Thomas Frank

1.7k citations

62 papers · 1.3k indexed · h-index 15

Impact in

Electrical and Electronic Engineering top 5%
- Silicon Carbide Semiconductor Technologies
- Semiconductor materials and devices
- 3D IC and TSV technologies
- Silicon and Solar Cell Technologies
Electronic, Optical and Magnetic Materials top 10%

Papers in

Electrical and Electronic Engineering 49
- Silicon Carbide Semiconductor Technologies 25
- Semiconductor materials and devices 23
- 3D IC and TSV technologies 6
- Silicon and Solar Cell Technologies 6
- Gas Sensing Nanomaterials and Sensors 5
Electronic, Optical and Magnetic Materials 15
- Copper Interconnects and Reliability 13

Co-authors: Gerhard Pensl Norbert Schwesinger Helmut Wurmus H. Itoh T. Troffer M. Schadt Markus Maier H. P. Strunk
Journals: Journal of Micromechanics and Microengineering (4 papers)Physica B Condensed Matter (3 papers)Journal of Applied Physics (2 papers)Microsystem Technologies (2 papers)physica status solidi (b) (2 papers)
Partner nations: Germany Japan France

In The Last Decade

Thomas Frank

60 papers receiving 1.3k citations

Peers

Countries citing papers authored by Thomas Frank

Since Specialization

Citations

This map shows the geographic impact of Thomas Frank's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Thomas Frank with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Thomas Frank more than expected).

Fields of papers citing papers by Thomas Frank

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Thomas Frank. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Thomas Frank. The network helps show where Thomas Frank may publish in the future.

Co-authors

The 25 scholars most cited alongside Thomas Frank, linked wherever they have co-authored with each other. Click a name or a connecting line to browse the papers they share.

Border = papers with Thomas Frank Line = papers co-authored together Thomas Frank links everyone, so they are left out of the graph.

