Samantha Tan

1.4k total citations · 1 hit paper
23 papers, 1.1k citations indexed

About

Samantha Tan is a scholar working on Electrical and Electronic Engineering, Materials Chemistry and Mechanics of Materials. According to data from OpenAlex, Samantha Tan has authored 23 papers receiving a total of 1.1k indexed citations (citations by other indexed papers that have themselves been cited), including 16 papers in Electrical and Electronic Engineering, 8 papers in Materials Chemistry and 3 papers in Mechanics of Materials. Recurrent topics in Samantha Tan's work include Semiconductor materials and devices (15 papers), Electronic and Structural Properties of Oxides (8 papers) and Plasma Diagnostics and Applications (6 papers). Samantha Tan is often cited by papers focused on Semiconductor materials and devices (15 papers), Electronic and Structural Properties of Oxides (8 papers) and Plasma Diagnostics and Applications (6 papers). Samantha Tan collaborates with scholars based in United States, Austria and Belgium. Samantha Tan's co-authors include Keren J. Kanarik, Richard A. Gottscho, Thorsten Lill, Vahid Vahedi, Jeffrey M. Marks, Eric A. Hudson, Saravanapriyan Sriraman, Wenbing Yang, Kazuo Nojiri and Ivan L. Berry and has published in prestigious journals such as Journal of The Electrochemical Society, The Journal of Physical Chemistry Letters and Japanese Journal of Applied Physics.

In The Last Decade

Samantha Tan

22 papers receiving 1.0k citations

Hit Papers

align trajectories

What are hit papers?

Hit papers significantly outperform the citation benchmark for their cohort. A paper qualifies if it has ≥500 total citations, achieves ≥1.5× the top-1% citation threshold for papers in the same subfield and year (this is the minimum needed to enter the top 1%, not the average within it), or reaches the top citation threshold in at least one of its specific research topics.

Overview of atomic layer etching in the semiconductor industry

2015 479 citations Keren J. Kanarik, Thorsten Lill et al. Journal of Vacuum Science & Technology A Vacuum Surfaces and Films profile →

Peers

Countries citing papers authored by Samantha Tan

Since Specialization

Citations

This map shows the geographic impact of Samantha Tan's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Samantha Tan with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Samantha Tan more than expected).

Fields of papers citing papers by Samantha Tan

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Samantha Tan. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Samantha Tan. The network helps show where Samantha Tan may publish in the future.

Co-authorship network of co-authors of Samantha Tan

This figure shows the co-authorship network connecting the top 25 collaborators of Samantha Tan. A scholar is included among the top collaborators of Samantha Tan based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with Samantha Tan. Samantha Tan is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

