M. Steen

1.7k citations

21 papers · 1.2k indexed · h-index 13

Surfaces, Coatings and Films top 2%
- Surface Modification and Superhydrophobicity 3
Water Science and Technology top 5%
- Membrane Separation Technologies 4
Electrical and Electronic Engineering top 10%
- Semiconductor materials and devices 11
- Advancements in Semiconductor Devices and Circuit Design 8
- Plasma Diagnostics and Applications 3
Biomaterials top 10%
Biomedical Engineering top 10%
Mechanics of Materials
- Metal and Thin Film Mechanics 4
Electronic, Optical and Magnetic Materials
- Copper Interconnects and Reliability 3
Radiology, Nuclear Medicine and Imaging
- Plasma Applications and Diagnostics 2

Co-authors: Ellen R. Fisher David G. Castner Carmen I. Butoi Dattatray S. Wavhal Jianming Zhang R. Carruthers Stacey F. Bent T. Dalton
Cited by: Surfaces, Coatings and Films Water Science and Technology Electrical and Electronic Engineering
Journals: Journal of Membrane Science (3 papers)IEEE Electron Device Letters (2 papers)Chemistry of Materials (1 paper)
Partner nations: United States Canada

In The Last Decade

M. Steen

21 papers receiving 1.1k citations

Peers

Countries citing papers authored by M. Steen

Since Specialization

Citations

This map shows the geographic impact of M. Steen's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by M. Steen with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites M. Steen more than expected).

Fields of papers citing papers by M. Steen

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by M. Steen. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by M. Steen. The network helps show where M. Steen may publish in the future.

Co-authorship network

The 25 scholars most cited alongside M. Steen, linked wherever they have co-authored with each other. Click a name or a connecting line to browse the papers they share.

Border = papers with M. Steen Line = papers co-authored together M. Steen links everyone, so they are left out of the graph.

