Mireille Maenhoudt

641 citations
47 papers · 459 · h-index 12

Impact in

Papers in

    • Advancements in Photolithography Techniques 41
    • 3D IC and TSV technologies 12
    • Integrated Circuits and Semiconductor Failure Analysis 11
    • Semiconductor materials and devices 6
    • Nanofabrication and Lithography Techniques 12
    • Advanced Surface Polishing Techniques 12

Mireille Maenhoudt

45 papers receiving 419 citations

Peers

Mireille Maenhoudt
Comparison fields: 5 of 37
  • Surfaces, Coatings and Films 105
  • Electrical and Electronic Engineering 420
  • Hardware and Architecture 45
  • Biomedical Engineering 212
  • Electronic, Optical and Magnetic Materials 61
Replace Yunfei Deng with:
Yunfei Deng United States
Mark D. Smith United States
Yuansheng Ma United States
Mircea Dusa Netherlands
Carlos Fonseca United States
Katsuya Okumura Japan
Neal Lafferty United States
John L. Sturtevant United States
Han-Ku Cho South Korea
Ki‐Ho Baik United States
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Citations per field
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Citations per year

Countries citing papers authored by Mireille Maenhoudt

Since Specialization
Citations

This map shows the geographic impact of Mireille Maenhoudt's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Mireille Maenhoudt with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Mireille Maenhoudt more than expected).

Fields of papers citing papers by Mireille Maenhoudt

Since Specialization
Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Mireille Maenhoudt. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Mireille Maenhoudt. The network helps show where Mireille Maenhoudt may publish in the future.

Co-authors

The 25 scholars most cited alongside Mireille Maenhoudt, linked wherever they have co-authored with each other. Click a name or a connecting line to browse the papers they share.

Border = papers with Mireille Maenhoudt Line = papers co-authored together Mireille Maenhoudt links everyone, so they are left out of the graph.

All Works

20 of 20 papers shown

Showing the 20 most-cited of 47 papers — load more, or switch the sort, to bring in the rest.

#Work
1 200773
2 200539
3 200835
4 200930
5 199925
6 200923
7 201021
8 200820
9
Double Patterning scheme for sub-0.25 k1 single damascene structures at NA=0.75, λ=193nm
200516
10 200816
11 200113
12 200912
13 200111
14 200311
15 200611
16 200710
17 20109
18 20068
19 20057
20 20096

About Mireille Maenhoudt

Mireille Maenhoudt is a scholar working on Electrical and Electronic Engineering, Biomedical Engineering, Electronic, Optical and Magnetic Materials, Surfaces, Coatings and Films and Mechanical Engineering, having authored 47 papers that have together received 459 indexed citations. Recurring topics across this work include Advancements in Photolithography Techniques (41 papers), Copper Interconnects and Reliability (14 papers), Nanofabrication and Lithography Techniques (12 papers), 3D IC and TSV technologies (12 papers), Advanced Surface Polishing Techniques (12 papers), Integrated Circuits and Semiconductor Failure Analysis (11 papers), Optical Coatings and Gratings (8 papers) and Semiconductor materials and devices (6 papers). The work is most often cited by research in Surfaces, Coatings and Films (105 citations), Electrical and Electronic Engineering (420 citations), Hardware and Architecture (45 citations), Biomedical Engineering (212 citations) and Electronic, Optical and Magnetic Materials (61 citations). Mireille Maenhoudt has collaborated with scholars based in Belgium, United States and Netherlands. Frequent co-authors include Roel Gronheid, Herbert Struyf, Geert Vandenberghe, Vincent Wiaux, Mircea Dusa, Jo Finders, M. Van Hove, Kurt Ronse, Janko Versluijs and T. Vandeweyer. Their work appears in journals such as Microelectronic Engineering, Journal of Photopolymer Science and Technology, IEEE Transactions on Circuits and Systems I Regular Papers, Journal of The Electrochemical Society and Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena.

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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