Gregory McIntyre

421 citations

39 papers · 275 indexed · h-index 10

Impact in

Surfaces, Coatings and Films top 5%
- Electron and X-Ray Spectroscopy Techniques
- Optical Coatings and Gratings
Electrical and Electronic Engineering
- Advancements in Photolithography Techniques
- Integrated Circuits and Semiconductor Failure Analysis

Papers in

Surfaces, Coatings and Films 24
- Electron and X-Ray Spectroscopy Techniques 17
- Optical Coatings and Gratings 7
Industrial and Manufacturing Engineering 9
- Industrial Vision Systems and Defect Detection 9

Co-authors: Emily Gallagher Andrew R. Neureuther Obert R. Wood Martin Burkhardt Chiew-Seng Koay Karen Badger Jongwook Kye Harry Levinson
Journals: Journal of Micro/Nanolithography MEMS and MOEMS (1 paper)Journal of Modern Optics (1 paper)UC Berkeley (1 paper)Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena (3 papers)Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE (31 papers)
Partner nations: United States Japan Belgium

In The Last Decade

Gregory McIntyre

34 papers receiving 251 citations

Peers

Countries citing papers authored by Gregory McIntyre

Since Specialization

Citations

This map shows the geographic impact of Gregory McIntyre's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Gregory McIntyre with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Gregory McIntyre more than expected).

Fields of papers citing papers by Gregory McIntyre

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Gregory McIntyre. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Gregory McIntyre. The network helps show where Gregory McIntyre may publish in the future.

Co-authorship network

The 25 scholars most cited alongside Gregory McIntyre, linked wherever they have co-authored with each other. Click a name or a connecting line to browse the papers they share.

Border = papers with Gregory McIntyre Line = papers co-authored together Gregory McIntyre links everyone, so they are left out of the graph.

