W. K. Waskiewicz

1.3k citations

75 papers · 902 indexed · h-index 17

Impact in

Surfaces, Coatings and Films top 2%
- Electron and X-Ray Spectroscopy Techniques
Structural Biology top 5%

Papers in

Surfaces, Coatings and Films 42
- Electron and X-Ray Spectroscopy Techniques 40
Structural Biology 6

Co-authors: David L. Windt Ian Robinson P. H. Fuoss R. Hull J. Bohr R. T. Tung J. E. Bjorkholm D. M. Tennant
Journals: Microelectronic Engineering (8 papers)Applied Physics Letters (2 papers)Journal of Applied Physics (2 papers)Review of Scientific Instruments (2 papers)Optics Letters (2 papers)
Partner nations: United States Canada Germany

In The Last Decade

W. K. Waskiewicz

66 papers receiving 819 citations

Peers

Countries citing papers authored by W. K. Waskiewicz

Since Specialization

Citations

This map shows the geographic impact of W. K. Waskiewicz's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by W. K. Waskiewicz with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites W. K. Waskiewicz more than expected).

Fields of papers citing papers by W. K. Waskiewicz

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by W. K. Waskiewicz. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by W. K. Waskiewicz. The network helps show where W. K. Waskiewicz may publish in the future.

Co-authorship network

The 25 scholars most cited alongside W. K. Waskiewicz, linked wherever they have co-authored with each other. Click a name or a connecting line to browse the papers they share.

Border = papers with W. K. Waskiewicz Line = papers co-authored together W. K. Waskiewicz links everyone, so they are left out of the graph.

