Adam Urbanowicz

856 total citations
49 papers, 711 citations indexed

About

Adam Urbanowicz is a scholar working on Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials and Mechanics of Materials. According to data from OpenAlex, Adam Urbanowicz has authored 49 papers receiving a total of 711 indexed citations (citations by other indexed papers that have themselves been cited), including 42 papers in Electrical and Electronic Engineering, 36 papers in Electronic, Optical and Magnetic Materials and 24 papers in Mechanics of Materials. Recurrent topics in Adam Urbanowicz's work include Copper Interconnects and Reliability (36 papers), Semiconductor materials and devices (36 papers) and Metal and Thin Film Mechanics (24 papers). Adam Urbanowicz is often cited by papers focused on Copper Interconnects and Reliability (36 papers), Semiconductor materials and devices (36 papers) and Metal and Thin Film Mechanics (24 papers). Adam Urbanowicz collaborates with scholars based in Belgium, Germany and United States. Adam Urbanowicz's co-authors include Mikhaı̈l R. Baklanov, Denis Shamiryan, Kris Vanstreels, Т. В. Рахимова, Stefan De Gendt, Jean‐François de Marneffe, Huai Huang, Hualiang Shi, Paul S. Ho and Patrick Verdonck and has published in prestigious journals such as Journal of Applied Physics, Physical Review B and Journal of The Electrochemical Society.

In The Last Decade

Adam Urbanowicz

35 papers receiving 674 citations

Peers

Adam Urbanowicz

EEE

EOMM

N. Possémé France

Larry Zhao Belgium

Mao‐Chieh Chen Taiwan

Marc French United States

F. Fillot France

H. Shinriki Japan

Xuan Thang Trinh Sweden

Syun‐Ming Jang Taiwan

L.G. Gosset France

Hideto Yanagisawa Japan

N. Possémé France

Adam Urbanowicz

668 ×1.1

EEE

376 ×0.7

EOMM

248 ×0.7

236 ×1.8

27 ×0.5

Citations per year, relative to Adam Urbanowicz Adam Urbanowicz (= 1×) peers N. Possémé

Countries citing papers authored by Adam Urbanowicz

Since Specialization

Citations

This map shows the geographic impact of Adam Urbanowicz's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Adam Urbanowicz with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Adam Urbanowicz more than expected).

Fields of papers citing papers by Adam Urbanowicz

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Adam Urbanowicz. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Adam Urbanowicz. The network helps show where Adam Urbanowicz may publish in the future.

Co-authorship network of co-authors of Adam Urbanowicz

This figure shows the co-authorship network connecting the top 25 collaborators of Adam Urbanowicz. A scholar is included among the top collaborators of Adam Urbanowicz based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with Adam Urbanowicz. Adam Urbanowicz is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

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20 of 20 papers shown

Kwon, Hyeok-Il, Adam Urbanowicz, Igor Turovets, et al.. (2025). Critical in-line OCD metrology for CFET manufacturing. 4–4. 1 indexed citations

Moussa, Alain, Janusz Bogdanowicz, Benjamin Groven, et al.. (2023). 300mm in-line metrologies for the characterization of ultra-thin layer of 2D materials. 65–65. 4 indexed citations

Urbanowicz, Adam, et al.. (2020). Ultra large pitch and depth structures metrology using spectral reflectometry in combination with RCWA based model and TLM Algorithm : AM: Advanced Metrology. 49. 1–4. 1 indexed citations

Urbanowicz, Adam, et al.. (2018). Context-based virtual metrology. 7971. 39–39. 2 indexed citations

Urbanowicz, Adam, et al.. (2017). Practical aspects of TMU based analysis for scatterometry model referencing AM: Advanced metrology. 5375. 34–39. 2 indexed citations

Baklanov, Mikhaı̈l R., Jean‐François de Marneffe, Denis Shamiryan, et al.. (2013). Plasma processing of low-k dielectrics. Journal of Applied Physics. 113(4). 243 indexed citations

Verdonck, Patrick, Els Van Besien, Kris Vanstreels, et al.. (2011). Influence of the UV Cure on Advanced Plasma Enhanced Chemical Vapour Deposition Low-k Materials. Japanese Journal of Applied Physics. 50(5S1). 05EB05–05EB05. 7 indexed citations

Maršík, P., et al.. (2011). Effect of ultraviolet curing wavelength on low-k dielectric material properties and plasma damage resistance. Thin Solid Films. 519(11). 3619–3626. 24 indexed citations

Urbanowicz, Adam, et al.. (2010). Mechanism of k-value Reduction of PECVD Low-k Films Treated with He/H2 Ash Plasma. Lirias (KU Leuven). 2 indexed citations

10.

Friedrich, Daniel, Karsten Henkel, Adam Urbanowicz, et al.. (2010). Fullerene based materials for ultra-low-k application. Publikationsdatenbank der Fraunhofer-Gesellschaft (Fraunhofer-Gesellschaft). 39–43. 5 indexed citations

11.

Urbanowicz, Adam, et al.. (2010). Effects of He Plasma Pretreatment on Low-k Damage during Cu Surface Cleaning with NH[sub 3] Plasma. Journal of The Electrochemical Society. 157(5). H565–H565. 25 indexed citations

12.

Struyf, Herbert, Jean‐François de Marneffe, C. Huffman, et al.. (2010). Metal hard-Mask Based Double Patterning for 22nm and Beyond. Lirias (KU Leuven). 75–82. 1 indexed citations

13.

Urbanowicz, Adam, et al.. (2009). Porogen Residue Free Ultra Low-k PECVD Material: Fabrication, Optical and Mechanical Properties. Lirias (KU Leuven). 1 indexed citations

14.

Eslava, Salvador, Francesca Iacopi, Adam Urbanowicz, et al.. (2008). Ultraviolet-Assisted Curing of Organosilicate Glass Low-k Dielectric by Excimer Lamps. Journal of The Electrochemical Society. 155(11). G231–G231. 21 indexed citations

15.

Maršík, P., et al.. (2008). Changes of UV Optical Properties of Plasma Damaged Low-k Dielectrics for Sidewall Damage Scatterometry. MRS Proceedings. 1079. 3 indexed citations

16.

Tökei, Zsolt, Mikhaı̈l R. Baklanov, Ivan Ciofi, Yunlong Li, & Adam Urbanowicz. (2008). Plasma-induced Low-k Modification and Its Impact on Reliability. Lirias (KU Leuven). 35. 1–6. 2 indexed citations

17.

Rysiakiewicz‐Pasek, E., Mirosław Mączka, & Adam Urbanowicz. (2007). Structural study of NaNO₂ embedded into porous glass. Physica status solidi. C, Conferences and critical reviews/Physica status solidi. C, Current topics in solid state physics. 4(3). 757–760. 1 indexed citations

18.

Rysiakiewicz‐Pasek, E., et al.. (2006). Properties of porous glasses with embedded ferroelectric materials. Journal of Non-Crystalline Solids. 352(40-41). 4309–4314. 26 indexed citations

19.

Baklanov, Mikhaı̈l R., et al.. (2006). Moisture Induced Degradation of Porous Low-k Materials. MRS Proceedings. 914. 8 indexed citations

20.

Rysiakiewicz‐Pasek, E., et al.. (2005). Porous glasses with sodium nitrite impregnations. Optica Applicata. 35(4). 769–774. 4 indexed citations

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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