All Works

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20 of 20 papers shown

#	Work
1	DTCO at N7 and beyond: patterning and electrical compromises and opportunities Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Julien Ryckaert, Praveen Raghavan, P. Schuddinck, Trong Huynh-Bao, Arindam Mallik, Antoine Ginésy, Khotsianova Sa, Yasser Sherazi, Philippe Leray, A. Mercha, J. Bömmels, Gregory McIntyre, Kurt Ronse, Aaron Thean, Zsolt Tökei, An Steegen, Diederik Verkest	2015	26
2	Learning from native defects on EUV mask blanks Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Emily Gallagher, Alfred Wagner, Małgorzata Korbińska, Gregory McIntyre, Meytty Pattikawa, Amran M. Al-Erjan, A. Bassi	2014	10
3	Evaluation of non-actinic EUV mask inspection and defect printability on multiple EUV mask absorbers Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Karen Badger, Emily Gallagher, Meytty Pattikawa, Gregory McIntyre, Muthusamy Vijayalakshmi, Jorge Mario Cardona Alvarez, Wnuck	2013	5
4	Through-focus EUV multilayer defect repair with nanomachining Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Gregory McIntyre, Emily Gallagher, 東山雄一, Mi C, Małgorzata Korbińska, Benamy Turkienicz, K. Gjerde, S. A. Antonov, Bongsoon Nam	2013	12
5	Reflecting on inspectability and wafer printability of multiple EUV mask absorbers Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Meytty Pattikawa, Karen Badger, Emily Gallagher, Gregory McIntyre, Muthusamy Vijayalakshmi, Jorge Mario Cardona Alvarez, Satoshi Takahashi, Wnuck	2013	3
6	Enabling reverse tone imaging for via levels using attenuated phase shift mask and source optimization Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Bassem Hamieh, A.J. de Jongh, Mingga Hermaliza, Wei Guo, Derwin Riko, Wilson H. Marhin, Gregory McIntyre, M. InbarI, Gomes Lisboa, Alan C. Thomas, Alexander Wei	2013	1
7	Shedding light on EUV mask inspection Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Meytty Pattikawa, Karen Badger, Emily Gallagher, Muthusamy Vijayalakshmi, Gregory McIntyre	2012	3
8	Qualification, monitoring, and integration into a production environment of the world's first fully programmable illuminator Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Gregory McIntyre, Daniel Corliss, Jana Neusarová, Tetsuhiko Maeda, Reese Loebick, Андреева И. В., Flaminia Gianturco, Rachida Elouafi, Chez W. Smith, Jeremy Woods, Chris Robinson, Ibrahim Fadel Elmola Elbashir, Richard Johnson, Scott Halle, Ryoung-Han Kim, Erin Mclellan, Hirokazu Katō, Martens Quispe, Anupama Choudhary, Sonya Futri Ramafina	2011	4
9	Evaluation of the accuracy of complex illuminator designs Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·M. Hibbs, Jaione Tirapu-Azpiroz, Meytty Pattikawa, Gregory McIntyre, 籏智武志	2011	0
10	The trade-offs between thin and thick absorbers for EUV photomasks Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Gregory McIntyre, M. Sohail Tiki, Emily Gallagher, J.M. Becerril, Gideon Lincecum	2011	4
11	Understanding the trade-offs of thinner binary mask absorbers Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Jaione Tirapu-Azpiroz, Gregory McIntyre, Gérard Lomenec'h, Scott Halle, M. Hibbs, Alfred Wagner, Kafai Lai, Emily Gallagher, Timothy A. Brunner	2010	2
12	Flare evaluation of ASML alpha demo tool Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Hiroyuki Mizuno, Gregory McIntyre, Chiew-Seng Koay, Martin Burkhardt, Bruno La Fontaine, Obert R. Wood	2009	8
13	Integration of EUV lithography in the fabrication of 22-nm node devices Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Obert R. Wood, Chiew-Seng Koay, Karen Petrillo, Hiroyuki Mizuno, Ю. В. Єжов, John Arnold, 哲史飯村, Martin Burkhardt, Gregory McIntyre, Yunfei Deng, Bruno La Fontaine, Uzodinma Okoroanyanwu, 양이슬, Tom Wallow, Wenjun Zhong, Matthew Colburn, Nancey GreenLeigh, Bala S. Haran, Eugenia Friedman	2009	40
14	Resist-based polarization monitoring for 193nm high-numerical aperture lithography Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·六郎山辺, Gregory McIntyre	2008	0
15	Monitoring polarization at 193nm high-numerical aperture with phase shift masks: experimental results and industrial outlook Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Gregory McIntyre, 六郎山辺	2008	1
16	Characterizing polarized illumination in high numerical aperture optical lithography with phase shifting masks UC Berkeley ·Gregory McIntyre	2006	0
17	Layout 'hot spots' for advancing optical technologies Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Sukei Kyo, Gregory McIntyre, Zwesty Kendah Asih, Andrew R. Neureuther	2006	3
18	Polarization aberration analysis in optical lithography systems Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Jongwook Kye, Gregory McIntyre, Denis N. Lysykh, Harry Levinson	2006	22
19	Screening layouts for high-numerical aperture and polarization effects using pattern matching Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ·Gregory McIntyre, Sukei Kyo, Andrew R. Neureuther, Luigi Capodieci, Yi Ming Zou, Harry Levinson, Jongwook Kye	2005	3
20	Monitoring polarization and high-numerical aperture with phase shifting masks: Radial phase grating Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ·Gregory McIntyre, Andrew R. Neureuther	2005	5

About Gregory McIntyre

Gregory McIntyre is a scholar working on Surfaces, Coatings and Films, Industrial and Manufacturing Engineering, Electrical and Electronic Engineering, Mechanical Engineering and Computational Mechanics, having authored 39 papers that have together received 275 indexed citations. Recurring topics across this work include Advancements in Photolithography Techniques (36 papers), Electron and X-Ray Spectroscopy Techniques (17 papers), Integrated Circuits and Semiconductor Failure Analysis (12 papers), Industrial Vision Systems and Defect Detection (9 papers), Optical Coatings and Gratings (7 papers), Advanced Measurement and Metrology Techniques (5 papers), Surface Roughness and Optical Measurements (4 papers) and Advanced Surface Polishing Techniques (3 papers). The work is most often cited by research in Surfaces, Coatings and Films (131 citations), Electrical and Electronic Engineering (247 citations), Industrial and Manufacturing Engineering (28 citations), Hardware and Architecture (16 citations) and Radiation (20 citations). Gregory McIntyre has collaborated with scholars based in United States, Japan and Belgium. Frequent co-authors include Emily Gallagher, Andrew R. Neureuther, Obert R. Wood, Martin Burkhardt, Chiew-Seng Koay, Karen Badger, Jongwook Kye, Harry Levinson, Zhengqing John Qi and Bruno La Fontaine. Their work appears in journals such as Journal of Micro/Nanolithography MEMS and MOEMS, Journal of Modern Optics, UC Berkeley, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena and Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE.

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