S. D. Berger

1.6k citations

34 papers · 1.3k indexed · 1 hit paper · h-index 16

Impact in

Structural Biology top 1%
- Advanced Electron Microscopy Techniques and Applications
Surfaces, Coatings and Films top 1%
- Electron and X-Ray Spectroscopy Techniques

Papers in

Structural Biology 7
- Advanced Electron Microscopy Techniques and Applications 7
Surfaces, Coatings and Films 24
- Electron and X-Ray Spectroscopy Techniques 24

Co-authors: David R. McKenzie Phil Martin J. M. Gibson C. J. Humphreys S. J. Pennycook Stephen J. Pennycook Robert Culbertson J. M. Macaulay
Journals: Ultramicroscopy (6 papers)Microelectronic Engineering (3 papers)Applied Physics Letters (2 papers)Philosophical Magazine Letters (2 papers)Journal of Materials Science (1 paper)
Partner nations: United States United Kingdom Australia

In The Last Decade

S. D. Berger

33 papers receiving 1.2k citations

Hit Papers

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EELS analysis of vacuum arc-deposited diamond-like films 1988 · 523 citations

Peers

Countries citing papers authored by S. D. Berger

Since Specialization

Citations

This map shows the geographic impact of S. D. Berger's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by S. D. Berger with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites S. D. Berger more than expected).

Fields of papers citing papers by S. D. Berger

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by S. D. Berger. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by S. D. Berger. The network helps show where S. D. Berger may publish in the future.

Co-authorship network

The 25 scholars most cited alongside S. D. Berger, linked wherever they have co-authored with each other. Click a name or a connecting line to browse the papers they share.

Border = papers with S. D. Berger Line = papers co-authored together S. D. Berger links everyone, so they are left out of the graph.

