Nathan Marchack

518 total citations
33 papers, 363 citations indexed

About

Nathan Marchack is a scholar working on Electrical and Electronic Engineering, Mechanics of Materials and Atomic and Molecular Physics, and Optics. According to data from OpenAlex, Nathan Marchack has authored 33 papers receiving a total of 363 indexed citations (citations by other indexed papers that have themselves been cited), including 28 papers in Electrical and Electronic Engineering, 8 papers in Mechanics of Materials and 5 papers in Atomic and Molecular Physics, and Optics. Recurrent topics in Nathan Marchack's work include Semiconductor materials and devices (17 papers), Plasma Diagnostics and Applications (9 papers) and Metal and Thin Film Mechanics (8 papers). Nathan Marchack is often cited by papers focused on Semiconductor materials and devices (17 papers), Plasma Diagnostics and Applications (9 papers) and Metal and Thin Film Mechanics (8 papers). Nathan Marchack collaborates with scholars based in United States, France and South Korea. Nathan Marchack's co-authors include Jane P. Chang, Sebastian Engelmann, Damon B. Farmer, Steven J. Holmes, Luca Nela, George S. Tulevski, Silvia Demuru, Hiroyuki Miyazoe, Hariklia Deligianni and Qinghuang Lin and has published in prestigious journals such as Journal of Applied Physics, Journal of The Electrochemical Society and Journal of Physics D Applied Physics.

In The Last Decade

Nathan Marchack

31 papers receiving 352 citations

Peers — A (Enhanced Table)

Peers by citation overlap · career bar shows stage (early→late) cites · hero ref

Name h Career Trend Papers Cites
Nathan Marchack United States 11 315 95 80 54 43 33 363
Hardeep Kumar India 11 128 0.4× 114 1.2× 75 0.9× 21 0.4× 44 1.0× 35 312
Wei-Hsun Lin Taiwan 11 237 0.8× 154 1.6× 170 2.1× 13 0.2× 25 0.6× 35 374
Dušan Hemzal Czechia 9 153 0.5× 174 1.8× 79 1.0× 28 0.5× 111 2.6× 29 428
K. V. Rudenko Russia 12 401 1.3× 137 1.4× 85 1.1× 67 1.2× 48 1.1× 136 499
Toshikatsu Sakai Japan 14 343 1.1× 319 3.4× 79 1.0× 45 0.8× 16 0.4× 39 513
Michael DiBattista United States 7 304 1.0× 165 1.7× 29 0.4× 15 0.3× 26 0.6× 24 353
T. Meziani Italy 9 201 0.6× 82 0.9× 78 1.0× 87 1.6× 18 0.4× 11 380
M. Teodorczyk Poland 10 172 0.5× 75 0.8× 92 1.1× 27 0.5× 12 0.3× 45 302
Georgia Lewes‐Malandrakis Germany 10 209 0.7× 186 2.0× 104 1.3× 14 0.3× 174 4.0× 15 415
R. Srnánek Slovakia 10 258 0.8× 126 1.3× 117 1.5× 45 0.8× 29 0.7× 55 362

Countries citing papers authored by Nathan Marchack

Since Specialization
Citations

This map shows the geographic impact of Nathan Marchack's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Nathan Marchack with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Nathan Marchack more than expected).

Fields of papers citing papers by Nathan Marchack

Since Specialization
Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Nathan Marchack. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Nathan Marchack. The network helps show where Nathan Marchack may publish in the future.

Co-authorship network of co-authors of Nathan Marchack

This figure shows the co-authorship network connecting the top 25 collaborators of Nathan Marchack. A scholar is included among the top collaborators of Nathan Marchack based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with Nathan Marchack. Nathan Marchack is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

