Li-Qun Xia

520 total citations
24 papers, 397 citations indexed

About

Li-Qun Xia is a scholar working on Electrical and Electronic Engineering, Atomic and Molecular Physics, and Optics and Materials Chemistry. According to data from OpenAlex, Li-Qun Xia has authored 24 papers receiving a total of 397 indexed citations (citations by other indexed papers that have themselves been cited), including 17 papers in Electrical and Electronic Engineering, 9 papers in Atomic and Molecular Physics, and Optics and 9 papers in Materials Chemistry. Recurrent topics in Li-Qun Xia's work include Semiconductor materials and devices (15 papers), Copper Interconnects and Reliability (7 papers) and Metal and Thin Film Mechanics (7 papers). Li-Qun Xia is often cited by papers focused on Semiconductor materials and devices (15 papers), Copper Interconnects and Reliability (7 papers) and Metal and Thin Film Mechanics (7 papers). Li-Qun Xia collaborates with scholars based in United States, Germany and Belgium. Li-Qun Xia's co-authors include J. R. Engstrom, Niladri Maity, Mark Jones, David A. Hansen, Reza Arghavani, Scott E. Thompson, A. Mascarenhas, Gamani Karunasiri, Lee Smith and Victor Moroz and has published in prestigious journals such as The Journal of Chemical Physics, Applied Physics Letters and Journal of Applied Physics.

In The Last Decade

Li-Qun Xia

23 papers receiving 384 citations

Peers

Countries citing papers authored by Li-Qun Xia

Since Specialization

Citations

This map shows the geographic impact of Li-Qun Xia's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Li-Qun Xia with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Li-Qun Xia more than expected).

Fields of papers citing papers by Li-Qun Xia

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Li-Qun Xia. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Li-Qun Xia. The network helps show where Li-Qun Xia may publish in the future.

Co-authorship network of co-authors of Li-Qun Xia

This figure shows the co-authorship network connecting the top 25 collaborators of Li-Qun Xia. A scholar is included among the top collaborators of Li-Qun Xia based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with Li-Qun Xia. Li-Qun Xia is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

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20 of 20 papers shown

#	Work	Indexed citations
1	Novel Hardmask for Sub-20nm Copper/Low K Backend Dual Damascene Integration 2011 ·ECS Transactions ·Li-Qun Xia, (unknown), (unknown), (unknown), Kevin Zhou, J. Pender, (unknown)	3
2	Development, characterization and integration of a novel boron nitride process for application as a Cu diffusion barrier 2010 ·Yi Chen, (unknown), (unknown), (unknown), (unknown), Li-Qun Xia	1
3	Theoretical modeling on hydrogen evolution in ultraviolet light-treated hydrogenated silicon nitride 2008 ·Journal of Applied Physics ·Rong Sun, Lei Wang, Jing Cheng, Jürgen Michel, Lionel C. Kimerling, (unknown), Li-Qun Xia, (unknown)	2
4	Post Deposition Ultraviolet Treatment of Silicon Nitride Dielectric: Modeling and Experiment 2006 ·MRS Proceedings ·В. А. Зубков, (unknown), Li-Qun Xia, (unknown)	4
5	pMOSFET with 200% mobility enhancement induced by multiple stressors 2006 ·IEEE Electron Device Letters ·(unknown), F. Nouri, (unknown), Geert Eneman, Peter Verheyen, Victor Moroz, Lee Smith, Xiaopeng Xu, (unknown), (unknown), Khaled Ahmed, (unknown), Li-Qun Xia, Meihua Shen, Yihwan Kim, R. Rooyackers, K. De Meyer, R. Schreutelkamp	58
6	A reliable and manufacturable method to induce a stress of >1 GPa on a P-channel MOSFET in high volume manufacturing 2006 ·IEEE Electron Device Letters ·Reza Arghavani, Li-Qun Xia, (unknown), (unknown), Gamani Karunasiri, A. Mascarenhas, Scott E. Thompson	29
7	Copper CMP at low shear force for low-k compatibility 2003 ·Stan Tsai, Liang Chen, Lizhong Sun, (unknown), (unknown), Li-Qun Xia, (unknown)	0
8	Multi-generation CVD low κ films for 0.13 μm and beyond 2002 ·(unknown), (unknown), (unknown), Li-Qun Xia, (unknown), (unknown)	1
9	High Temperature Subatmospheric Chemical Vapor Deposited Undoped Silicate Glass: A Solution for Next Generation Shallow Trench Isolation 1999 ·Journal of The Electrochemical Society ·Li-Qun Xia, (unknown), (unknown), (unknown), (unknown), (unknown), (unknown), R. Conti, D. Restaino, D. Többen	9
10	High Aspect Ratio Trench Filling Using Two‐Step Subatmospheric Chemical Vapor Deposited Borophosphosilicate Glass for <0.18 μm Device Application 1999 ·Journal of The Electrochemical Society ·Li-Qun Xia, R. Conti, (unknown), Filippo Campana, (unknown), (unknown), D. Restaino, (unknown)	8
11	Subatomospheric Chemical Vapor Deposited Boron‐Doped Silicate Glass Films for Solid Phase Diffusion Applications 1997 ·Journal of The Electrochemical Society ·Li-Qun Xia, (unknown), V. Sivasankar, (unknown)	4
12	Process Characteristics for Subatmospheric Chemical Vapor Deposited Borophosphosilicate Glass and Effect of Carrier Gas 1997 ·Journal of The Electrochemical Society ·Li-Qun Xia, (unknown), (unknown), Filippo Campana, (unknown)	4
13	Supersonic molecular beam scattering as a probe of thin film deposition processes 1995 ·Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ·Li-Qun Xia, Mark Jones, Niladri Maity, J. R. Engstrom	53
14	A supersonic molecular beam study of the chemisorption of PH3 on the Si(100) surface 1995 ·Surface Science ·Niladri Maity, Li-Qun Xia, (unknown), J. R. Engstrom	8
15	Effect of PH3 on the dissociative chemisorption of SiH4 and Si2H6 on Si(100): Implications on the growth of in situ doped Si thin films 1995 ·Applied Physics Letters ·Niladri Maity, Li-Qun Xia, J. R. Engstrom	15
16	The adsorption of PH3 on the Si(111)-(7 × 7) surface: an example of autocatalytic dissociative chemisorption 1995 ·Surface Science ·Niladri Maity, Li-Qun Xia, (unknown), J. R. Engstrom	5
17	Dissociation and pyrolysis of Si2H6 on Si surfaces: The influence of surface structure and adlayer composition 1995 ·The Journal of Chemical Physics ·Li-Qun Xia, Mark Jones, Niladri Maity, J. R. Engstrom	41
18	Translationally activated dissociative chemisorption of SiH4 on the Si(100) and Si(111) surfaces 1994 ·Chemical Physics Letters ·Mark Jones, Li-Qun Xia, Niladri Maity, J. R. Engstrom	31
19	Dynamics of the dissociative adsorption of disilane on Si(100): Energy scaling and the effect of corrugation 1993 ·The Journal of Chemical Physics ·J. R. Engstrom, David A. Hansen, (unknown), Li-Qun Xia	40
20	Dissociative adsorption of Si2H6 on silicon at hyperthermal energies: The influence of surface structure 1993 ·Applied Physics Letters ·J. R. Engstrom, Li-Qun Xia, (unknown), David A. Hansen	34

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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