Luciana Meli

1.4k citations

62 papers · 1.2k indexed · h-index 14

Surfaces, Coatings and Films top 5%
- Electron and X-Ray Spectroscopy Techniques 26
Catalysis top 10%
Biomaterials top 5%
Biomedical Engineering top 5%
Polymers and Plastics top 10%
Electrical and Electronic Engineering
- Advancements in Photolithography Techniques 41
- Integrated Circuits and Semiconductor Failure Analysis 33
- Semiconductor materials and devices 8
- Silicon and Solar Cell Technologies 3
Materials Chemistry
- Block Copolymer Self-Assembly 7
Electronic, Optical and Magnetic Materials
- Copper Interconnects and Reliability 4
Organic Chemistry
- Advanced Polymer Synthesis and Characterization 4

Co-authors: Jonathan S. Dordick Robert J. Linhardt Peter F. Green Timothy P. Lodge Mauricio Mora‐Pale Abraham Arceo Jianjun Miao Douglas S. Clark
Cited by: Surfaces, Coatings and Films Catalysis Biomaterials
Journals: Nano Letters (1 paper)ACS Nano (1 paper)Biomaterials (1 paper)
Partner nations: United States Japan South Korea

In The Last Decade

Luciana Meli

54 papers receiving 1.1k citations

Peers

Countries citing papers authored by Luciana Meli

Since Specialization

Citations

This map shows the geographic impact of Luciana Meli's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Luciana Meli with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Luciana Meli more than expected).

Fields of papers citing papers by Luciana Meli

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Luciana Meli. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Luciana Meli. The network helps show where Luciana Meli may publish in the future.

Co-authorship network

The 25 scholars most cited alongside Luciana Meli, linked wherever they have co-authored with each other. Click a name or a connecting line to browse the papers they share.

Border = papers with Luciana Meli Line = papers co-authored together Luciana Meli links everyone, so they are left out of the graph.

