Xueyu Qian

432 citations

19 papers · 334 indexed · h-index 11

Electrical and Electronic Engineering
- Semiconductor materials and devices 9
- Integrated Circuits and Semiconductor Failure Analysis 6
- Silicon and Solar Cell Technologies 5
- Plasma Diagnostics and Applications 4
- Electrodeposition and Electroless Coatings 3
Mechanics of Materials top 10%
- Metal and Thin Film Mechanics 5
Electronic, Optical and Magnetic Materials
- Copper Interconnects and Reliability 4
Surfaces, Coatings and Films
Materials Chemistry
Computational Mechanics
- Ion-surface interactions and analysis 3

Co-authors: N.W. Cheung M. A. Lieberman Michael Current D. V. Podlesnik John Holland Meng-Hsiung Kiang Ko Noguchi Susan B. Felch
Cited by: Electrical and Electronic Engineering Mechanics of Materials Electronic, Optical and Magnetic Materials
Journals: Physical Review Letters (1 paper)Applied Physics Letters (3 papers)Journal of Applied Physics (1 paper)
Partner nations: United States Japan China

In The Last Decade

Xueyu Qian

19 papers receiving 318 citations

Peers

Countries citing papers authored by Xueyu Qian

Since Specialization

Citations

This map shows the geographic impact of Xueyu Qian's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Xueyu Qian with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Xueyu Qian more than expected).

Fields of papers citing papers by Xueyu Qian

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Xueyu Qian. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Xueyu Qian. The network helps show where Xueyu Qian may publish in the future.

Co-authorship network

The 25 scholars most cited alongside Xueyu Qian, linked wherever they have co-authored with each other. Click a name or a connecting line to browse the papers they share.

Border = papers with Xueyu Qian Line = papers co-authored together Xueyu Qian links everyone, so they are left out of the graph.

