Kazuo Nojiri

570 total citations
16 papers, 412 citations indexed

About

Kazuo Nojiri is a scholar working on Electrical and Electronic Engineering, Materials Chemistry and Mechanics of Materials. According to data from OpenAlex, Kazuo Nojiri has authored 16 papers receiving a total of 412 indexed citations (citations by other indexed papers that have themselves been cited), including 15 papers in Electrical and Electronic Engineering, 4 papers in Materials Chemistry and 3 papers in Mechanics of Materials. Recurrent topics in Kazuo Nojiri's work include Semiconductor materials and devices (11 papers), Plasma Diagnostics and Applications (5 papers) and Advancements in Semiconductor Devices and Circuit Design (4 papers). Kazuo Nojiri is often cited by papers focused on Semiconductor materials and devices (11 papers), Plasma Diagnostics and Applications (5 papers) and Advancements in Semiconductor Devices and Circuit Design (4 papers). Kazuo Nojiri collaborates with scholars based in Japan and United States. Kazuo Nojiri's co-authors include Samantha Tan, Keren J. Kanarik, Wenbing Yang, Takashi Yunogami, Richard A. Gottscho, Eric A. Hudson, Taeseung Kim, Rich Wise, Ivan L. Berry and Yang Pan and has published in prestigious journals such as Thin Solid Films, Japanese Journal of Applied Physics and Journal of Vacuum Science & Technology A Vacuum Surfaces and Films.

In The Last Decade

Kazuo Nojiri

16 papers receiving 386 citations

Peers

Countries citing papers authored by Kazuo Nojiri

Since Specialization

Citations

This map shows the geographic impact of Kazuo Nojiri's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Kazuo Nojiri with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Kazuo Nojiri more than expected).

Fields of papers citing papers by Kazuo Nojiri

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Kazuo Nojiri. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Kazuo Nojiri. The network helps show where Kazuo Nojiri may publish in the future.

Co-authorship network of co-authors of Kazuo Nojiri

This figure shows the co-authorship network connecting the top 25 collaborators of Kazuo Nojiri. A scholar is included among the top collaborators of Kazuo Nojiri based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with Kazuo Nojiri. Kazuo Nojiri is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

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16 of 16 papers shown

#	Work	Indexed citations
1	Predicting synergy in atomic layer etching 2017 ·Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ·Keren J. Kanarik, Samantha Tan, Wenbing Yang, Taeseung Kim, Thorsten Lill, (unknown), Eric A. Hudson, (unknown), Kazuo Nojiri, (unknown), Rich Wise, Ivan L. Berry, Yang Pan, Jeffrey M. Marks, Richard A. Gottscho	98
2	Atomic layer etching of GaN and AlGaN using directional plasma-enhanced approach 2017 ·Japanese Journal of Applied Physics ·(unknown), Wenbing Yang, Samantha Tan, Keren J. Kanarik, Kazuo Nojiri	61
3	Dry Etching Technology for Semiconductors 2014 ·CERN Document Server (European Organization for Nuclear Research) ·Kazuo Nojiri	131
4	Piezoresistance of Ga doped ZnO nanorods grown by hydrothermal deposition 2010 ·Transactions of the Materials Research Society of Japan ·(unknown), Hiroki Ito, Kazuo Nojiri, (unknown), Yo Ichikawa	1
5	Challenges in etch: What's new? 2007 ·Thin Solid Films ·Richard A. Gottscho, Kazuo Nojiri, (unknown)	5
6	Evaluation and reduction of electron shading damage in high temperature etching 2003 ·Kazuo Nojiri, Kazuaki Kato, Hideaki Kawakami	1
7	Pattern-size effect on electron shading 2002 ·(unknown), (unknown), (unknown), Kazuo Nojiri, Tetsuo Ono	2
8	Anisotropic etching of RuO2 and Ru with high aspect ratio for gigabit dynamic random access memory 2000 ·Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ·Takashi Yunogami, Kazuo Nojiri	27
9	High rate and highly selective anisotropic etching for WSix/poly-Si using electron cyclotron resonance plasma 1996 ·Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ·Kazuo Nojiri, (unknown), Kazuo Yamazaki	8
10	Electron cyclotron resonance plasma etching of silicon dioxide for deep-submicron ultralarge scale integrations 1995 ·Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ·Kazuo Nojiri, (unknown)	15
11	Study of gate oxide breakdown caused by charge buildup during dry etching 1993 ·Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ·Kazuo Nojiri, (unknown)	15
12	Microwave Plasma Etching of Silicon Dioxide for Half-Micron ULSIs 1989 ·Kazuo Nojiri, (unknown), Koichiro Kawamura, (unknown)	2
13	The Effect of Charge Build-up on Gate Oxide Breakdown during Dry Etching 1987 ·(unknown), Kazuo Nojiri, (unknown), (unknown)	22
14	Formation of deep holes in silicon by reactive ion etching 1987 ·Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ·(unknown), (unknown), Kazuo Nojiri	19
15	Studies on the tooth surface strength of spur gears. Effects of lubricating oils on tempered gears and case hardened gears. 1987 ·TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C ·(unknown), (unknown), (unknown), Kazuo Nojiri	1
16	A New Isolation Technology for VLSI 1985 ·Kazuo Nojiri, (unknown), (unknown), (unknown), (unknown), Shigenobu Kishino	4

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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