All Works

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20 of 20 papers shown

#	Work
1	Enhanced Professional Networking and its Impact on Personal Development and Business Success Bernhard Lachenmayr,E Jugy,Catherine A. Chess,Kate Ehrlich,Maria Eleftheriou,Mary E. Helander,Abdülkadi Özgür,Mim. Mohideen,Haishan Wan,Andresa Melo,Jane Snowdon,M. Steen,Anna W. Topol	2008	1
2	Investigation of Gas Phase Species and Deposition of SiO₂ Films from HMDSO/O₂ Plasmas Plasma Processes and Polymers ·Dattatray S. Wavhal,Jianming Zhang,M. Steen,Ellen R. Fisher	2006	91
3	Process optimization for high electron mobility in nMOSFETs with aggressively scaled HfO/sub 2//metal stacks IEEE Electron Device Letters ·Vijay Narayanan,K. Maitra,B.P. Linder,Vamsi Paruchuri,E. P. Gusev,P. Jamison,Martin M. Frank,M. Steen,Berkay Günes,John Arnold,R. Carruthers,D. Lacey,E. Cartier	2006	35
4	Effect of plasma interactions with low-κ films as a function of porosity, plasma chemistry, and temperature Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ·Marcus A. Worsley,Stacey F. Bent,S. M. Gates,Nicholas Fuller,Willi Volksen,M. Steen,T. Dalton	2005	72
5	Charge trapping in aggressively scaled metal gate/high-κ stacks E. P. Gusev,Vijay Narayanan,Sufi Zafar,C. Cabral,K.H.T,N. A. Bojarczuk,Agnese Callegari,R. Carruthers,M. Chudzik,YU Shu-kui,Elizabeth A. Duch,P. Jamison,P. Kozlowski,Najem El Mahjoub El Garhia,K. Maitra,F. R. McFeely,J. Newbury,Vamsi Paruchuri,M. Steen	2005	8
6	Role of oxygen vacancies in V/sub BF//V/sub t/ stability of pFET metals on HfO/sub 2/ E. Cartier,F. R. McFeely,Vijay Narayanan,P. Jamison,B.P. Linder,M. Copel,Vamsi Paruchuri,Veeraraghavan Basker,Richard Haight,Dong Woo Lim,R. Carruthers,T. M. Shaw,M. Steen,J.W. Sleight,J. Germán Rubino,Hariklia Deligianni,Supratik Guha,R. Jammy,G. Shahidi	2005	52
7	Fabrication and mobility characteristics of ultra-thin strained Si directly on insulator (SSDOI) MOSFETs K. Rim,K. Chan,L. Shi,D. Boyd,J. A. Ott,N. Klymko,F. Cardone,C.A.F.M. Grütters,Steven J. Koester,L. Buckers,D. Canaperi,B. To,Elizabeth A. Duch,I. Babich,R. Carruthers,P. Saunders,George Walker,S-N Nguyen,M. Steen,M. Ieong	2004	103
8	CVD Rhenium and PVD Tantalum Gate MOSFETs Fabricated With a Replacement Technique IEEE Electron Device Letters ·Yanming Chen,D. Canaperi,R. Jammy,M. Steen,John Pellerin,M.-R. Lin	2004	3
9	High-performance thick copper inductors in an RF technology Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·K. Vaed,William P. Graham,M. Steen,Jae-Eun Park,R. Groves,R. Volant,Ronald Nunes,Josué A. Romero-Moreno,Я. І. Засядько,D. Ahlgren	2004	1
10	Surface modification with nitrogen-containing plasmas to produce hydrophilic, low-fouling membranes Journal of Membrane Science ·Ǧappar Rähimi,M. Steen,Ellen R. Fisher	2004	215
11	Issues in NiSi-gated FDSOI device integration J. Kedzierski,D. Boyd,Ying Zhang,M. Steen,F. Jamin,J. Benedict,M. Ieong,Wilfried Haensch	2004	29
12	A Simplified Hybrid Orientation Technology (SHOT) for high performance CMOS B. Doris,O. Yýlmaz,David Fried,Heath Harrison,O. Dokumaci,W. Natzle,Hao Zhu,D. Boyd,نوف الحارثي,Abelardo Rigual,John T. Yates,Bruna Araújo Guimarães,P. Saunders,M. Steen,E. Nowak,M. Ieong	2004	9
13	Harmonic and electrical characteristics of fluorescent ballasts D. Braun,P. Solncev,M. Steen,D. Koval	2002	1
14	Hydrophilic modification of polymeric membranes by low temperature H2O plasma treatment Journal of Membrane Science ·M. Steen,Fabiana Pilarsky,Ellen R. Fisher	2002	211
15	Hydrophilic Surface Modification of Microporous Polymer Membranes Using A Variety of Low-Temperature Plasma Treatments MRS Proceedings ·Dattatray S. Wavhal,Ǧappar Rähimi,M. Steen,Ellen R. Fisher	2002	4
16	Comparison of surface interactions for NH and NH2 on polymer and metal substrates during NH3 plasma processing Journal of Applied Physics ·M. Steen,Ǧappar Rähimi,Ellen R. Fisher	2002	35
17	Plasma Modification of Porous Structures for Formation of Composite Materials Chemistry of Materials ·M. Steen,ZhiYing Chu,Anna Johnston,Ellen R. Fisher	2001	30
18	Low temperature plasma treatment of asymmetric polysulfone membranes for permanent hydrophilic surface modification Journal of Membrane Science ·M. Steen,Intan Nur Faridah,Chelsea Wessels,Anna Johnston,David G. Castner,Ellen R. Fisher	2001	176
19	Mechanisms and Energy Transfer for Surface Generation of NH₂ during NH₃ Plasma Processing of Metal and Polymer Substrates The Journal of Physical Chemistry B ·Carmen I. Butoi,M. Steen,Wen-Cheng Li,Ellen R. Fisher	2001	36
20	Identification of Gas-Phase Reactive Species and Chemical Mechanisms Occurring at Plasma−Polymer Surface Interfaces Langmuir ·M. Steen,Carmen I. Butoi,Ellen R. Fisher	2001	52

About M. Steen

M. Steen is a scholar working on Surfaces, Coatings and Films, Water Science and Technology, Electrical and Electronic Engineering, Mechanics of Materials and Electronic, Optical and Magnetic Materials, having authored 21 papers that have together received 1.2k indexed citations. Recurring topics across this work include Semiconductor materials and devices (11 papers), Advancements in Semiconductor Devices and Circuit Design (8 papers), Membrane Separation Technologies (4 papers), Metal and Thin Film Mechanics (4 papers), Copper Interconnects and Reliability (3 papers), Surface Modification and Superhydrophobicity (3 papers), Plasma Diagnostics and Applications (3 papers) and Plasma Applications and Diagnostics (2 papers). The work is most often cited by research in Surfaces, Coatings and Films (316 citations), Water Science and Technology (388 citations), Electrical and Electronic Engineering (624 citations), Biomaterials (119 citations) and Biomedical Engineering (391 citations). M. Steen has collaborated with scholars based in United States and Canada. Frequent co-authors include Ellen R. Fisher, David G. Castner, Carmen I. Butoi, Dattatray S. Wavhal, Jianming Zhang, R. Carruthers, Stacey F. Bent, T. Dalton, S. M. Gates and Willi Volksen. Their work appears in journals such as Journal of Membrane Science, IEEE Electron Device Letters, Chemistry of Materials, Plasma Processes and Polymers and Journal of Applied Physics.

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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