Paul Denham

865 total citations
46 papers, 586 citations indexed

About

Paul Denham is a scholar working on Electrical and Electronic Engineering, Radiation and Surfaces, Coatings and Films. According to data from OpenAlex, Paul Denham has authored 46 papers receiving a total of 586 indexed citations (citations by other indexed papers that have themselves been cited), including 39 papers in Electrical and Electronic Engineering, 18 papers in Radiation and 18 papers in Surfaces, Coatings and Films. Recurrent topics in Paul Denham's work include Advancements in Photolithography Techniques (33 papers), Advanced X-ray Imaging Techniques (16 papers) and Electron and X-Ray Spectroscopy Techniques (15 papers). Paul Denham is often cited by papers focused on Advancements in Photolithography Techniques (33 papers), Advanced X-ray Imaging Techniques (16 papers) and Electron and X-Ray Spectroscopy Techniques (15 papers). Paul Denham collaborates with scholars based in United States, South Korea and United Kingdom. Paul Denham's co-authors include Patrick Naulleau, Kenneth A. Goldberg, Eric M. Gullikson, Senajith Rekawa, J. H. Underwood, Jeffrey Bokor, Erik H. Anderson, Keith Jackson, Stanley Mrowka and Simi George and has published in prestigious journals such as Physical review. B, Condensed matter, Monthly Notices of the Royal Astronomical Society and IEEE Journal of Solid-State Circuits.

In The Last Decade

Paul Denham

42 papers receiving 544 citations

Peers

Countries citing papers authored by Paul Denham

Since Specialization

Citations

This map shows the geographic impact of Paul Denham's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Paul Denham with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Paul Denham more than expected).

Fields of papers citing papers by Paul Denham

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Paul Denham. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Paul Denham. The network helps show where Paul Denham may publish in the future.

Co-authorship network of co-authors of Paul Denham

This figure shows the co-authorship network connecting the top 25 collaborators of Paul Denham. A scholar is included among the top collaborators of Paul Denham based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with Paul Denham. Paul Denham is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

Sort: Min cites: Since: Top N: Style:

