B. Busch

2.0k citations

42 papers · 1.6k indexed · h-index 20

Impact in

Electrical and Electronic Engineering top 5%
- Semiconductor materials and devices
- Integrated Circuits and Semiconductor Failure Analysis
- Advancements in Semiconductor Devices and Circuit Design
- Ferroelectric and Negative Capacitance Devices
- Advanced Memory and Neural Computing
Materials Chemistry top 5%
- Electronic and Structural Properties of Oxides

Papers in ⓘ

Atomic and Molecular Physics, and Optics 18
- Atomic and Molecular Physics 11
Surfaces, Coatings and Films 4

Co-authors: T. Gustafsson (19 shared papers)Eric Garfunkel (11 shared papers)G. D. Wilk (7 shared papers)W.H. Schulte (10 shared papers)David A. Muller (5 shared papers)M.-Y. Ho (4 shared papers)Petri I. Räisänen (3 shared papers)T. Sorsch (4 shared papers)
Journals: Applied Physics Letters (7 papers)Journal of Applied Physics (5 papers)Laser and Particle Beams (4 papers)Surface Science (3 papers)Physical review. B, Condensed matter (3 papers)
Partner nations: United States Germany Singapore

In The Last Decade

B. Busch

42 papers receiving 1.6k citations

Peers

Countries citing papers authored by B. Busch

Since Specialization

Citations

This map shows the geographic impact of B. Busch's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by B. Busch with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites B. Busch more than expected).

Fields of papers citing papers by B. Busch

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by B. Busch. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by B. Busch. The network helps show where B. Busch may publish in the future.

Co-authors

The 25 scholars most cited alongside B. Busch, linked wherever they have co-authored with each other. Click a name or a connecting line to browse the papers they share.

Border = papers with B. Busch Line = papers co-authored together B. Busch links everyone, so they are left out of the graph.

All Works

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20 of 20 papers shown

Showing the 20 most-cited of 42 papers — load more, or switch the sort, to bring in the rest.