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20 of 20 papers shown

#	Work	Indexed citations
1	Kinetics model for thermal selective etching of Si1−xGex in F2/Ar 2025 ·Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ·(unknown), Daniel J. Cho, (unknown), (unknown), Ji Zhu, Samantha Tan, Jane P. Chang	0
2	Dry Deposition and Dry Development of Metal Oxide Based Photoresist 2024 ·Journal of Photopolymer Science and Technology ·(unknown), (unknown), Haider Ali, Linh Cao Hoang, (unknown), (unknown), (unknown), Young‐Hee Lee, Da Li, Samantha Tan, (unknown), Chenghao Wu, (unknown), (unknown), Yichi Zhang, Robert L. Brainard, Gregory Denbeaux, (unknown), (unknown), Mark Sherwood	3
3	Utility of quantitative susceptibility mapping and diffusion kurtosis imaging in the diagnosis of early Parkinson’s disease 2021 ·NeuroImage Clinical ·Samantha Tan, Septian Hartono, Thomas Welton, (unknown), (unknown), Tong San Koh, Huihua Li, (unknown), Samuel Yong‐Ern Ng, Nicole Shuang Yu Chia, Saifeng Liu, E. Mark Haacke, Eng King Tan, Louis C.S. Tan, Ling Ling Chan	20
4	Quasi-atomic layer etching of Si and nitride hard mask with Cl2 based chemistry 2021 ·Tao Li, S. A. Schmitz, (unknown), Samantha Tan, Wenbing Yang, Indira Seshadri	1
5	Universal scaling relationship for atomic layer etching 2020 ·Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ·Keren J. Kanarik, Samantha Tan, Wenbing Yang, Ivan L. Berry, Yang Pan, Richard A. Gottscho	14
6	Atomic Layer Etching: Benefits and Challenges 2018 ·Thorsten Lill, Keren J. Kanarik, Samantha Tan, (unknown), Andreas Fischer, Vahid Vahedi, Richard A. Gottscho	3
7	Atomic Layer Etching: Rethinking the Art of Etch 2018 ·The Journal of Physical Chemistry Letters ·Keren J. Kanarik, Samantha Tan, Richard A. Gottscho	166
8	Predicting synergy in atomic layer etching 2017 ·Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ·Keren J. Kanarik, Samantha Tan, Wenbing Yang, Taeseung Kim, Thorsten Lill, (unknown), Eric A. Hudson, (unknown), Kazuo Nojiri, (unknown), Rich Wise, Ivan L. Berry, Yang Pan, Jeffrey M. Marks, Richard A. Gottscho	98
9	Integrated approach to improving local CD uniformity in EUV patterning 2017 ·Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·(unknown), Jan Hermans, Timothy H. Tran, (unknown), (unknown), Brandon Ward, (unknown), (unknown), (unknown), (unknown), David del Rio, (unknown), Samantha Tan, Rich Wise, Mircea Dusa, (unknown), (unknown), (unknown), (unknown), (unknown)	11
10	Atomic layer etching of GaN and AlGaN using directional plasma-enhanced approach 2017 ·Japanese Journal of Applied Physics ·(unknown), Wenbing Yang, Samantha Tan, Keren J. Kanarik, Kazuo Nojiri	61
11	Patterning in the era of atomic scale fidelity 2015 ·Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Thorsten Lill, Samantha Tan, Keren J. Kanarik, (unknown), (unknown), Meihua Shen, Vahid Vahedi, Jeffrey M. Marks, Richard A. Gottscho	6
12	(Invited) Divide Et Impera: Towards New Frontiers with Atomic Layer Etching 2015 ·ECS Transactions ·Thorsten Lill, Keren J. Kanarik, Samantha Tan, Meihua Shen, Yang Pan, Jeffrey M. Marks, Vahid Vahedi, Richard A. Gottscho	2
13	Overview of atomic layer etching in the semiconductor industry breakdown → 2015 ·Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ·Keren J. Kanarik, Thorsten Lill, Eric A. Hudson, Saravanapriyan Sriraman, Samantha Tan, Jeffrey M. Marks, Vahid Vahedi, Richard A. Gottscho	479
14	Effect of asperities on stress dependency of elastic properties of cracked rocks 2015 ·International Journal of Engineering Science ·Stanislav Glubokovskikh, Boris Gurevich, Maxim Lebedev, V. Mikhaltsevitch, Samantha Tan	26
15	Highly Selective Directional Atomic Layer Etching of Silicon 2015 ·ECS Journal of Solid State Science and Technology ·Samantha Tan, Wenbing Yang, Keren J. Kanarik, Thorsten Lill, Vahid Vahedi, (unknown), Richard A. Gottscho	38
16	The influence of post-etch InGaAs fin profile on electrical performance 2014 ·Japanese Journal of Applied Physics ·(unknown), (unknown), Dennis Lin, (unknown), Samantha Tan, (unknown), David Hellin, (unknown), H. Bender, (unknown), (unknown), Nadine Collaert, (unknown), Vahid Vahedi, Reza Arghavani, Aaron Thean	7
17	Effective Defect Control in TiN Metal Hard Mask Cu/Low-k Dual Damascene Process 2013 ·ECS Transactions ·(unknown), Samantha Tan, Eric A. Hudson, (unknown), Lajos Gáncs, Jeffrey M. Marks	4
18	Effective Defect Control in TiN Metal Hard Mask Cu/Low-k Dual Damascene Process 2013 ·ECS Meeting Abstracts ·(unknown), Samantha Tan, Eric A. Hudson, (unknown), Lajos Gáncs, Jeffrey M. Marks	1
19	The World Café in Singapore 2005 ·The Journal of Applied Behavioral Science ·Samantha Tan, (unknown)	61
20	Measurement of Trace Metallic Contaminants on Silicon Wafer Surfaces in Native and Dielectric Silicon Oxides by Vapor Phase Decomposition Flow Injection Inductively Coupled Plasma‐Mass Spectrometry 1993 ·Journal of The Electrochemical Society ·(unknown), Samantha Tan, (unknown)	16

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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