The network helps show where Joern-Holger Franke may publish in the future.

Co-authorship network of co-authors of Joern-Holger Franke

This figure shows the co-authorship network connecting the top 25 collaborators of Joern-Holger Franke. A scholar is included among the top collaborators of Joern-Holger Franke based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with Joern-Holger Franke. Joern-Holger Franke is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

20 of 20 papers shown
1.
Lee, Inhwan, Joern-Holger Franke, Vicky Philipsen, et al.. (2025). Extending logic metal printing with sub-resolution grating in high and hyper NA EUV lithography. Lirias (KU Leuven). 39–39. 1 indexed citations
2.
Lee, Inhwan, Joern-Holger Franke, Vicky Philipsen, et al.. (2025). Study on Next-Generation EUV Lithography Technology: Hyper NA, the Highest Potential for Practical Implementation. ACS Applied Materials & Interfaces. 17(33). 47719–47735.
3.
Philipsen, Vicky, Andreas Frommhold, Inhwan Lee, et al.. (2024). Mask innovations on the eve of high NA EUV lithography. Japanese Journal of Applied Physics. 63(4). 40804–40804. 2 indexed citations
4.
5.
Lee, Inhwan, Joern-Holger Franke, Vicky Philipsen, et al.. (2024). Sub-resolution grating as an option for mask 3D effect mitigation in anamorphic imaging system. Journal of Micro/Nanopatterning Materials and Metrology. 24(1). 2 indexed citations
6.
7.
Franke, Joern-Holger, Timothy A. Brunner, & Eric Hendrickx. (2022). Dual monopole exposure strategy to improve extreme ultraviolet imaging. Journal of Micro/Nanopatterning Materials and Metrology. 21(3). 12 indexed citations
8.
Brunner, Timothy A., et al.. (2022). Image contrast metrology for EUV lithography. 9422. 16–16. 4 indexed citations
9.
Gao, Weimin, Eric Hendrickx, Vincent Wiaux, et al.. (2022). Resist and reticle activities towards High-NA EUV ecosystem readiness. 7–7. 5 indexed citations
10.
Frommhold, Andreas, et al.. (2021). Pupil optimization for after etch defectivity: what imaging metrics matter?. 11517. 33–33. 2 indexed citations
11.
Franke, Joern-Holger, Andreas Frommhold, Natalia Davydova, et al.. (2021). Metal layer single EUV expose at pitch 28: how bright field and NTD resist advantages align. 27–27. 8 indexed citations
12.
Franke, Joern-Holger, Natalia Davydova, Joost Bekaert, et al.. (2020). Tomorrow’s pitches on today’s 0.33 NA scanner: pupil and imaging conditions to print P24 L/S and P28 contact holes. 39–39. 7 indexed citations
13.
Davydova, Natalia, Jo Finders, Eelco van Setten, et al.. (2020). Fundamental understanding and experimental verification of bright versus dark field imaging. 22–22. 12 indexed citations
14.
Clark, William F., Benjamin Vincent, Joern-Holger Franke, et al.. (2018). Self-aligned block and fully self-aligned via for iN5 metal 2 self-aligned quadruple patterning. 10149. 29–29. 6 indexed citations
15.
Rio, David del, Joern-Holger Franke, Mircea Dusa, et al.. (2018). EUV pupil optimization for 32nm pitch logic structures. 10143. 66–66. 2 indexed citations
16.
Franke, Joern-Holger, et al.. (2017). EPE analysis of sub-N10 BEoL flow with and without fully self-aligned via using Coventor SEMulator3D. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 10145. 1014529–1014529. 7 indexed citations
17.
Franke, Joern-Holger, et al.. (2015). Thermal stability of thermoelectric CoSb3 skutterudite thin films. Thin Solid Films. 589. 203–208. 13 indexed citations
18.
Franke, Joern-Holger & Daniel S. Kosov. (2015). Adsorption and ring-opening of lactide on the chiral metal surface Pt(321)S studied by density functional theory. The Journal of Chemical Physics. 142(4). 44703–44703. 2 indexed citations
19.
Gao, Hong‐Ying, Hendrik Wagner, Dingyong Zhong, et al.. (2013). Glaser Coupling at Metal Surfaces. Angewandte Chemie International Edition. 52(14). 4024–4028. 289 indexed citations
20.
Atodiresei, Nicolae, Vasile Caciuc, Joern-Holger Franke, & Stefan Blügel. (2008). Role of the van der Waals interactions on the bonding mechanism of pyridine on Cu(110) and Ag(110) surface: First-principles study. Physical Review B. 78(4). 51 indexed citations

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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