Michael Current

1.7k citations

116 papers · 1.2k indexed · h-index 19

Impact in

Computational Mechanics top 2%
- Ion-surface interactions and analysis
Electrical and Electronic Engineering top 5%
- Semiconductor materials and devices
- Integrated Circuits and Semiconductor Failure Analysis
- Silicon and Solar Cell Technologies
- Advancements in Semiconductor Devices and Circuit Design

Papers in ⓘ

Electrical and Electronic Engineering 98
- Integrated Circuits and Semiconductor Failure Analysis 68
- Semiconductor materials and devices 56
- Silicon and Solar Cell Technologies 48
- Advancements in Semiconductor Devices and Circuit Design 15
Computational Mechanics 30
- Ion-surface interactions and analysis 29

Co-authors: David N. Seidman (6 shared papers)Ching-Yeu Wei (5 shared papers)N.W. Cheung (6 shared papers)C. W. Magee (3 shared papers)M. A. Lieberman (5 shared papers)Xueyu Qian (5 shared papers)John Borland (5 shared papers)O. W. Holland (2 shared papers)
Journals: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms (20 papers)Journal of Vacuum Science & Technology A Vacuum Surfaces and Films (4 papers)Applied Physics Letters (3 papers)Philosophical magazine. A/Philosophical magazine. A. Physics of condensed matter. Structure, defects and mechanical properties (3 papers)IEEE Transactions on Electron Devices (3 papers)
Partner nations: United States Japan Taiwan

In The Last Decade

Michael Current

101 papers receiving 1.2k citations

Peers

Countries citing papers authored by Michael Current

Since Specialization

Citations

This map shows the geographic impact of Michael Current's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Michael Current with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Michael Current more than expected).

Fields of papers citing papers by Michael Current

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Michael Current. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Michael Current. The network helps show where Michael Current may publish in the future.

Co-authors

The 25 scholars most cited alongside Michael Current, linked wherever they have co-authored with each other. Click a name or a connecting line to browse the papers they share.

Border = papers with Michael Current Line = papers co-authored together Michael Current links everyone, so they are left out of the graph.

All Works

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20 of 20 papers shown

Showing the 20 most-cited of 116 papers — load more, or switch the sort, to bring in the rest.

