Rudy Peeters

2.3k total citations · 1 hit paper
31 papers, 1.6k citations indexed

About

Rudy Peeters is a scholar working on Electrical and Electronic Engineering, Surfaces, Coatings and Films and Atomic and Molecular Physics, and Optics. According to data from OpenAlex, Rudy Peeters has authored 31 papers receiving a total of 1.6k indexed citations (citations by other indexed papers that have themselves been cited), including 22 papers in Electrical and Electronic Engineering, 10 papers in Surfaces, Coatings and Films and 7 papers in Atomic and Molecular Physics, and Optics. Recurrent topics in Rudy Peeters's work include Advancements in Photolithography Techniques (18 papers), Integrated Circuits and Semiconductor Failure Analysis (11 papers) and Electron and X-Ray Spectroscopy Techniques (10 papers). Rudy Peeters is often cited by papers focused on Advancements in Photolithography Techniques (18 papers), Integrated Circuits and Semiconductor Failure Analysis (11 papers) and Electron and X-Ray Spectroscopy Techniques (10 papers). Rudy Peeters collaborates with scholars based in Netherlands, Germany and South Korea. Rudy Peeters's co-authors include Giel Berden, Gerard Meijer, R. Engeln, Eelco van Setten, Judon Stoeldraijer, Peter Kuerz, Arnoud Apituley, H. Meiling, Sjoerd Lok and Noreen Harned and has published in prestigious journals such as Chemical Physics Letters, Review of Scientific Instruments and Applied Physics B.

In The Last Decade

Rudy Peeters

30 papers receiving 1.5k citations

Hit Papers

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What are hit papers?

Hit papers significantly outperform the citation benchmark for their cohort. A paper qualifies if it has ≥500 total citations, achieves ≥1.5× the top-1% citation threshold for papers in the same subfield and year (this is the minimum needed to enter the top 1%, not the average within it), or reaches the top citation threshold in at least one of its specific research topics.

Cavity ring-down spectroscopy: Experimental schemes and applications

2000 747 citations Giel Berden, Rudy Peeters et al. profile →

Peers

Countries citing papers authored by Rudy Peeters

Since Specialization

Citations

This map shows the geographic impact of Rudy Peeters's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Rudy Peeters with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Rudy Peeters more than expected).

Fields of papers citing papers by Rudy Peeters

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Rudy Peeters. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Rudy Peeters. The network helps show where Rudy Peeters may publish in the future.

Co-authorship network of co-authors of Rudy Peeters

This figure shows the co-authorship network connecting the top 25 collaborators of Rudy Peeters. A scholar is included among the top collaborators of Rudy Peeters based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with Rudy Peeters. Rudy Peeters is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

