Timothy A. Brunner

2.2k total citations
104 papers, 1.7k citations indexed

About

Timothy A. Brunner is a scholar working on Electrical and Electronic Engineering, Surfaces, Coatings and Films and Biomedical Engineering. According to data from OpenAlex, Timothy A. Brunner has authored 104 papers receiving a total of 1.7k indexed citations (citations by other indexed papers that have themselves been cited), including 82 papers in Electrical and Electronic Engineering, 34 papers in Surfaces, Coatings and Films and 32 papers in Biomedical Engineering. Recurrent topics in Timothy A. Brunner's work include Advancements in Photolithography Techniques (78 papers), Integrated Circuits and Semiconductor Failure Analysis (29 papers) and Electron and X-Ray Spectroscopy Techniques (22 papers). Timothy A. Brunner is often cited by papers focused on Advancements in Photolithography Techniques (78 papers), Integrated Circuits and Semiconductor Failure Analysis (29 papers) and Electron and X-Ray Spectroscopy Techniques (22 papers). Timothy A. Brunner collaborates with scholars based in United States, Netherlands and Belgium. Timothy A. Brunner's co-authors include Neil Smith, David E. Pritchard, D. M. Barnett, P. H. Townsend, Richard D. Driver, David E. Pritchard, Richard A. Ferguson, S. L. Dexheimer, Christopher P. Ausschnitt and Carlos Fonseca and has published in prestigious journals such as Physical Review Letters, The Journal of Chemical Physics and Applied Physics Letters.

In The Last Decade

Timothy A. Brunner

99 papers receiving 1.5k citations

Peers

Countries citing papers authored by Timothy A. Brunner

Since Specialization

Citations

This map shows the geographic impact of Timothy A. Brunner's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Timothy A. Brunner with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Timothy A. Brunner more than expected).

Fields of papers citing papers by Timothy A. Brunner

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Timothy A. Brunner. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Timothy A. Brunner. The network helps show where Timothy A. Brunner may publish in the future.

Co-authorship network of co-authors of Timothy A. Brunner

This figure shows the co-authorship network connecting the top 25 collaborators of Timothy A. Brunner. A scholar is included among the top collaborators of Timothy A. Brunner based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with Timothy A. Brunner. Timothy A. Brunner is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

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20 of 20 papers shown

#	Work	Indexed citations
1	Acoustic resonances and aeroacoustic feedback mechanisms occurring at a deep cavity with an overhanging lip 2025 ·Journal of Sound and Vibration ·Timothy A. Brunner, (unknown), (unknown), Stefan Schoder	1
2	Dual monopole exposure strategy to improve extreme ultraviolet imaging 2022 ·Journal of Micro/Nanopatterning Materials and Metrology ·Joern-Holger Franke, Timothy A. Brunner, Eric Hendrickx	12
3	Evaluation of EUV mask impacts on wafer line-edge roughness using aerial and SEM image analyses (Conference Presentation) 2018 ·Timothy A. Brunner, (unknown), Martin Dietzel, Xuemei Chen, (unknown), Obert R. Wood, (unknown), (unknown)	2
4	Level crossing methodology applied to line-edge roughness characterization 2017 ·Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Chris A. Mack, Timothy A. Brunner, Xuemei Chen, (unknown)	2
5	Layout optimization method to equalize the best-focus position of different patterns 2014 ·Journal of Micro/Nanopatterning Materials and Metrology ·Jaione Tirapu-Azpiroz, Alan E. Rosenbluth, Timothy A. Brunner	2
6	Scatterometry-based on-product focus measurement and monitoring 2013 ·Paul Hinnen, Vivien Wang, (unknown), (unknown), (unknown), C.M. Leewis, Timothy A. Brunner, (unknown), (unknown)	3
7	Dose-focus monitor technique using CD-SEM and application to local variation analysis 2012 ·Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·(unknown), Timothy A. Brunner, Scott Halle, (unknown), Takeshi Kato, Atsuko Yamaguchi	1
8	A new long range proximity effect in chemically amplified photoresist processes: chemical flare 2005 ·Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Timothy A. Brunner, (unknown), Kuang‐Jung Chen, (unknown)	8
9	Full-field imaging with a 157-nm scanner 2004 ·Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Chris Robinson, (unknown), (unknown), Timothy A. Brunner, M. Hibbs, Michael J. Lercel, (unknown), (unknown), (unknown), (unknown), (unknown)	1
10	Hardmask technology for sub-100 nm lithographic imaging 2003 ·Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Katherina Babich, Arpan P. Mahorowala, David R. Medeiros, Dirk Pfeiffer, Karen Petrillo, Marie Angelopoulos, A. Grill, V. Patel, Scott Halle, Timothy A. Brunner, Rena M. Conti, Scott D. Allen, Richard Wise	20
11	Pushing the limits of lithography for IC production 2002 ·Timothy A. Brunner	6
12	High-NA lithographic imagery at Brewster's angle 2002 ·Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Timothy A. Brunner, (unknown), William D. Hinsberg, John A. Hoffnagle, Frances A. Houle, Martha I. Sanchez	11
13	Reduction of linewidth variation over reflective topography 1992 ·Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·(unknown), (unknown), Timothy A. Brunner	12
14	<title>Optimization of optical properties of resist processes</title> 1991 ·Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Timothy A. Brunner	27
15	Pattern-dependent overlay error in optical step and repeat projection lithography 1988 ·Microelectronic Engineering ·Timothy A. Brunner	4
16	Low Voltage Sem Metrology For Pilot Line Applications 1987 ·Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·(unknown), (unknown), (unknown), Timothy A. Brunner, (unknown)	0
17	Elastic relationships in layered composite media with approximation for the case of thin films on a thick substrate 1987 ·Journal of Applied Physics ·P. H. Townsend, D. M. Barnett, Timothy A. Brunner	309
18	Characterization And Setup Techniques For A 5X Stepper 1986 ·Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Timothy A. Brunner, (unknown)	1
19	In Situ Resolution and Overlay Measurement on a Stepper 1986 ·Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Timothy A. Brunner, Robert R. Allen	0
20	Origins of power law behavior in rotationally inelastic collisions 1982 ·The Journal of Chemical Physics ·Timothy A. Brunner, (unknown), David E. Pritchard	23

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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