All Works

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20 of 20 papers shown

#	Work
1	Grid-controlled 100-kV electron-beam source for SCALPEL [lithography] Lauren Rawson, W. K. Waskiewicz, P. B. Sewell, Wahed Mohammed, F H Read	2002	0
2	SCALPEL mark detection using Si/SiO2 and 100 keV backscattered electrons Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ·R. C. Farrow, K. Ovcharenko, I.C. Kizilyalli, W. K. Waskiewicz, L. C. Hopkins, Alec Hobson, George N. Gibson, 圭司奥村, Shashank Misra, L. E. Trimble	2001	1
3	Space-charge effects in projection electron-beam lithography: Results from the SCALPEL proof-of-lithography system Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ·J. Alexander Liddle, Myrtle I. Blakey, S. Sarkis, R. C. Farrow, Gregg M. Gallatin, Richard Kasica, Lauren Rawson, Hans Stüdemann, Peggy Grisez, K. Ovcharenko, Anthony E. Novembre, Leonidas E. Ocola, P.A. Orphanos, Milton L. Peabody, Ehud Galili, A Altman Ryan, W. K. Waskiewicz, Eric Munro	2001	8
4	<title>Comprehensive analysis of electron optical design of SCALPEL-HT/Alpha</title> Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·표효열, Eric Munro, Wahed Mohammed, W. K. Waskiewicz	2000	3
5	<title>3D simulation of flat-cathode electron guns with space charge</title> Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Wahed Mohammed, 표효열, Eric Munro, عبدالكريم سليم الحداد, W. K. Waskiewicz, Lauren Rawson	1999	1
6	CMOS compatible alignment marks for the SCALPEL proof of lithography tool Microelectronic Engineering ·R. C. Farrow, W. K. Waskiewicz, I.C. Kizilyalli, Leonidas E. Ocola, Christopher J. Horton, K. L. Leon, Gregg M. Gallatin, K. Ovcharenko, Myrtle I. Blakey, J. S. Kraus, Anthony E. Novembre, P.A. Orphanos, Milton L. Peabody, Richard Kasica, A. Kornblit, F. Klemens	1999	2
7	Electron scattering and transmission through SCALPEL masks Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ·K. Ovcharenko, J. Alexander Liddle, Anthony E. Novembre, W. K. Waskiewicz, G. P. Watson, L. R. Harriott, David A. Muller	1998	21
8	Extreme Ultraviolet 1:1 Ring-Field Lithography Machine Alastair A. MacDowell, F Kiyo, Mika Corsa, J. E. Bjorkholm, R. R. Freeman, Linus A. Fetter, Diana Taylor, D. M. Tennant, Daniela Puma Contreras, W. K. Waskiewicz, D. L. White, David L. Windt, O. R. Wood, M. Lindner, T. E. Jewell	1996	0
9	Variation in stress with background pressure in sputtered Mo/Si multilayer films Journal of Applied Physics ·David L. Windt, W. L. Brown, Cynthia A. Volkert, W. K. Waskiewicz	1995	31
10	At-wavelength metrology of 13 nm lithography imaging optics Review of Scientific Instruments ·Zhengquan Tan, Alastair A. MacDowell, Bruno La Fontaine, J. E. Bjorkholm, D. M. Tennant, Derek W. Taylor, Y. Kordan, R. R. Freeman, W. K. Waskiewicz, David L. Windt, S. J. Spector, A. K. Raychaudhuri, R. H. Stulen, W. Ng, F. Cerrina	1995	1
11	Multilayer Facilities for EUV Lithography David L. Windt, W. K. Waskiewicz	1994	1
12	Experiments and Simulations of EUV Lithographic Resist Patterning at Wavelengths from 7 to 40 nm O. R. Wood, J. E. Bjorkholm, I. Costero, Linus A. Fetter, Y. Kordan, R. R. Freeman, D. M. Tennant, Meir Persoff, Gary N. Taylor, W. K. Waskiewicz, D. L. White, David L. Windt, Alastair A. MacDowell, Bruno La Fontaine, Rebecca Crookall, Chiara Cerami, J Rennerová, J. B. Kortright, Eric M. Gullikson, Raitis Peculis	1994	1
13	Repair of soft-x-ray optical elements by stripping and redeposition of Mo/Si reflective coatings Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ·Yulaika, David L. Windt, W. K. Waskiewicz, O. R. Wood, D. M. Tennant	1993	3
14	Stress relaxation in Mo/Si multilayer structures Applied Physics Letters ·R. R. Kola, David L. Windt, W. K. Waskiewicz, B. E. Weir, R. Hull, G. K. Celler, Cynthia A. Volkert	1992	40
15	The Physics of X-Ray Multilayer Structures David L. Windt, C. Bucci, W. K. Waskiewicz	1991	8
16	The Physics of X-Ray Multilayer Structures David L. Windt, R. Hull, W. K. Waskiewicz	1991	12
17	Achieving Uniform Multilayer Coatings on Figured Optics W. K. Waskiewicz, David L. Windt, J. E. Bjorkholm, Daniela Puma Contreras, R. R. Freeman, T. E. Jewell, W Mansfield, Alastair A. MacDowell, W. M. Simpson, L. H. Szeto, D. M. Tennant, Derek W. Taylor, G.W. Taylor, D. L. White, O. R. Wood	1991	1
18	Effects of Absorption on Resist Performance in Soft X-Ray Projection Lithography W Mansfield, O. R. Wood, J. E. Bjorkholm, Jeffrey Bokor, R. R. Freeman, A. A. MacDowell, L. H. Szeto, Gary N. Taylor, D. M. Tennant, W. K. Waskiewicz, David L. Windt, D. L. White, Sylwia Kłopotowska, Andrew R. Neureuther	1991	3
19	High Resolution Soft-X-Ray Projection Imaging O. R. Wood, J. E. Bjorkholm, Jeffrey Bokor, Daniela Puma Contreras, R. R. Freeman, T. E. Jewell, W Mansfield, Alastair A. MacDowell, L. H. Szeto, D. M. Tennant, W. K. Waskiewicz, D. L. White, David L. Windt, John H. Bruning	1991	1
20	Use of trilevel resists for high-resolution soft-x-ray projection lithography Applied Physics Letters ·Dwight W. Berreman, J. E. Bjorkholm, Marco Becker, Daniela Puma Contreras, R. R. Freeman, T. E. Jewell, W Mansfield, Alastair A. MacDowell, M. L. O’Malley, E. L. Raab, W. T. Silfvast, L. H. Szeto, D. M. Tennant, W. K. Waskiewicz, D. L. White, David L. Windt, O. R. Wood	1990	16

About W. K. Waskiewicz

W. K. Waskiewicz is a scholar working on Surfaces, Coatings and Films, Structural Biology, Radiation, Electrical and Electronic Engineering and Atomic and Molecular Physics, and Optics, having authored 75 papers that have together received 902 indexed citations. Recurring topics across this work include Advancements in Photolithography Techniques (60 papers), Electron and X-Ray Spectroscopy Techniques (40 papers), Advanced X-ray Imaging Techniques (28 papers), Integrated Circuits and Semiconductor Failure Analysis (13 papers), Particle Accelerators and Free-Electron Lasers (6 papers), Metal and Thin Film Mechanics (6 papers), Advanced Surface Polishing Techniques (6 papers) and X-ray Spectroscopy and Fluorescence Analysis (6 papers). The work is most often cited by research in Surfaces, Coatings and Films (284 citations), Structural Biology (45 citations), Radiation (229 citations), Electrical and Electronic Engineering (544 citations) and Atomic and Molecular Physics, and Optics (295 citations). W. K. Waskiewicz has collaborated with scholars based in United States, Canada and Germany. Frequent co-authors include David L. Windt, Ian Robinson, P. H. Fuoss, R. Hull, J. Bohr, R. T. Tung, J. E. Bjorkholm, D. M. Tennant, O. R. Wood and W Mansfield. Their work appears in journals such as Microelectronic Engineering, Applied Physics Letters, Journal of Applied Physics, Review of Scientific Instruments and Optics Letters.

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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