All Works

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20 of 20 papers shown

#	Work
1	EUV patterned gate variation reduction in next generation transistor architectures Gopal S. Kenath,Martin Burkhardt,Nikhil Jain,Anna Lin,Jennifer Church,Gen Tsutsui,Stephanie Reynoso,Xuan Liu,C. Sheraw,P. Montanini,Eric R. Miller,Indira Seshadri,Luciana Meli,Nelson Felix	2024	0
2	EUV sub-resolution assist feature impact: experimental and simulation evaluation Zheng Chen,Martin Burkhardt,Stuart Sieg,Luciana Meli	2023	2
3	Optimization of spin-on metal oxide resist performance via new development techniques on sub-30nm pitch patterning Lior Huli,Kanzo Kato,Gueci Steven,Nathan Antonovich,Steven Grzeskowiak,Dave Hetzer,Eric Liu,Alexandra Krawicz,Satoru Shimura,Shinichiro Kawakami,Soichiro Okada,Karen Petrillo,Luciana Meli,Nicholas Latham,Yasiel Cabrera,Belle Antonovich	2023	1
4	Coater/developer-based patterning techniques to achieve tight pitches with 0.33 NA single exposure Kanzo Kato,Seiji Nagahara,Lior Huli,Nathan Antonovich,David Hetzer,Steven Grzeskowiak,Alexandra Krawicz,Eric Liu,Bae Nayoung,Akiteru Ko,Satoru Shimura,Shinichiro Kawakami,Dinh Conque,Takahiro Kitano,Luciana Meli,Indira Seshadri,Martin Burkhardt,Karen Petrillo	2023	1
5	Epi Source/Drain Damage Mitigation with Inner Spacer and Buffer Optimization in Stacked Nanosheet Gate-All-Around Transistors Curtis Durfee,Ivo Otto,Subhadeep Kal,S. Pancharatnam,Matthew Flaugh,Toshiki Kanaki,Matthew Rednor,Huimei Zhou,Liqiao Qin,Juntao Li,Luciana Meli,Nicolas Loubet,Peter Biolsi,Nelson Felix	2023	0
6	Coater/developer-based techniques to achieve tight pitches towards high-NA EUV Kanzo Kato,Lior Huli,Nathan Antonovich,David Hetzer,Steven Grzeskowiak,Eric Liu,Akiteru Ko,Satoru Shimura,Shinichiro Kawakami,Takahiro Kitano,Seiji Nagahara,Luciana Meli,Indira Seshadri,Martin Burkhardt,Karen Petrillo	2023	1
7	Epi Source-Drain Damage Mitigation During Channel Release of Stacked Nanosheet Gate-All-Around Transistors ECS Transactions ·Curtis Durfee,Ivo Otto,Subhadeep Kal,S. Pancharatnam,Matthew Flaugh,Toshiki Kanaki,Matthew Rednor,Huimei Zhou,Liqiao Qin,Luciana Meli,Nicolas Loubet,Peter Biolsi,Nelson Felix	2023	2
8	The defect mitigation on EUV stack by track based technology Naoki Shibata,Lior Huli,Corey Lemley,Yuichiro Miyata,Dave Hetzer,Toshiharu Wada,Akiteru Ko,Shinichiro Kawakami,Akiko Kai,Takahiro Shiozawa,Hidetsugu Yano,Kenichi Ueda,Akihiro Sonoda,Karen Petrillo,Luciana Meli,Nelson Felix,Cody Murray,Alex Hubbard	2019	1
9	Characterization and control of EUV scanner dose uniformity and stability (Conference Presentation) Christopher F. Robinson,Dan Corliss,Luciana Meli,Richard Johnson	2018	0
10	Single-expose patterning development for EUV lithography Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Anuja De Silva,Karen Petrillo,Luciana Meli,Jeffrey C. Shearer,Genevieve Beique,Lei Sun,Indira Seshadri,Tae-Hwan Oh,Seulgi Han,Nicole Saulnier,Joe Lee,John Arnold,Bassem Hamieh,Nelson Felix,Tsuyoshi Furukawa,Lovejeet Singh,Ramakrishnan Ayothi	2017	7
11	Ultrathin EUV patterning stack using polymer brush as an adhesion promotion layer Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Indira Seshadri,Anuja De Silva,Luciana Meli,Charlie Liu,Cheng Chi,Jing Guo,Kristin Schmidt,Hoa Truang,John Arnold,Nelson Felix,Lovejeet Singh,Tsuyoshi Furukawa,Ramakrishnan Ayothi,Angélique Raley,Richard A. Farrell	2017	3
12	Coater/developer based techniques to improve high-resolution EUV patterning defectivity Eric Liu,Akiteru Ko,Koichi Hontake,Lior Huli,David Hetzer,Karen Petrillo,Luciana Meli,Nelson Felix,Richard Johnson,Takeshi Shimoaoki,Shinichiro Kawakami,Yongan Xu,Cody Murray,Corey Lemley,Alex Hubbard,Anuja De Silva,Kōichiro Tanaka,Yusaku Hashimoto	2017	3
13	DSA via hole shrink for advanced node applications Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Cheng Chi,Chi‐Chun Liu,Luciana Meli,Kristin Schmidt,Yongan Xu,Ekmini Anuja DeSilva,Martha I. Sanchez,Richard A. Farrell,Hongyun Cottle,Daiji Kawamura,Lovejeet Singh,Tsuyoshi Furukawa,Kafai Lai,Jed W. Pitera,Daniel P. Sanders,David Hetzer,Andrew Metz,Nelson Felix,John Arnold,Matthew Colburn	2016	6
14	Three dimensional cellular microarray platform for human neural stem cell differentiation and toxicology Stem Cell Research ·Luciana Meli,Hélder S. C. Barbosa,Anne Hickey,Leyla Gasimli,Gregory J. Nierode,Maria Margarida Diogo,Robert J. Linhardt,Joaquim M. S. Cabral,Jonathan S. Dordick	2014	48
15	Microarray platform affords improved product analysis in mammalian cell growth studies Biotechnology Journal ·P.K. Datta,Luciana Meli,Lingyun Li,Nicole Migliore,Eugene Schaefer,Susan T. Sharfstein,Jonathan S. Dordick,Robert J. Linhardt	2013	7
16	Influence of a three-dimensional, microarray environment on human Cell culture in drug screening systems Biomaterials ·Luciana Meli,Eric T. Jordan,Douglas S. Clark,Robert J. Linhardt,Jonathan S. Dordick	2012	72
17	Room temperature ionic liquids as emerging solvents for the pretreatment of lignocellulosic biomass Biotechnology and Bioengineering ·Mauricio Mora‐Pale,Luciana Meli,Thomas V. Doherty,Robert J. Linhardt,Jonathan S. Dordick	2011	315
18	Aggregation and Coarsening of Ligand-Stabilized Gold Nanoparticles in Poly(methyl methacrylate) Thin Films ACS Nano ·Luciana Meli,Peter F. Green	2008	91
19	Structural Inversion of Micellar Block Copolymer Thin Films Macromolecules ·Yuan Li,Luciana Meli,Kwon Taek Lim,Keith P. Johnston,Peter F. Green	2006	19
20	Polystyrene thin films inCO2 Physical Review E ·Luciana Meli,Joseph Q. Pham,Keith P. Johnston,Peter F. Green	2004	26

About Luciana Meli

Luciana Meli is a scholar working on Surfaces, Coatings and Films, Electrical and Electronic Engineering and Electronic, Optical and Magnetic Materials, having authored 62 papers that have together received 1.2k indexed citations. Recurring topics across this work include Advancements in Photolithography Techniques (41 papers), Integrated Circuits and Semiconductor Failure Analysis (33 papers), Electron and X-Ray Spectroscopy Techniques (26 papers), Semiconductor materials and devices (8 papers), Block Copolymer Self-Assembly (7 papers), Copper Interconnects and Reliability (4 papers), Advanced Polymer Synthesis and Characterization (4 papers) and Silicon and Solar Cell Technologies (3 papers). The work is most often cited by research in Surfaces, Coatings and Films (163 citations), Catalysis (136 citations) and Biomaterials (216 citations). Luciana Meli has collaborated with scholars based in United States, Japan and South Korea. Frequent co-authors include Jonathan S. Dordick, Robert J. Linhardt, Peter F. Green, Timothy P. Lodge, Mauricio Mora‐Pale, Abraham Arceo, Jianjun Miao, Douglas S. Clark, Keith P. Johnston and Nelson Felix. Their work appears in journals such as Nano Letters, ACS Nano and Biomaterials.

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