20 of 20 papers shown
1.
Marchack, Nathan & Eric Joseph. (2024). Centering Sustainability in Process Development Through Improved Characterization of HFC-PFC Byproducts. IEEE Transactions on Semiconductor Manufacturing. 37(4). 453–457. 1 indexed citations
2.
Marchack, Nathan, et al.. (2023). Characterization of TSV etch from a sustainability standpoint. 34–34. 1 indexed citations
3.
Marchack, Nathan, L. Buzi, Damon B. Farmer, et al.. (2021). Plasma processing for advanced microelectronics beyond CMOS. Journal of Applied Physics. 130(8). 24 indexed citations
4.
Buzi, L., et al.. (2020). Utilizing photosensitive polymers to evaluate UV radiation exposures in different plasma chamber configurations. Journal of Vacuum Science & Technology A Vacuum Surfaces and Films. 38(3). 5 indexed citations
5.
Marchack, Nathan, et al.. (2020). Control of surface oxide formation in plasma-enhanced quasiatomic layer etching of tantalum nitride. Journal of Vacuum Science & Technology A Vacuum Surfaces and Films. 38(2). 10 indexed citations
6.
Zhang, Eric, Yves Martin, Jason S. Orcutt, et al.. (2019). Monolithically integrated silicon photonic chip sensor for near-infrared trace-gas spectroscopy. 11–11. 10 indexed citations
7.
Ishikawa, Kenji, Tatsuo Ishijima, Tatsuru Shirafuji, et al.. (2019). Rethinking surface reactions in nanoscale dry processes toward atomic precision and beyond: a physics and chemistry perspective. Japanese Journal of Applied Physics. 58(SE). SE0801–SE0801. 15 indexed citations
8.
Marchack, Nathan, et al.. (2019). Utilizing surface modification in plasma‐enhanced cyclic etching of tantalum nitride to surpass lithographic limits. Plasma Processes and Polymers. 16(9). 11 indexed citations
9.
Zhang, Eric, Yves Martin, Jason S. Orcutt, et al.. (2019). Trace-gas Spectroscopy of Methane using a Monolithically Integrated Silicon Photonic Chip Sensor. Conference on Lasers and Electro-Optics. 109. STh1F.2–STh1F.2. 3 indexed citations
10.
Zhang, Eric, Levente J. Klein, Chi Xiong, et al.. (2018). Localization and quantification of trace-gas fugitive emissions using a portable optical spectrometer. OSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information). 109. 33–33. 3 indexed citations
11.
Demuru, Silvia, Luca Nela, Nathan Marchack, et al.. (2018). Scalable Nanostructured Carbon Electrode Arrays for Enhanced Dopamine Detection. ACS Sensors. 3(4). 799–805. 59 indexed citations
12.
Miyazoe, Hiroyuki, Nathan Marchack, Robert L. Bruce, et al.. (2018). Nitride etching with hydrofluorocarbons III: Comparison of C4H9F and CH3F for low-k′ nitride spacer etch processes. Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena. 36(3). 15 indexed citations
13.
Hu, G., J. Nowak, G. Lauer, et al.. (2017). Low-current Spin Transfer Torque MRAM. 1–2. 6 indexed citations
14.
Hu, G., J. Nowak, G. Lauer, et al.. (2017). Low-current Spin Transfer Torque MRAM. 7. 1–2. 4 indexed citations
15.
Marchack, Nathan, et al.. (2016). Evaluation of ALE processes for patterning. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 9782. 97820H–97820H. 2 indexed citations
16.
Marchack, Nathan, et al.. (2016). Applications for Surface Engineering Using Atomic Layer Etching - Invited Paper. Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena. 255. 41–48. 1 indexed citations
17.
Hu, G., J. Nowak, J. Z. Sun, et al.. (2015). STT-MRAM with double magnetic tunnel junctions. 26.3.1–26.3.4. 64 indexed citations
18.
Marchack, Nathan, Taeseung Kim, Hans‐Olof Blom, & Jane P. Chang. (2015). In-situ etch rate study of HfxLayOz in Cl2/BCl3 plasmas using the quartz crystal microbalance. Journal of Vacuum Science & Technology A Vacuum Surfaces and Films. 33(3). 2 indexed citations
19.
Hsu, Cheng‐Che, et al.. (2013). Feature profile evolution during shallow trench isolation etching in chlorine-based plasmas. III. The effect of oxygen addition. Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena. 31(4). 5 indexed citations
20.
Marchack, Nathan & Jane P. Chang. (2011). Perspectives in nanoscale plasma etching: what are the ultimate limits?. Journal of Physics D Applied Physics. 44(17). 174011–174011. 44 indexed citations

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

Explore authors with similar magnitude of impact

Breakdown of academic impact, for papers by Hardeep Kumar Breakdown of academic impact, for papers by Wei-Hsun Lin Breakdown of academic impact, for papers by Dušan Hemzal Breakdown of academic impact, for papers by K. V. Rudenko Breakdown of academic impact, for papers by Toshikatsu Sakai Breakdown of academic impact, for papers by Michael DiBattista Breakdown of academic impact, for papers by T. Meziani Breakdown of academic impact, for papers by M. Teodorczyk Breakdown of academic impact, for papers by Georgia Lewes‐Malandrakis Breakdown of academic impact, for papers by R. Srnánek
Rankless by CCL
2026