20 of 20 papers shown

#	Work	Indexed citations
1	High energy electron diffraction instrument with tunable camera length 2024 ·Structural Dynamics ·Paul Denham, (unknown), (unknown), A. Fisher, Xiaozhe Shen, (unknown), R. J. England, Renkai Li, P. Musumeci	0
2	Analytical Scaling Laws for Radiofrequency-Based Pulse Compression in Ultrafast Electron Diffraction Beamlines 2023 ·Instruments ·Paul Denham, P. Musumeci	3
3	Assessing out-of-band flare effects at the wafer level for EUV lithography 2010 ·Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Simi George, Patrick Naulleau, (unknown), Paul Denham, Senajith Rekawa	11
4	22-nm Half-pitch extreme ultraviolet node development at the SEMATECH Berkeley microfield exposure tool 2009 ·Microelectronic Engineering ·Patrick Naulleau, Christopher N. Anderson, (unknown), Paul Denham, Simi George, Kenneth A. Goldberg, Michael Goldstein, (unknown), (unknown), (unknown), (unknown), Bruno La Fontaine, Andy Ma, Warren Montgomery, (unknown), (unknown), Tom Wallow, Stefan Wurm	26
5	Pushing extreme ultraviolet lithography development beyond 22 nm half pitch 2009 ·Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ·Patrick Naulleau, Christopher N. Anderson, (unknown), Paul Denham, Simi George, Kenneth A. Goldberg, Michael Goldstein, (unknown), (unknown), (unknown), Bruno La Fontaine, Warren Montgomery, Tom Wallow	6
6	Recent results from the Berkeley 0.3-NA EUV microfield exposure tool 2007 ·Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Patrick Naulleau, Chris Anderson, Kim Dean, Paul Denham, Kenneth A. Goldberg, (unknown), Bruno La Fontaine, Tom Wallow	7
7	Demonstration of phase-shift masks for extreme-ultraviolet lithography 2006 ·Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Bruno La Fontaine, Adam R. Pawloski, Obert R. Wood, Yunfei Deng, Harry Levinson, Patrick Naulleau, Paul Denham, Eric M. Gullikson, (unknown), (unknown), (unknown), Florian Letzkus	9
8	Characterization of the synchrotron-based 0.3-NA EUV microexposuretool at the ALS 2005 ·Journal of Vacuum Science and Technology ·Patrick Naulleau, Kenneth A. Goldberg, Erik Anderson, Kim Dean, Paul Denham, Jason P. Cain, (unknown), Keith Jackson	1
9	Ultra-high accuracy optical testing: creating diffraction-limited short-wavelength optical systems 2005 ·Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Kenneth A. Goldberg, Patrick Naulleau, Senajith Rekawa, Paul Denham, J. Alexander Liddle, Eric M. Gullikson, Keith Jackson, Erik H. Anderson, John S. Taylor, Gary E. Sommargren, Henry N. Chapman, D. W. Phillion, Michael Johnson, Anton Barty, Régina Soufli, Eberhard Spiller, C. Walton, S. Bajt	6
10	EUV interferometric testing and alignment of the 0.3-NA MET optic 2004 ·Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Kenneth A. Goldberg, Patrick Naulleau, Paul Denham, Senajith Rekawa, Keith Jackson, J. Alexander Liddle, Erik H. Anderson	16
11	Extreme ultraviolet microexposures at the Advanced Light Source using the 0.3 numerical aperture micro-exposure tool optic 2004 ·Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ·Patrick Naulleau, Kenneth A. Goldberg, Erik Anderson, Jason P. Cain, Paul Denham, Keith Jackson, A. S. Morlens, (unknown), Farhad Salmassi	29
12	At-wavelength alignment and testing of the 0.3 NA MET optic 2004 ·Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ·Kenneth A. Goldberg, Patrick Naulleau, Paul Denham, Senajith Rekawa, Keith Jackson, Erik H. Anderson, J. Alexander Liddle	26
13	At-wavelength interferometry of high-NA diffraction-limited EUV optics 2003 ·University of North Texas Digital Library (University of North Texas) ·Kenneth A. Goldberg, Patrick Naulleau, Senajith Rekawa, Paul Denham, J. Alexander Liddle, Erik Anderson, Keith Jackson, Jeffrey Bokor, David Attwood	1
14	Fourier-synthesis custom-coherence illuminator for extreme ultraviolet microfield lithography 2003 ·Applied Optics ·Patrick Naulleau, Kenneth A. Goldberg, (unknown), Jeffrey Bokor, Paul Denham, Senajith Rekawa	35
15	EUV interferometry of the 0.3-NA MET optic 2003 ·Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Kenneth A. Goldberg, Patrick Naulleau, Paul Denham, Senajith Rekawa, Keith Jackson, Erik H. Anderson, J. Alexander Liddle, Jeffrey Bokor	7
16	<title>Adding static printing capabilities to the EUV phase-shifting point diffraction interferometer</title> 2001 ·Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Patrick Naulleau, Kenneth A. Goldberg, Erik H. Anderson, (unknown), Paul Denham, Keith Jackson, Senajith Rekawa, Jeffrey Bokor	7
17	Extreme ultraviolet alignment and testing of a four-mirror ring field extreme ultraviolet optical system 2000 ·Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ·Kenneth A. Goldberg, Patrick Naulleau, (unknown), Paul Denham, Erik H. Anderson, Henry N. Chapman, Jeffrey Bokor	16
18	At-wavelength interferometry for extreme ultraviolet lithography 1997 ·Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ·Edita Tejnil, Kenneth A. Goldberg, Sang-Hun Lee, H. Medecki, (unknown), Paul Denham, Alastair A. MacDowell, Jeffrey Bokor, David Attwood	26
19	An electrically reconfigurable programmable logic array using a CMOS/DMOS technology 1984 ·IEEE Journal of Solid-State Circuits ·(unknown), (unknown), Paul Denham	4
20	Narrative Technique in Sinclair Ross' As For Me and My House 1980 ·Studies in Canadian Literature ·Paul Denham	1

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

Explore authors with similar magnitude of impact