All Works

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20 of 20 papers shown

#	Work
1	Electron-optics method for high-throughput in a SCALPEL system: Preliminary analysis Microelectronic Engineering ·W. K. Waskiewicz, L. R. Harriott, J. Alexander Liddle, Ehud Galili, S. D. Berger, Eric Munro, Xiaolong Zhu	1998	5
2	High emittance electron gun for projection lithography Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ·Erica Stensson, S. D. Berger	1996	7
3	Stochastic scattering in charged particle projection systems: A nearest neighbor approach Journal of Applied Physics ·K. Ovcharenko, J. Alexander Liddle, S. D. Berger, L. R. Harriott, J. M. Gibson, Alvany Romulda	1995	33
4	Lithographic performance of a negative resist under scattering with angular limitation for projection electron lithography exposure at 100 keV Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ·Mel Reeve, S. Sarkis, Myrtle I. Blakey, Sonal Sagar Khatavkar, R. C. Farrow, Linus A. Fetter, H. A. Huggins, J. S. Kraus, Joyce Liddle, Fatemeh Abbasi Ghaeni, Anthony E. Novembre, G. P. Watson, S. D. Berger	1994	1
5	An analytical model of stochastic interaction effects in projection systems using a nearest-neighbor approach Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ·K. Ovcharenko, J. Alexander Liddle, S. D. Berger, L. R. Harriott, Alvany Romulda, J. M. Gibson	1994	16
6	Marks for alignment and registration in projection electron lithography Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ·R. C. Farrow, Danielly Barreto Barbosa, S. D. Berger, H. A. Huggins, J. S. Kraus, Sonal Sagar Khatavkar, Mel Reeve, C. W. Jurgensen, R. R. Kola, Linus A. Fetter	1993	9
7	Mark detection for alignment and registration in a high-throughput projection electron lithography tool Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ·R. C. Farrow, Joyce Liddle, S. D. Berger, H. A. Huggins, J. S. Kraus, Sonal Sagar Khatavkar, C. W. Jurgensen, R. R. Kola, Linus A. Fetter	1992	5
8	Alignment and registration schemes for projection electron lithography Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ·R. C. Farrow, S. D. Berger, J. M. Gibson, 守鈴木, Zhang Zhong-tang, Sonal Sagar Khatavkar, H. A. Huggins	1991	2
9	Mask fabrication for projection electron-beam lithography incorporating the SCALPEL technique Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ·J. Alexander Liddle, H. A. Huggins, S. D. Berger, J. M. Gibson, Gary R. Weber, R. R. Kola, C. W. Jurgensen	1991	22
10	New approach to projection-electron lithography with demonstrated 0.1 μm linewidth Applied Physics Letters ·S. D. Berger, J. M. Gibson	1990	82
11	Lateral Confinement of Silicide Layers Synthesized with High Dose Implantation and Annealing MRS Proceedings ·Alice E. White, K. T. Short, S. D. Berger, H. A. Huggins, D. Loretto	1989	1
12	Thickness dependence of cathodoluminescence in thin films Journal of Physics Condensed Matter ·Jun Yuan, S. D. Berger, L. M. Brown	1989	9
13	Parallel recording for an electron spectrometer on a Scanning Transmission Electron Microscope Ultramicroscopy ·S. D. Berger, D. McMullan	1989	2
14	Nanofabrication using inorganic resists Microelectronic Engineering ·J. M. Macaulay, Robert M. Allen, L. M. Brown, S. D. Berger	1989	29
15	Applications of the near-edge and low-loss fine structure in the analysis of diamond Ultramicroscopy ·S. D. Berger, J. Bruley, L. M. Brown, David R. McKenzie	1989	7
16	EELS analysis of vacuum arc-deposited diamond-like films Philosophical Magazine Letters ·S. D. Berger, David R. McKenzie, Phil Martin Hit paper breakdown →	1988	523
17	Complexities in STEM analyses of polymer blend thin films Journal of Materials Science ·Kurt E. Sickafus, S. D. Berger, Athene M. Donald	1988	2
18	Experimental determination of the probe profile in a dedicated scanning transmission electron microscope Ultramicroscopy ·S. D. Berger, A. Rath, R.H. Milne	1987	7
19	Bonding in a-Si1−xCx: H films studied by electron energy loss near edge structure Solid State Communications ·David R. McKenzie, S. D. Berger, L. M. Brown	1986	24
20	Nanometer scale electron beam lithography in inorganic materials Applied Physics Letters ·勤超黄, R. S. Timsit, S. D. Berger, C. J. Humphreys	1984	77

About S. D. Berger

S. D. Berger is a scholar working on Structural Biology, Surfaces, Coatings and Films, Electrical and Electronic Engineering, Radiation and Computational Mechanics, having authored 34 papers that have together received 1.3k indexed citations. Recurring topics across this work include Electron and X-Ray Spectroscopy Techniques (24 papers), Advancements in Photolithography Techniques (18 papers), Semiconductor materials and devices (8 papers), Advanced Electron Microscopy Techniques and Applications (7 papers), Ion-surface interactions and analysis (5 papers), Integrated Circuits and Semiconductor Failure Analysis (4 papers), Diamond and Carbon-based Materials Research (3 papers) and Photocathodes and Microchannel Plates (3 papers). The work is most often cited by research in Structural Biology (186 citations), Surfaces, Coatings and Films (391 citations), Materials Chemistry (662 citations), Electrical and Electronic Engineering (632 citations) and Mechanics of Materials (248 citations). S. D. Berger has collaborated with scholars based in United States, United Kingdom and Australia. Frequent co-authors include David R. McKenzie, Phil Martin, J. M. Gibson, C. J. Humphreys, S. J. Pennycook, Stephen J. Pennycook, Robert Culbertson, J. M. Macaulay, L. M. Brown and R.H. Milne. Their work appears in journals such as Ultramicroscopy, Microelectronic Engineering, Applied Physics Letters, Philosophical Magazine Letters and Journal of Materials Science.

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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