Lucile Broussous

708 total citations
47 papers, 468 citations indexed

About

Lucile Broussous is a scholar working on Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials and Mechanics of Materials. According to data from OpenAlex, Lucile Broussous has authored 47 papers receiving a total of 468 indexed citations (citations by other indexed papers that have themselves been cited), including 39 papers in Electrical and Electronic Engineering, 24 papers in Electronic, Optical and Magnetic Materials and 12 papers in Mechanics of Materials. Recurrent topics in Lucile Broussous's work include Semiconductor materials and devices (27 papers), Copper Interconnects and Reliability (24 papers) and Metal and Thin Film Mechanics (7 papers). Lucile Broussous is often cited by papers focused on Semiconductor materials and devices (27 papers), Copper Interconnects and Reliability (24 papers) and Metal and Thin Film Mechanics (7 papers). Lucile Broussous collaborates with scholars based in France, Czechia and India. Lucile Broussous's co-authors include Gérard Delahay, Bernard Coq, A. Ayral, V. Rouessac, Diane Rébiscoul, A. Larbot, Sandra H. Pulcinelli, A. F. Craievich, Éric Prouzet and Chiara Santilli and has published in prestigious journals such as The Journal of Physical Chemistry B, Applied Catalysis B: Environmental and The Journal of Physical Chemistry C.

In The Last Decade

Lucile Broussous

44 papers receiving 452 citations

Peers

Countries citing papers authored by Lucile Broussous

Since Specialization

Citations

This map shows the geographic impact of Lucile Broussous's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Lucile Broussous with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Lucile Broussous more than expected).

Fields of papers citing papers by Lucile Broussous

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Lucile Broussous. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Lucile Broussous. The network helps show where Lucile Broussous may publish in the future.

Co-authorship network of co-authors of Lucile Broussous

This figure shows the co-authorship network connecting the top 25 collaborators of Lucile Broussous. A scholar is included among the top collaborators of Lucile Broussous based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with Lucile Broussous. Lucile Broussous is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

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20 of 20 papers shown

#	Work	Indexed citations
1	Nearly Anhydrous Undissociated HF for the Removal of Hf / Ta / Zr Based Polymers after Plasma Etch, Selectively to Aluminum 2017 ·ECS Transactions ·(unknown), Lucile Broussous, Philippe Garnier, (unknown), (unknown), P. Besson	0
2	Deep Trench Isolation and through Silicon via Wetting Characterization by High-Frequency Acoustic Reflectometry 2016 ·Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena ·(unknown), Lucile Broussous, Philippe Garnier, Julien Carlier, Pierre Campistron, Vincent Thomy, (unknown), P. Besson, (unknown), Bertrand Nongaillard	2
3	Impact of plasma reactive ion etching on low dielectric constant porous organosilicate films' microstructure and chemical composition 2016 ·Microporous and Mesoporous Materials ·(unknown), Daniel Lee, (unknown), Michel Bardet, M. Veillerot, Lucile Broussous, Christophe Licitra, V. Jousseaume, F. Bertin, V. Rouessac, A. Ayral	7
4	Oxygen Control for Wet Clean Process on Single Wafer Platform 2016 ·Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena ·Lucile Broussous, (unknown), (unknown), S. Zoll	3
5	Probing the microporosity of low-k organosilica films: MP and t-plot methods applied to ellipsometric porosimetry data 2015 ·Microporous and Mesoporous Materials ·(unknown), Lucile Broussous, Christophe Licitra, F. Bertin, V. Rouessac, A. Ayral, Benoît Coasne	12
6	Acoustic Characterization of Patterning Degradation during Wet Etching 2015 ·ECS Transactions ·(unknown), Philippe Garnier, (unknown), A. Devos, (unknown), Julien Carlier, Pierre Campistron, Bertrand Nongaillard, (unknown), Lucile Broussous	2
7	ToF‐SIMS spectra multivariate analyses for the chemical characterization of microelectronic low‐k materials 2014 ·Surface and Interface Analysis ·(unknown), (unknown), Lucile Broussous, Jean‐Paul Barnes, M. Veillerot, V. Jousseaume	1
8	Electrochemical Behavior of Cobalt in Post-Via Etch Cleaning Solutions 2009 ·Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena ·(unknown), (unknown), Lucile Broussous, Valentina Ivanova, R.P. Nogueira	2
9	Mechanical properties of a plasma-modified porous low-k material 2009 ·Microelectronic Engineering ·Lucile Broussous, (unknown), Diane Rébiscoul, V. Rouessac, A. Ayral	15
10	Post-Etch Cleaning for Porous Low K Integration: Impact of HF wet etch on "Pore-sealing" and "k recovery" 2008 ·HAL (Le Centre pour la Communication Scientifique Directe) ·Lucile Broussous, (unknown), Diane Rébiscoul, V. Rouessac, A. Ayral	1
11	Integrated monitoring of ULK dielectrics out-gassing and measurement of pore sealing efficiency by residual gas analysis technique 2007 ·Microelectronic Engineering ·J. Coignus, L.L. Chapelon, (unknown), Lucile Broussous, (unknown), (unknown), (unknown)	1
12	Porosity and structure evolution of a SiOCH low k material during post-etch cleaning process 2007 ·Microelectronic Engineering ·Lucile Broussous, (unknown), Diane Rébiscoul, V. Rouessac, A. Ayral	17
13	Characterization of the impact of plasma treatments and wet cleaning on a porous low k material 2006 ·Microelectronic Engineering ·(unknown), V. Rouessac, Lucile Broussous, Diane Rébiscoul, A. Ayral	23
14	Single Backside Cleaning on Silicon, Silicon Nitride and Silicon Oxide 2005 ·Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena ·Lucile Broussous, P. Besson, Martin M. Frank, (unknown)	1
15	Barrier and Copper Seedlayer Wet Etching 2005 ·Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena ·C. Richard, Martin M. Frank, P. Besson, (unknown), (unknown), (unknown), (unknown), Lucile Broussous, (unknown), T. Billon	5
16	Characterization of photoresist poisoning induced by a post etch stripping step 2003 ·(unknown), O. Louveau, (unknown), M. Fayolle, N. Rochat, D. Louis, Lucile Broussous	4
17	Post-Etch Cleaning Chemistries Evaluation for Low k-Copper Integration 2003 ·Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena ·Lucile Broussous, (unknown), (unknown), P. Besson	7
18	Integration of Cu/SiOC in dual damascene interconnect for 0.1 μm technology using a new SiC material as dielectric barrier 2003 ·M. Fayolle, J. Torrès, G. Passemard, Florence Fusalba, (unknown), D. Louis, L. Arnaud, (unknown), J. Cluzel, H. Feldis, M. Rivoire, O. Louveau, Thierry Mourier, Lucile Broussous	4
19	Microfiltration of beer yeast suspensions through stamped ceramic membranes 2001 ·Separation and Purification Technology ·(unknown), (unknown), Lucile Broussous, Štefan Schlosser, A. Larbot	32
20	Selective catalytic reduction of nitrogen monoxide by decane on copper-exchanged beta zeolites 1997 ·Applied Catalysis B: Environmental ·Gérard Delahay, Bernard Coq, Lucile Broussous	68

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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