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20 of 20 papers shown

#	Work	Indexed citations
1	Progress towards adoption of high-NA EUV lithography in pilot manufacturing 2025 ·(unknown), Eelco van Setten, Sjoerd Lok, Jan van Schoot, (unknown), (unknown), Rudy Peeters, (unknown), (unknown), (unknown), (unknown), (unknown), Peter Vanoppen	0
2	The next step in Moore’s law: high-NA EUV introduction at the customer 2024 ·(unknown), Rudy Peeters, (unknown), Sjoerd Lok, Jan van Schoot, Paul Gräupner, Peter Kuerz, (unknown), (unknown), Peter Vanoppen	4
3	High-NA EUV platform realization as next step in EUV technology 2023 ·(unknown), Rudy Peeters, Jeroen van Dongen, (unknown), Sjoerd Lok, Jan van Schoot, Paul Gräupner, Peter Kuerz, (unknown), (unknown), Peter Vanoppen	4
4	High NA EUV enabling cost efficient scaling for N+1 technology nodes 2022 ·(unknown), Sjoerd Lok, (unknown), Jan van Schoot, Rudy Peeters, (unknown), Kars Troost, (unknown)	5
5	High-NA EUV lithography exposure tool: key advantages and program progress 2021 ·Jan van Schoot, Sjoerd Lok, Eelco van Setten, Ruben Maas, Kars Troost, Rudy Peeters, Jo Finders, Judon Stoeldraijer, Jos Benschop, Paul Graeupner, Peter Kuerz, Winfried Kaiser, Thomas Stammler	16
6	High-NA EUVL exposure tool: key advantages and program status 2021 ·Jan van Schoot, Sjoerd Lok, Eelco van Setten, Ruben Maas, Rudy Peeters, Jo Finders, Judon Stoeldraijer, Jos Benschop, Paul Graeupner, Peter Kuerz, Thomas Stammler, Kars Troost	5
7	High-NA EUV lithography exposure tool: advantages and program progress 2020 ·Jan van Schoot, Sjoerd Lok, Eelco van Setten, Ruben Maas, Kars Troost, Rudy Peeters, Jo Finders, Judon Stoeldraijer, Jos Benschop, Paul Graeupner, Peter Kuerz, Winfried Kaiser	31
8	High-NA EUV Lithography exposure tool: program progress and mask impact (Conference Presentation) 2019 ·Jan van Schoot, Eelco van Setten, Kars Troost, Sjoerd Lok, Judon Stoeldraijer, Rudy Peeters, Jos Benschop, J. Zimmermann, Paul Graeupner, Peter Kuerz, Winfried Kaiser	1
9	EUV for HVM: towards an industrialized scanner for HVM NXE3400B performance update 2018 ·Mark van de Kerkhof, (unknown), (unknown), H. Meiling, Joost Smits, Rudy Peeters, (unknown), (unknown), (unknown), Roel Moors, Eric Verhoeven, (unknown)	31
10	EUV lithography industrialization progress 2017 ·(unknown), Mark van de Kerkhof, (unknown), Rudy Peeters, (unknown)	5
11	Enabling sub-10nm node lithography: presenting the NXE:3400B EUV scanner 2017 ·Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Mark van de Kerkhof, (unknown), (unknown), Rudy Peeters, (unknown), (unknown), Alexander Zdravkov, Egbert Lenderink, Fabrizio Evangelista, (unknown), Bartosz Bilski, (unknown)	63
12	EUV lithography: NXE platform performance overview 2014 ·Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Rudy Peeters, Sjoerd Lok, (unknown), (unknown), Noreen Harned, Peter Kuerz, Martin Lowisch, Eelco van Setten, (unknown), (unknown), Judon Stoeldraijer, David C. Brandt, Nigel R. Farrar, Igor V. Fomenkov, H.B.K. Boom, H. Meiling, (unknown)	41
13	Laser produced plasma light source development for HVM 2014 ·Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Igor V. Fomenkov, David C. Brandt, Nigel R. Farrar, Bruno La Fontaine, (unknown), Daniel J. Brown, Alex I. Ershov, N. Böwering, (unknown), Robert J. Rafac, Silvia De Dea, Michael Purvis, Rudy Peeters, H. Meiling, Noreen Harned, (unknown), (unknown), (unknown)	8
14	ASML's NXE platform performance and volume introduction 2013 ·Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Rudy Peeters, Sjoerd Lok, (unknown), Noreen Harned, Peter Kuerz, Martin Lowisch, H.C. Meijer, (unknown), Eelco van Setten, (unknown), (unknown), Judon Stoeldraijer, (unknown), Richard Droste, H. Meiling, (unknown)	56
15	NXE:3300B platform: imaging applications for Logic and DRAM 2013 ·Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Eelco van Setten, (unknown), (unknown), Jo Finders, (unknown), (unknown), Sjoerd Lok, Rudy Peeters	5
16	Sensitive absorption techniques for spectroscopy 2001 ·Radboud Repository (Radboud University) ·Rudy Peeters, Giel Berden, Gerard Meijer	6
17	Cavity enhanced absorption spectroscopy in the 10 μm region using a waveguide CO2 laser 2001 ·Chemical Physics Letters ·Rudy Peeters, Giel Berden, (unknown), Lucas J. J. Laarhoven, Gerard Meijer	14
18	Cavity-enhanced absorption spectroscopy of the 1.5 μm band system of jet-cooled ammonia 1999 ·Chemical Physics Letters ·Giel Berden, Rudy Peeters, Gerard Meijer	44
19	The Dissociation Energy of the Molecule PdGe 1971 ·Zeitschrift für Naturforschung A ·Rudy Peeters, (unknown), (unknown)	2
20	Mass spectrometric determination of dissociation energies of the borides and silicides of some transition metals 1970 ·Transactions of the Faraday Society ·(unknown), Rudy Peeters, (unknown), J. Drowart	39

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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