Anthony Yen

1.0k citations
92 papers · 723 indexed · h-index 12

Impact in

    • Optical Coatings and Gratings
    • Electron and X-Ray Spectroscopy Techniques
    • Advancements in Photolithography Techniques
    • Integrated Circuits and Semiconductor Failure Analysis
    • Semiconductor materials and devices
    • Advancements in Semiconductor Devices and Circuit Design

Papers in

Anthony Yen

83 papers receiving 667 citations

Peers

Anthony Yen
Comparison fields: 5 of 54
  • Surfaces, Coatings and Films 167
  • Electrical and Electronic Engineering 518
  • Atomic and Molecular Physics, and Optics 162
  • Biomedical Engineering 219
  • Condensed Matter Physics 51
Replace Karen Petrillo with:
Karen Petrillo United States
Tomoaki Kawamura Japan
Shuyun Teng China
Soichi Owa Japan
Eelco van Setten Netherlands
G. Vergara Spain
Fumihiko Uesugi Japan
Noreen Harned Netherlands
Sung‐Tae Kim South Korea
H. Meiling Netherlands
Anthony Yen relative to Karen Petrillo United States Karen Petrillo's profile →
Citations per field
00.5×1.5×
Karen Petrillo · 1×
Citations per year

Countries citing papers authored by Anthony Yen

Since Specialization
Citations

This map shows the geographic impact of Anthony Yen's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Anthony Yen with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Anthony Yen more than expected).

Fields of papers citing papers by Anthony Yen

Since Specialization
Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Anthony Yen. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Anthony Yen. The network helps show where Anthony Yen may publish in the future.

Co-authorship network

The 25 scholars most cited alongside Anthony Yen, linked wherever they have co-authored with each other. Click a name or a connecting line to browse the papers they share.

Border = papers with Anthony Yen Line = papers co-authored together Anthony Yen links everyone, so they are left out of the graph.

All Works

20 of 20 papers shown
#Work
1 20231
2 20231
3 20227
4 20222
5 20206
6 201936
7 20156
8 20121
9 20018
10 20011
11 20011
12 19991
13 19994
14 19981
15 19973
16 19941
17 19916
18 19916
19 19904
20 198975

About Anthony Yen

Anthony Yen is a scholar working on Surfaces, Coatings and Films, Electrical and Electronic Engineering, Radiation, Industrial and Manufacturing Engineering and Media Technology, having authored 92 papers that have together received 723 indexed citations. Recurring topics across this work include Advancements in Photolithography Techniques (61 papers), Integrated Circuits and Semiconductor Failure Analysis (34 papers), Electron and X-Ray Spectroscopy Techniques (20 papers), Optical Coatings and Gratings (13 papers), Semiconductor materials and devices (10 papers), Nanofabrication and Lithography Techniques (9 papers), Photonic and Optical Devices (8 papers) and Advanced optical system design (6 papers). The work is most often cited by research in Surfaces, Coatings and Films (167 citations), Electrical and Electronic Engineering (518 citations), Atomic and Molecular Physics, and Optics (162 citations), Biomedical Engineering (219 citations) and Condensed Matter Physics (51 citations). Anthony Yen has collaborated with scholars based in United States, Taiwan and Belgium. Frequent co-authors include Henry I. Smith, James D. Klein, Yao-Ching Ku, C.H. Diaz, K.K. Young, D.A. Antoniadis, Mark L. Schattenburg, K. Ismail, W. K. Chu and Stuart F. Cogan. Their work appears in journals such as Microelectronic Engineering, Applied Physics Letters, Journal of Applied Physics, Journal of Micro/Nanolithography MEMS and MOEMS and Journal of Vacuum Science & Technology A Vacuum Surfaces and Films.

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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