All Works

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19 of 19 papers shown

#	Work
1	Experimental Study of Capacitive RF c-C4F8 Discharge with Synchrotron Vacuum Ultraviolet Photoionization Mass Spectrometry Plasma Chemistry and Plasma Processing ·Zhongyue Zhou,Mingfeng Xie,Tang Tang,Yijun Zhang,Tao Yuan,Fei Qi,Tom Ni,Xueyu Qian	2010	2
2	Characteristics and mechanism of etch process sensitivity to chamber surface condition Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ·Songlin Xu,Zhiwen Sun,Xueyu Qian,John Holland,D. V. Podlesnik	2001	58
3	Fluorocarbon polymer formation, characterization, and reduction in polycrystalline–silicon etching with CF4-added plasma Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ·Songlin Xu,Zhiwen Sun,Arthur Chen,Xueyu Qian,D. V. Podlesnik	2001	19
4	Pulse-time-modulated inductively coupled plasma etching for high-performance polysilicon patterning on thin gate oxides Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ·Hiroto Ohtake,Ko Noguchi,Seiji Samukawa,Hidekazu Iida,Arthur Sato,Xueyu Qian	2000	18
5	Spatial distributions of thin oxide charging in reactive ion etcher and MERIE etcher IEEE Electron Device Letters ·Hang‐Sik Shin,Ko Noguchi,Xueyu Qian,N. Jha,G. W. Hills,Chenming Hu	1993	25
6	Pd/Si plasma immersion ion implantation for selective electroless copper plating on SiO2 Applied Physics Letters ·Meng-Hsiung Kiang,M. A. Lieberman,N.W. Cheung,Xueyu Qian	1992	30
7	A plasma immersion ion implantation reactor for ULSI fabrication Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ·Xueyu Qian,D. Carl,J. Benasso,N.W. Cheung,M. A. Lieberman,I.G. Brown,James E. Galvin,R.A. MacGill,Michael Current	1991	18
8	Plasma immersion ion implantation of SiF4 and BF3 for sub-100 nm P+/N junction fabrication Applied Physics Letters ·Xueyu Qian,N.W. Cheung,M. A. Lieberman,Susan B. Felch,R. Brennan,Michael Current	1991	43
9	Conformal implantation for trench doping with plasma immersion ion implantation Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ·Xueyu Qian,N.W. Cheung,M. A. Lieberman,R. Brennan,Michael Current,N. Jha	1991	28
10	Plasma immersion Pd ion implantation seeding pattern formation for selective electroless Cu plating Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ·Xueyu Qian,Meng-Hsiung Kiang,J. Huang,D. Carl,N.W. Cheung,M. A. Lieberman,I.G. Brown,K. M. Yu,Michael Current	1991	17
11	Selective Copper Plating in Silicon Dioxide Trenches with Metal Plasma Immersion Ion Implantation MRS Proceedings ·Meng-Hsiung Kiang,Carey A. Pico,M. A. Lieberman,N.W. Cheung,Xueyu Qian,K. M. Yu	1991	5
12	Sub-100 mn p+/n junction formation using plasma immersion ion implantation Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ·Xueyu Qian,N.W. Cheung,M. A. Lieberman,Michael Current,Paul K. Chu,William L. Harrington,C. W. Magee,E. M. Botnick	1991	36
13	Metal vapor vacuum arc ion implantation for seeding of electroless Cu plating Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ·Xueyu Qian,Meng-Hsiung Kiang,N.W. Cheung,I.G. Brown,X. Godechot,James E. Galvin,R.A. MacGill,K. M. Yu	1991	11
14	Shallow P⁺-N Junction Fabrication by Plasma Immersion Ion Implantation MRS Proceedings ·Carey A. Pico,Xueyu Qian,E.C. Jones,M. A. Lieberman,N.W. Cheung	1991	4
15	Plasma Immersion Ion Implantation for Impurity Gettering in Silicon MRS Proceedings ·Hiu Yung Wong,Xueyu Qian,D. Carl,N.W. Cheung,M. A. Lieberman,I.G. Brown,K. M. Yu	1989	7
16	Layer Growth and Dynamics of Xenon Films Deposited on Ag(111) Physical Review Letters ·Xueyu Qian,Michael Bretz	1988	4
17	Focused Ion Beam Implantation of GaAs-GaAlAs Quantum Well Structures MRS Proceedings ·P. M. Petroff,Xueyu Qian,Per Olof Holtz,R. J. Simes,J. H. English,Kenneth M. Merz,R. L. Kubena	1988	3
18	Substrate misorientation effects on the structure and electronic properties of GaInAs-AlInAs interfaces Applied Physics Letters ·Yupeng Hu,P. M. Petroff,Xueyu Qian,Andrew S. Brown	1988	4
19	Solid state and magnetochemistry of the SrO-Fe2O3 system IV. Synthesis of SrFe12O19 from coprecipitated precursors Journal of Applied Physics ·Xueyu Qian,B. J. Evans	1981	2

About Xueyu Qian

Xueyu Qian is a scholar working on Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials and Mechanics of Materials, having authored 19 papers that have together received 334 indexed citations. Recurring topics across this work include Semiconductor materials and devices (9 papers), Integrated Circuits and Semiconductor Failure Analysis (6 papers), Silicon and Solar Cell Technologies (5 papers), Metal and Thin Film Mechanics (5 papers), Copper Interconnects and Reliability (4 papers), Plasma Diagnostics and Applications (4 papers), Ion-surface interactions and analysis (3 papers) and Electrodeposition and Electroless Coatings (3 papers). The work is most often cited by research in Electrical and Electronic Engineering (301 citations), Mechanics of Materials (119 citations) and Electronic, Optical and Magnetic Materials (51 citations). Xueyu Qian has collaborated with scholars based in United States, Japan and China. Frequent co-authors include N.W. Cheung, M. A. Lieberman, Michael Current, D. V. Podlesnik, John Holland, Meng-Hsiung Kiang, Ko Noguchi, Susan B. Felch, I.G. Brown and William L. Harrington. Their work appears in journals such as Physical Review Letters, Applied Physics Letters and Journal of Applied Physics.

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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