#	Work
1	Nucleation and growth of atomic layer deposited HfO2 gate dielectric layers on chemical oxide (Si–O–H) and thermal oxide (SiO2 or Si–O–N) underlayers Journal of Applied Physics ·M. L. Green, M.-Y. Ho, B. Busch, G. D. Wilk, T. Sorsch, T. Conard, Bert Brijs, Wilfried Vandervorst, Petri I. Räisänen, David A. Muller, M. Bude, J. L. Grazul	2002	240
2	High temperature stability in lanthanum and zirconia-based gate dielectrics Journal of Applied Physics ·Jon‐Paul Maria, Dwi Wicaksana, Angus I. Kingon, B. Busch, H. Schulte, Eric Garfunkel, T. Gustafsson	2001	162
3	Morphology and crystallization kinetics in HfO2 thin films grown by atomic layer deposition Journal of Applied Physics ·M.-Y. Ho, Hao Gong, G. D. Wilk, B. Busch, M. L. Green, Paul M. Voyles, David A. Muller, M. Bude, Wei Lin, A. See, M. E. Loomans, S. K. Lahiri, Petri I. Räisänen	2003	149
4	Oxygen exchange and transport in thin zirconia films on Si(100) Physical review. B, Condensed matter ·B. Busch, W.H. Schulte, Eric Garfunkel, T. Gustafsson, Wen Jie Qi, R. Nieh, Joowon Lee	2000	122
5	Multi-component high-K gate dielectrics for the silicon industry Microelectronic Engineering ·L. Manchanda, M.D. Morris, M.L Green, R. B. van Dover, F. Klemens, T. Sorsch, P. J. Silvėrman, G. D. Wilk, B. Busch, Shyam Aravamudhan	2001	104
6	Photoemission study of Zr- and Hf-silicates for use as high-κ oxides: Role of second nearest neighbors and interface charge Applied Physics Letters ·R. L. Opila, G. D. Wilk, Md. Ashraful Alam, R. B. van Dover, B. Busch	2002	103
7	Suppressed crystallization of Hf-based gate dielectrics by controlled addition of Al2O3 using atomic layer deposition Applied Physics Letters ·M.-Y. Ho, Hao Gong, G. D. Wilk, B. Busch, M. L. Green, Wei Lin, A. See, S. K. Lahiri, M. E. Loomans, Petri I. Räisänen, T. Gustafsson	2002	87
8	Chemical vapor deposition of HfO2 films on Si(100) Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ·Şafak Sayan, Shyam Aravamudhan, B. Busch, W.H. Schulte, F. Cosandey, G. D. Wilk, T. Gustafsson, Eric Garfunkel	2002	83
9	Materials Characterization of Alternative Gate Dielectrics MRS Bulletin ·B. Busch, Olivier Pluchery, Yves J. Chabal, David A. Muller, R. L. Opila, J. Kwo, Eric Garfunkel	2002	66
10	Advances in high κ gate dielectrics for Si and III–V semiconductors Journal of Crystal Growth ·J. Kwo, M. Hong, B. Busch, David A. Muller, Yves J. Chabal, A. R. Kortan, J. P. Mannáerts, Bing-Shiang Yang, P. Ye, H.‐J. Gossmann, A. M. Sergent, K.K. Ng, J. Bude, W.H. Schulte, Eric Garfunkel, T. Gustafsson	2003	62
11	Interface reactions of high-κ Y2O3 gate oxides with Si Applied Physics Letters ·B. Busch, J. Kwo, M. Hong, J. P. Mannáerts, B. J. Sapjeta, W.H. Schulte, E. Garfunkel, T. Gustafsson	2001	47
12	Effects of surface pretreatments on interface structure during formation of ultra-thin yttrium silicate dielectric films on silicon Applied Surface Science ·James J. Chambers, B. Busch, W.H. Schulte, T. Gustafsson, Eric Garfunkel, Senhao Wang, D. M. Maher, Tonya M. Klein, Gregory N. Parsons	2001	43
13	Third excimer continuum of argon excited by a heavy-ion beam Physical Review A ·W. Krötz, A. Ulrich, B. Busch, G. Ribitzki, J. Wieser	1991	30
14	Emission of vacuum ultraviolet radiation from neon excimers excited by a heavy ion beam Applied Physics Letters ·W. Krötz, A. Ulrich, B. Busch, G. Ribitzki, J. Wieser	1989	29
15	Leakage mechanisms and dielectric properties of Al2O3/TiN-based metal-insulator-metal capacitors Applied Physics Letters ·Shuang Meng, C. Basceri, B. Busch, Garo Derderian, Gurtej Sandhu	2003	28
16	High-resolution depth profiling of ultrathin gate oxides using medium-energy ion scattering Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ·T. Gustafsson, Hongcheng Lu, B. Busch, W.H. Schulte, Eric Garfunkel	2001	27
17	Limitations to depth resolution in ion scattering experiments Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ·W.H. Schulte, B. Busch, Eric Garfunkel, T. Gustafsson, G. Schiwietz, P. L. Grande	2001	26
18	Temperature dependent structure of clean Ag(110) studied by medium energy ion scattering Surface Science ·B. Busch, T. Gustafsson	1998	26
19	Improved film growth and flatband voltage control of ALD HfO/sub 2/ and Hf-Al-O with n/sup +/ poly-Si gates using chemical oxides and optimized post-annealing G. D. Wilk, M.L. Green, M.-Y. Ho, B. Busch, T. Sorsch, F. Klemens, Bert Brijs, R. B. van Dover, A. Kornblit, T. Gustafsson, Eric Garfunkel, S.J. Hillenius, D. Monroe, Pranav Kalavade, J. M. Hergenrother	2003	19
20	Isotopic labeling studies of interactions of nitric oxide and nitrous oxide with ultrathin oxynitride layers on silicon Journal of Applied Physics ·Hongcheng Lu, E. P. Gusev, Eric Garfunkel, B. Busch, T. Gustafsson, T. Sorsch, M. L. Green	2000	19

About B. Busch

B. Busch is a scholar working on Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Radiation, Spectroscopy and Electrical and Electronic Engineering, having authored 42 papers that have together received 1.6k indexed citations. Recurring topics across this work include Semiconductor materials and devices (22 papers), Atomic and Molecular Physics (11 papers), Electronic and Structural Properties of Oxides (9 papers), Ion-surface interactions and analysis (8 papers), Laser-induced spectroscopy and plasma (6 papers), Integrated Circuits and Semiconductor Failure Analysis (6 papers), Mass Spectrometry Techniques and Applications (6 papers) and Ferroelectric and Negative Capacitance Devices (6 papers). The work is most often cited by research in Electrical and Electronic Engineering (1.4k citations), Materials Chemistry (805 citations), Atomic and Molecular Physics, and Optics (351 citations), Electronic, Optical and Magnetic Materials (205 citations) and Surfaces, Coatings and Films (72 citations). B. Busch has collaborated with scholars based in United States, Germany and Singapore. Frequent co-authors include T. Gustafsson, Eric Garfunkel, G. D. Wilk, W.H. Schulte, David A. Muller, M.-Y. Ho, Petri I. Räisänen, T. Sorsch, R. B. van Dover and M. Bude. Their work appears in journals such as Applied Physics Letters, Journal of Applied Physics, Laser and Particle Beams, Surface Science and Physical review. B, Condensed matter.

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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