Patrick Naulleau

4.2k total citations
325 papers, 3.0k citations indexed

About

Patrick Naulleau is a scholar working on Electrical and Electronic Engineering, Surfaces, Coatings and Films and Radiation. According to data from OpenAlex, Patrick Naulleau has authored 325 papers receiving a total of 3.0k indexed citations (citations by other indexed papers that have themselves been cited), including 286 papers in Electrical and Electronic Engineering, 184 papers in Surfaces, Coatings and Films and 106 papers in Radiation. Recurrent topics in Patrick Naulleau's work include Advancements in Photolithography Techniques (268 papers), Electron and X-Ray Spectroscopy Techniques (152 papers) and Integrated Circuits and Semiconductor Failure Analysis (127 papers). Patrick Naulleau is often cited by papers focused on Advancements in Photolithography Techniques (268 papers), Electron and X-Ray Spectroscopy Techniques (152 papers) and Integrated Circuits and Semiconductor Failure Analysis (127 papers). Patrick Naulleau collaborates with scholars based in United States, South Korea and Japan. Patrick Naulleau's co-authors include Kenneth A. Goldberg, Jeffrey Bokor, Gregg M. Gallatin, Eric M. Gullikson, Andrew R. Neureuther, Christopher N. Anderson, Paul Denham, David Attwood, Erik H. Anderson and Jason P. Cain and has published in prestigious journals such as Advanced Materials, The Journal of Chemical Physics and Applied Physics Letters.

In The Last Decade

Patrick Naulleau

301 papers receiving 2.7k citations

Peers

Patrick Naulleau
Comparison fields: 5 of 81
  • Electrical and Electronic Engineering 2.2k
  • Surfaces, Coatings and Films 1.3k
  • Radiation 807
  • Biomedical Engineering 647
  • Atomic and Molecular Physics, and Optics 401
Replace Frank Siewert with:
Frank Siewert Germany
Ralf K. Heilmann United States
Lynford L. Goddard United States
F.H. Baumann United States
Vitaliy A. Guzenko Switzerland
Hongchang Wang United Kingdom
Uwe D. Zeitner Germany
Peter Z. Takacs United States
Changqing Xie China
P. Wachulak Poland
Frank Siewert Germany View profile →
Citations per field, relative to Patrick Naulleau
Patrick Naulleau · 1×
Citations per year, relative to Patrick Naulleau
Patrick Naulleau · 1×

Countries citing papers authored by Patrick Naulleau

Since Specialization
Citations

This map shows the geographic impact of Patrick Naulleau's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Patrick Naulleau with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Patrick Naulleau more than expected).

Fields of papers citing papers by Patrick Naulleau

Since Specialization
Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Patrick Naulleau. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Patrick Naulleau. The network helps show where Patrick Naulleau may publish in the future.

Co-authorship network of co-authors of Patrick Naulleau

This figure shows the co-authorship network connecting the top 25 collaborators of Patrick Naulleau. A scholar is included among the top collaborators of Patrick Naulleau based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with Patrick Naulleau. Patrick Naulleau is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

20 of 20 papers shown
# Work Indexed citations
1 0
2 19
3 9
4 2
5 28
6 21
7
Projection optics for EUVL micro-field exposure tools with a numerical aperture of 0.5
1
8 20
9
Influence of base and PAG on deprotection blur in EUV photoresists and some thoughts on shot noise
0
10 7
11
Lithographic characterization of low-order aberrations in a 0.3-NA EUV microfield exposure \ntool
5
12
Critical dimension sensitivity to post-exposure bake temperaturevariation in EUV photoresists
4
13
EUV Binary Phase Gratings: Fabrication and Application toDiffractive Optics
2
14
Characterization of the synchrotron-based 0.3-NA EUV microexposuretool at the ALS
1
15 30
16
At-wavelength interferometry of high-NA diffraction-limited EUV optics
1
17
Design and fabrication of advanced EUV diffractive elements
1
18
Lithographic characterization of the printability of programmed EUV substrate defects
1
19
Direct index of refraction measurement at extreme ultraviolet wavelength region with a novel interferometer
1
20 11

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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