All Works

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20 of 20 papers shown

#	Work
1	Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm Sensors ·Uwe Brand, Min Xu, Lutz Doering, Evi Norma Utami, Nathalie Rivière, Sebastian Bütefisch, Vasylevska I.V., Erwin Peiner, Phan Hà Thanh Nhã, Thomas Frank, دعاء عبد المحسن عبد القادر, I. Kiselev, Willem Jan de Hek, Leon Plua	2019	14
2	High-speed microprobe for roughness measurements in high-aspect-ratio microstructures Measurement Science and Technology ·Lutz Doering, Uwe Brand, Sebastian Bütefisch, Vasylevska I.V., Thomas Weimann, Erwin Peiner, Thomas Frank	2017	14
3	Controlling Stiction in Nano-Electro-Mechanical Systems Using Liquid Crystals ACS Nano ·Oleksandr Buchnev, Nina Podoliak, Thomas Frank, Malgosia Kaczmarek, Liudi Jiang, V.A. Fedotov	2016	18
4	Humidity micro switch based on humidity-sensitive polymers Qucosa (Saxon State and University Library Dresden) ·Shannon R. Kjeldsen, Joslin Cg, Thomas Frank, Gerald Gerlach	2015	1
5	Development of silicon microforce sensors integrated with double meander springs for standard hardness test instruments Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Hutomo Suryo Wasisto, Lutz Doering, Alwin Daus, Uwe Brand, Thomas Frank, Erwin Peiner	2015	2
6	Electrical and morphological assessment of via middle and backside process technology for 3D integration María Alejandra Duarte Arguello, P. Coudrain, Yilber Hernández Gómez, 武田和夫, Uo B, A. B. Dehlsen, A. Jouve, Iratna Pangalih, Thomas Frank, J. LeVan, S. Chéramy, N. Sillon	2012	11
7	Alternative techniques to reduce interface traps in n‐type 4H‐SiC MOS capacitors physica status solidi (b) ·Gerhard Pensl, Svetlana Beljakowa, Thomas Frank, Kunyuan Gao, Florian Speck, Thomas Seyller, L. Ley, Florin Ciobanu, V. V. Afanas’ev, A. Stesmans, Tsunenobu Kimoto, Adolf Schöner	2008	56
8	Two Different Species of Traps Monitored at N-Implanted 3C-SiC MOS Capacitors by Conductance Spectroscopy Materials science forum ·Svetlana Beljakowa, M. Krieger, Thomas Frank, Gerhard Pensl, Nargis ÖZGEN-, Valerie Kohler, Masayuki Abe, Hiroyuki Nagasawa, Adolf Schöner	2008	1
9	4H-SiC Metal-Oxide-Semiconductor (MOS) Capacitors Fabricated by Oxidation in a Tungsten Lamp Furnace in Combination with a Microwave Plasma and Subsequent Deposition of Al<sub>2</sub>O<sub>3</sub> Materials science forum ·Svetlana Beljakowa, Thomas Frank, Gerhard Pensl, Kun Gao, Florian Speck, Thomas Seyller	2007	1
10	Negative U‐properties of the oxygen‐vacancy in ZnO Physica status solidi. C, Conferences and critical reviews/Physica status solidi. C, Current topics in solid state physics ·D. Pfisterer, Joachim Sann, Detlev M. Hofmann, Bruno Meyer, Thomas Frank, Gerhard Pensl, Ramón Tena‐Zaera, J. Zúñiga‐Pérez, C. Martínez‐Tomás, V. Muñoz‐Sanjosé	2006	11
11	Nitrogen Implantation - An Alternative Technique to Reduce Traps at SiC/SiO<sub>2</sub>-Interfaces Materials science forum ·Florin Ciobanu, Thomas Frank, Gerhard Pensl, Valeri Afanas’ev, S. Shamuilia, Adolf Schöner, Tsunenobu Kimoto	2006	13
12	Experimental Evidence for an Electrically Neutral (N-Si)-Complex Formed during the Annealing Process of Si<sup>+</sup>-/N<sup>+</sup>-Co-Implanted 4H-SiC Materials science forum ·Frank Schmid, Thomas Frank, Gerhard Pensl	2005	3
13	Defect-engineering in SiC by ion implantation and electron irradiation Microelectronic Engineering ·Gerhard Pensl, Florin Ciobanu, Thomas Frank, Stanislav Ottovich Siptits, M. Krieger, Sergey A. Reshanov, Frank Schmid, Michael Weidner, Takeshi Ohshima, H. Itoh, W. J. Choyke	2005	14
14	Implantation-induced defects in silicon carbide Physica B Condensed Matter ·Gerhard Pensl, Thomas Frank, M. Krieger, Michael Laube, Sergey A. Reshanov, Frank Schmid, Michael Weidner	2003	18
15	Radiation-Induced Defects in 4H- and 6H-SiC Epilayers Studied by Positron Annihilation and Deep-Level Transient Spectroscopy Materials science forum ·A. Kawasuso, Michael Weidner, F. Redmann, Thomas Frank, R. Krause‐Rehberg, Gerhard Pensl, P. Sperr, W. Triftshäuser, Hisayoshi Itoh	2002	2
16	Annealing Process of Defects in Epitaxial SiC Induced by He and Electron Irradiation: Positron Annihilation Study Materials science forum ·A. Kawasuso, F. Redmann, R. Krause‐Rehberg, P. Sperr, Thomas Frank, Michael Weidner, Gerhard Pensl, Hisayoshi Itoh	2001	2
17	Vacancies and deep levels in electron-irradiated 6H SiC epilayers studied by positron annihilation and deep level transient spectroscopy Journal of Applied Physics ·A. Kawasuso, F. Redmann, R. Krause‐Rehberg, Thomas Frank, Michael Weidner, Gerhard Pensl, P. Sperr, H. Itoh	2001	38
18	Crystallization of an amorphous layer in P+-implanted 6H-SiC studied by monoenergetic positron beams Journal of Applied Physics ·Akira Uedono, Shoichiro Tanigawa, Takeshi Ohshima, Hisayoshi Itoh, Masahito Yoshikawa, I. Nashiyama, Thomas Frank, Gerhard Pensl, Ryoichi Suzuki, Toshiyuki Ohdaira, T. Mikado	2000	12
19	Two-axis electrodynamic micropositioning devices Journal of Micromechanics and Microengineering ·Thomas Frank	1998	10
20	Incorporation of the D-Center in SiC Controlled either by Coimplantation of Si/B and C/B or by Site-Competition Epitaxy Materials science forum ·Thomas Frank, T. Troffer, Gerhard Pensl, N. Nordell, Susanne Karlsson, Adolf Schöner	1998	13

About Thomas Frank

Thomas Frank is a scholar working on Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials, Bioengineering, Atomic and Molecular Physics, and Optics and Biomedical Engineering, having authored 62 papers that have together received 1.3k indexed citations. Recurring topics across this work include Silicon Carbide Semiconductor Technologies (25 papers), Semiconductor materials and devices (23 papers), Copper Interconnects and Reliability (13 papers), Semiconductor materials and interfaces (8 papers), Force Microscopy Techniques and Applications (6 papers), 3D IC and TSV technologies (6 papers), Silicon and Solar Cell Technologies (6 papers) and Gas Sensing Nanomaterials and Sensors (5 papers). The work is most often cited by research in Electrical and Electronic Engineering (982 citations), Electronic, Optical and Magnetic Materials (232 citations), Ceramics and Composites (60 citations), Atomic and Molecular Physics, and Optics (251 citations) and Biomedical Engineering (277 citations). Thomas Frank has collaborated with scholars based in Germany, Japan and France. Frequent co-authors include Gerhard Pensl, Norbert Schwesinger, Helmut Wurmus, H. Itoh, T. Troffer, M. Schadt, Markus Maier, H. P. Strunk, J. Heindl and Michael Weidner. Their work appears in journals such as Journal of Micromechanics and Microengineering, Physica B Condensed Matter, Journal of Applied Physics, Microsystem Technologies and physica status solidi (b).

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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