E. Sikorski

779 total citations
12 papers, 445 citations indexed

About

E. Sikorski is a scholar working on Electrical and Electronic Engineering, Materials Chemistry and Biomedical Engineering. According to data from OpenAlex, E. Sikorski has authored 12 papers receiving a total of 445 indexed citations (citations by other indexed papers that have themselves been cited), including 10 papers in Electrical and Electronic Engineering, 6 papers in Materials Chemistry and 3 papers in Biomedical Engineering. Recurrent topics in E. Sikorski's work include Semiconductor materials and devices (9 papers), Block Copolymer Self-Assembly (4 papers) and Anodic Oxide Films and Nanostructures (4 papers). E. Sikorski is often cited by papers focused on Semiconductor materials and devices (9 papers), Block Copolymer Self-Assembly (4 papers) and Anodic Oxide Films and Nanostructures (4 papers). E. Sikorski collaborates with scholars based in United States. E. Sikorski's co-authors include K.W. Guarini, I. Babich, Charles T. Black, Hansoo Kim, Wilfried Haensch, Huiling Shang, H.‐S. Philip Wong, P. Kozlowski, C. D’Emic and M. Ieong and has published in prestigious journals such as IEEE Electron Device Letters, Microelectronic Engineering and Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena.

In The Last Decade

E. Sikorski

12 papers receiving 429 citations

Peers

Countries citing papers authored by E. Sikorski

Since Specialization

Citations

This map shows the geographic impact of E. Sikorski's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by E. Sikorski with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites E. Sikorski more than expected).

Fields of papers citing papers by E. Sikorski

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by E. Sikorski. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by E. Sikorski. The network helps show where E. Sikorski may publish in the future.

Co-authorship network of co-authors of E. Sikorski

This figure shows the co-authorship network connecting the top 25 collaborators of E. Sikorski. A scholar is included among the top collaborators of E. Sikorski based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with E. Sikorski. E. Sikorski is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

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12 of 12 papers shown

#	Work	Indexed citations
1	Nitride etching with hydrofluorocarbons. I. Selective etching of nitride over silicon and oxide materials by gas discharge optimization and selective deposition of fluorocarbon polymer 2017 ·Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ·Sebastian Engelmann, Robert L. Bruce, Eric Joseph, Nicholas Fuller, W. S. Graham, E. Sikorski, (unknown), Yu Zhu, Masahiro Nakamura, (unknown), Hirokazu Matsumoto, (unknown), (unknown)	20
2	Patterning of CMOS device structures for 40-80nm pitches and beyond 2012 ·Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Sebastian Engelmann, Ryan M. Martin, Robert L. Bruce, Hiroyuki Miyazoe, Nicholas Fuller, W. S. Graham, E. Sikorski, Martin Glodde, Markus Brink, Hsinyu Tsai, J. J. Bucchignano, D. Klaus, E. Kratschmer, Michael Guillorn	9
3	Minimizing linewidth roughness in Step and Flash Imprint Lithography 2008 ·Microelectronic Engineering ·(unknown), Gerard M. Schmid, Cynthia B. Brooks, Dwayne LaBrake, Douglas J. Resnick, (unknown), Kailash Gopalakrishnan, Rohit S. Shenoy, (unknown), Ying Zhang, E. Sikorski, Mary Beth Rothwell, (unknown), (unknown)	3
4	Highly porous silicon membrane fabrication using polymer self-assembly 2006 ·Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ·Charles T. Black, K.W. Guarini, Greg Breyta, (unknown), Ricardo Ruiz, R. L. Sandstrom, E. Sikorski, (unknown)	39
5	Polymer self assembly in semiconductor microelectronics 2006 ·Charles T. Black, K.W. Guarini, Ricardo Ruiz, E. Sikorski, I. Babich, R. L. Sandstrom, (unknown)	11
6	Mobility and CMOS devices/circuits on sub-10nm [110] ultra thin body SOI 2005 ·Huiling Shang, J. Germán Rubino, B. Doris, Anna W. Topol, J.W. Sleight, J. Cai, L. Chang, J. A. Ott, J. Kedzierski, K. Chan, Liang Shi, Katherina Babich, J. Newbury, E. Sikorski, B. To, Y. Zhang, K.W. Guarini, M. Ieong	5
7	Self-Aligned n-Channel Germanium MOSFETs With a Thin Ge Oxynitride Gate Dielectric and Tungsten Gate 2004 ·IEEE Electron Device Letters ·Huiling Shang, (unknown), P. Kozlowski, C. D’Emic, I. Babich, E. Sikorski, M. Ieong, H.‐S. Philip Wong, K.W. Guarini, Wilfried Haensch	136
8	Low voltage, scalable nanocrystal flash memory fabricated by templated self assembly 2004 ·K.W. Guarini, Charles T. Black, Y. Zhang, I. Babich, E. Sikorski, Lynne Gignac	26
9	High-Capacity, Self-Assembled Metal–Oxide–Semiconductor Decoupling Capacitors 2004 ·IEEE Electron Device Letters ·Charles T. Black, K.W. Guarini, (unknown), Hansoo Kim, J. Benedict, E. Sikorski, I. Babich, K. R. Milkove	77
10	Very high performance 50 nm CMOS at low temperature 2003 ·Shalom J. Wind, Lei Shi, (unknown), Rahul Roy, (unknown), E. Sikorski, P. Kozlowski, C. D'Emic, J. J. Bucchignano, H.-J. Wann, R. Viswanathan, Jian Cai, Yuan Taur	3
11	Process integration of self-assembled polymer templates into silicon nanofabrication 2002 ·Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ·K.W. Guarini, Charles T. Black, (unknown), Hansoo Kim, E. Sikorski, I. Babich	115
12	New polysilicon disposable sidewall process for sub-50 nm CMOS 2001 ·(unknown), D. Boyd, (unknown), J. J. Bucchignano, Jian Cai, K. Chan, H.I. Hanafi, P. Kozlowski, (unknown), R. Roy, Linqi Shi, E. Sikorski, M. Surendra, Shalom J. Wind, (unknown), Junghyo Yoon, (unknown), (unknown), Yuan Taur	1

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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