James S. Greeneich

491 total citations
16 papers, 301 citations indexed

About

James S. Greeneich is a scholar working on Electrical and Electronic Engineering, Surfaces, Coatings and Films and Mechanical Engineering. According to data from OpenAlex, James S. Greeneich has authored 16 papers receiving a total of 301 indexed citations (citations by other indexed papers that have themselves been cited), including 14 papers in Electrical and Electronic Engineering, 10 papers in Surfaces, Coatings and Films and 4 papers in Mechanical Engineering. Recurrent topics in James S. Greeneich's work include Advancements in Photolithography Techniques (12 papers), Electron and X-Ray Spectroscopy Techniques (9 papers) and Semiconductor materials and devices (5 papers). James S. Greeneich is often cited by papers focused on Advancements in Photolithography Techniques (12 papers), Electron and X-Ray Spectroscopy Techniques (9 papers) and Semiconductor materials and devices (5 papers). James S. Greeneich collaborates with scholars based in United States and Netherlands. James S. Greeneich's co-authors include T. Van Duzer, Robert Herzog, T. E. Everhart, Burn J. Lin, S. Wittekoek and F. Auracher and has published in prestigious journals such as Journal of Applied Physics, Journal of The Electrochemical Society and IEEE Transactions on Electron Devices.

In The Last Decade

James S. Greeneich

15 papers receiving 272 citations

Peers

Countries citing papers authored by James S. Greeneich

Since Specialization

Citations

This map shows the geographic impact of James S. Greeneich's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by James S. Greeneich with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites James S. Greeneich more than expected).

Fields of papers citing papers by James S. Greeneich

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by James S. Greeneich. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by James S. Greeneich. The network helps show where James S. Greeneich may publish in the future.

Co-authorship network of co-authors of James S. Greeneich

This figure shows the co-authorship network connecting the top 25 collaborators of James S. Greeneich. A scholar is included among the top collaborators of James S. Greeneich based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with James S. Greeneich. James S. Greeneich is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

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16 of 16 papers shown

#	Work	Indexed citations
1	Optimizing stepper mix to combat rising fab costs 2002 ·(unknown), (unknown), James S. Greeneich	0
2	Overlay performance in advanced processes 2000 ·Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·(unknown), (unknown), James S. Greeneich, (unknown), (unknown), (unknown), (unknown), (unknown)	5
3	Evaluation of high-numerical-aperture wide-field steppers for 0.35-micron design rules 1992 ·Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·(unknown), James S. Greeneich, (unknown), (unknown), S. Wittekoek, (unknown), (unknown), (unknown)	2
4	Progress in I-line Stepper Technology for Half-Micron 1989 ·Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·James S. Greeneich, (unknown), (unknown), (unknown)	2
5	<title>Resolution And Overlay Of Submicron I-Line Wafer Steppers</title> 1988 ·Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·James S. Greeneich, (unknown), (unknown), (unknown), (unknown), Burn J. Lin	1
6	Proximity effect correction using a dose compensation curve 1981 ·Journal of Vacuum Science and Technology ·James S. Greeneich	9
7	Impact of electron scattering on linewidth control in electron-beam lithography 1979 ·Journal of Vacuum Science and Technology ·James S. Greeneich	16
8	X-ray lithography: Part I—Design criteria for optimizing resist energy absorption; part II—Pattern replication with polymer masks 1975 ·IEEE Transactions on Electron Devices ·James S. Greeneich	7
9	Developer Characteristics of Poly‐(Methyl Methacrylate) Electron Resist 1975 ·Journal of The Electrochemical Society ·James S. Greeneich	90
10	Time evolution of developed contours in poly-(methyl methacrylate) electron resist 1974 ·Journal of Applied Physics ·James S. Greeneich	26
11	Solubility Rate of Poly-(Methyl Methacrylate), PMMA, Electron-Resist 1974 ·Journal of The Electrochemical Society ·James S. Greeneich	27
12	An exposure model for electron-sensitive resists 1974 ·IEEE Transactions on Electron Devices ·James S. Greeneich, T. Van Duzer	58
13	Microwave Mixing Using Superconducting Josephson Devices 1973 ·F. Auracher, James S. Greeneich, T. Van Duzer	1
14	An approximate formula for electron energy versus path length 1973 ·IEEE Transactions on Electron Devices ·James S. Greeneich, T. Van Duzer	7
15	Model for Exposure of Electron-Sensitive Resists 1973 ·Journal of Vacuum Science and Technology ·James S. Greeneich, T. Van Duzer	24
16	Computer-controlled resist exposure in the scanning electron microscope 1972 ·IEEE Transactions on Electron Devices ·Robert Herzog, James S. Greeneich, T. E. Everhart, T. Van Duzer	26

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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