#	Work
1	Ion beams in silicon processing and characterization Journal of Applied Physics ·Eric Chason, S. T. Picraux, J. M. Poate, John Borland, Michael Current, T. Dı́az de la Rubia, D. J. Eaglesham, O. W. Holland, Mark E. Law, C. W. Magee, J. W. Mayer, J. Melngailis, A.F. Tasch	1997	213
2	Low-Temperature Microwave Annealing Processes for Future IC Fabrication—A Review IEEE Transactions on Electron Devices ·Yao‐Jen Lee, Ta-Chun Cho, Shang-Shiun Chuang, Fu-Kuo Hsueh, Yu‐Lun Lu, Po-Jung Sung, Hsiu-Chih Chen, Michael Current, Tseung‐Yuen Tseng, Tien‐Sheng Chao, Chenming Hu, Fu-Liang Yang	2014	56
3	Plasma immersion ion implantation of SiF4 and BF3 for sub-100 nm P+/N junction fabrication Applied Physics Letters ·Xueyu Qian, N.W. Cheung, M. A. Lieberman, Susan B. Felch, R. Brennan, Michael Current	1991	43
4	Direct observation of the primary state of damage of ion-irradiated tungsten. II. Definitions, analyses and results Philosophical magazine. A/Philosophical magazine. A. Physics of condensed matter. Structure, defects and mechanical properties ·Michael Current, Ching-Yeu Wei, David N. Seidman	1983	43
5	Characterization of Particulates from Power Plants Journal of the Air Pollution Control Association ·Roger Cheng, Volker A. Mohnen, Thomas T. Shen, Michael Current, John B. Hudson	1976	42
6	Direct observation of the primary state of damage of ion-irradiated tungsten I. Three-dimensional spatial distribution of vacancies Philosophical magazine. A/Philosophical magazine. A. Physics of condensed matter. Structure, defects and mechanical properties ·Ching-Yeu Wei, Michael Current, David N. Seidman	1981	42
7	Ion Implantation for Semiconductor Doping and Materials Modification Lawrence A. Larson, Justin Williams, Michael Current	2011	39
8	Sub-100 mn p+/n junction formation using plasma immersion ion implantation Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ·Xueyu Qian, N.W. Cheung, M. A. Lieberman, Michael Current, Paul K. Chu, William L. Harrington, C. W. Magee, E. M. Botnick	1991	36
9	A novel junctionless FinFET structure with sub-5nm shell doping profile by molecular monolayer doping and microwave annealing Y.-J. Lee, T.-C. Cho, Kuo-Hsing Kao, P.-J. Sung, Fu-Kuo Hsueh, Po-Chiun Huang, C.-T. Wu, Shu‐Han Hsu, Wei‐Hsing Huang, H.-C. Chen, Yiming Li, Michael Current, B. Hengstebeck, John Marino, Temel Büyüklimanli, Jia‐Min Shieh, Tien‐Sheng Chao, Wen-Fa Wu, W.-K. Yeh	2014	36
10	Ion implantation of advanced silicon devices: Past, present and future Materials Science in Semiconductor Processing ·Michael Current	2016	30
11	Single atom sputtering events Direct observation of near-surface depleted zones in ion-irradiated tungsten Philosophical magazine. A/Philosophical magazine. A. Physics of condensed matter. Structure, defects and mechanical properties ·Michael Current, Ching-Yeu Wei, David N. Seidman	1981	30
12	Conformal implantation for trench doping with plasma immersion ion implantation Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ·Xueyu Qian, N.W. Cheung, M. A. Lieberman, R. Brennan, Michael Current, N. Jha	1991	28
13	Irradiation effects of gas-cluster CO2 ion beams on Si Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ·Isao Yamada, Gikan H. Takaoka, Michael Current, Yasuo Yamashita, Mamoru Ishii	1993	27
14	Accurate Sheet Resistance Measurement on Ultra-Shallow Profiles MRS Proceedings ·Trudo Clarysse, Alain Moussa, Frederik Leys, Roger Loo, Wilfried Vandervorst, Mark C. Benjamin, Robert Hillard, Vladimir Faifer, Michael Current, Rong Lin, Dirch Hjorth Petersen	2006	26
15	Planar channeling effects in Si(100) Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ·Michael Current, N. Turner, T. C. Smith, Dave Crane	1985	25
16	Direct observations of the primary state of radiation damage of ion-irradiated tungsten and platinum Nuclear Instruments and Methods ·David N. Seidman, Michael Current, Dipankar Pramanik, Ching-Yeu Wei	1981	21
17	Noncontact sheet resistance and leakage current mapping for ultra-shallow junctions Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ·Vladimir Faifer, Michael Current, Theodore M. Wong, Vitali Souchkov	2006	20
18	Review of secondary ion mass spectrometry characterization of contamination associated with ion implantation Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ·F. A. Stevie, R. G. Wilson, David S. Simons, Michael Current, P. C. Zalm	1994	19
19	A plasma immersion ion implantation reactor for ULSI fabrication Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ·Xueyu Qian, D. Carl, J. Benasso, N.W. Cheung, M. A. Lieberman, I.G. Brown, James E. Galvin, R.A. MacGill, Michael Current	1991	18
20	The effect of recoiled oxygen on damage regrowth and electrical properties of through-oxide implanted Si Nuclear Instruments and Methods in Physics Research ·D. K. Sadana, Nilson Wu, J. Washburn, Michael Current, A. E. Morgan, David Reed, M. Mäenpää	1983	17

About Michael Current

Michael Current is a scholar working on Electrical and Electronic Engineering, Computational Mechanics, Surfaces, Coatings and Films, Atomic and Molecular Physics, and Optics and Mechanics of Materials, having authored 116 papers that have together received 1.2k indexed citations. Recurring topics across this work include Integrated Circuits and Semiconductor Failure Analysis (68 papers), Semiconductor materials and devices (56 papers), Silicon and Solar Cell Technologies (48 papers), Ion-surface interactions and analysis (29 papers), Semiconductor materials and interfaces (21 papers), Advancements in Semiconductor Devices and Circuit Design (15 papers), Metal and Thin Film Mechanics (9 papers) and Electron and X-Ray Spectroscopy Techniques (8 papers). The work is most often cited by research in Computational Mechanics (382 citations), Electrical and Electronic Engineering (915 citations), Atomic and Molecular Physics, and Optics (261 citations), Materials Chemistry (381 citations) and Structural Biology (10 citations). Michael Current has collaborated with scholars based in United States, Japan and Taiwan. Frequent co-authors include David N. Seidman, Ching-Yeu Wei, N.W. Cheung, C. W. Magee, M. A. Lieberman, Xueyu Qian, John Borland, O. W. Holland, J. M. Poate and J. W. Mayer. Their work appears in journals such as Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films, Applied Physics Letters, Philosophical magazine. A/Philosophical magazine. A. Physics of condensed matter. Structure, defects and mechanical properties and IEEE Transactions on Electron Devices.

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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