T. R. Groves

464 total citations
31 papers, 258 citations indexed

About

T. R. Groves is a scholar working on Electrical and Electronic Engineering, Surfaces, Coatings and Films and Biomedical Engineering. According to data from OpenAlex, T. R. Groves has authored 31 papers receiving a total of 258 indexed citations (citations by other indexed papers that have themselves been cited), including 28 papers in Electrical and Electronic Engineering, 18 papers in Surfaces, Coatings and Films and 8 papers in Biomedical Engineering. Recurrent topics in T. R. Groves's work include Advancements in Photolithography Techniques (24 papers), Electron and X-Ray Spectroscopy Techniques (17 papers) and Integrated Circuits and Semiconductor Failure Analysis (12 papers). T. R. Groves is often cited by papers focused on Advancements in Photolithography Techniques (24 papers), Electron and X-Ray Spectroscopy Techniques (17 papers) and Integrated Circuits and Semiconductor Failure Analysis (12 papers). T. R. Groves collaborates with scholars based in United States. T. R. Groves's co-authors include D. S. Pickard, H. C. Pfeiffer, B. Rafferty, E. Kratschmer, Dieter Adam, Gerhard Schubert, W. Stickel, John G. Hartley, R. F. W. Pease and Thomas H. Newman and has published in prestigious journals such as Physics Today, Review of Scientific Instruments and IBM Journal of Research and Development.

In The Last Decade

T. R. Groves

30 papers receiving 226 citations

Peers — A (Enhanced Table)

Peers by citation overlap · career bar shows stage (early→late) cites · hero ref

Name	h						Papers	Cites
T. R. Groves United States	9	207	117	110	36	23	31	258
Jonathan Cobb United States	9	282 1.4×	106 0.9×	92 0.8×	54 1.5×	14 0.6×	41	312
John J. Biafore United States	13	470 2.3×	139 1.2×	284 2.6×	21 0.6×	16 0.7×	68	486
Kimiyoshi Deguchi Japan	10	285 1.4×	170 1.5×	95 0.9×	38 1.1×	25 1.1×	37	356
Norio Saitou Japan	9	292 1.4×	140 1.2×	119 1.1×	53 1.5×	53 2.3×	58	351
M. G. R. Thomson United States	13	378 1.8×	161 1.4×	161 1.5×	72 2.0×	56 2.4×	33	450
James S. Greeneich United States	8	264 1.3×	86 0.7×	134 1.2×	24 0.7×	29 1.3×	16	301
Tsuyoshi Amano Japan	13	512 2.5×	49 0.4×	390 3.5×	26 0.7×	50 2.2×	84	565
Ph. Nussbaum Switzerland	4	167 0.8×	275 2.4×	140 1.3×	65 1.8×	20 0.9×	8	345
P. Regli Switzerland	7	288 1.4×	218 1.9×	63 0.6×	141 3.9×	32 1.4×	14	388
Frédéric Lazzarino Belgium	10	251 1.2×	58 0.5×	43 0.4×	26 0.7×	46 2.0×	51	273

Countries citing papers authored by T. R. Groves

Since Specialization

Citations

This map shows the geographic impact of T. R. Groves's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by T. R. Groves with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites T. R. Groves more than expected).

Fields of papers citing papers by T. R. Groves

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by T. R. Groves. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by T. R. Groves. The network helps show where T. R. Groves may publish in the future.

Co-authorship network of co-authors of T. R. Groves

This figure shows the co-authorship network connecting the top 25 collaborators of T. R. Groves. A scholar is included among the top collaborators of T. R. Groves based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with T. R. Groves. T. R. Groves is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

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20 of 20 papers shown

Groves, T. R., et al.. (2012). Size dependent enhancement of photoelectron emission quantum efficiencies from magnesium dots. Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena. 30(6). 1 indexed citations

Hartley, John G., et al.. (2010). Operation and performance of the CNSE Vistec VB300 electron beam lithography system. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 7637. 76371Y–76371Y. 4 indexed citations

Hudek, P., Dirk Beyer, T. R. Groves, et al.. (2004). Shaped beam technology for nano-imprint mask lithography. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 5504. 204–204. 1 indexed citations

Pickard, D. S., et al.. (2003). Distributed axis electron beam technology for maskless lithography and defect inspection. Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena. 21(6). 2834–2838. 14 indexed citations

Hartley, John G., T. R. Groves, Henry I. Smith, et al.. (2003). Spatial-phase locking with shaped-beam lithography. Review of Scientific Instruments. 74(3). 1377–1379. 1 indexed citations

Groves, T. R., et al.. (2002). Maskless electron beam lithography: prospects, progress, and challenges. Microelectronic Engineering. 61-62. 285–293. 62 indexed citations

Rafferty, B. & T. R. Groves. (2001). Wave optical calculations of electron probes. Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena. 19(6). 2607–2611. 3 indexed citations

Groves, T. R.. (1999). Theory of Coulomb scattering in particle beams using Markov’s method. Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena. 17(6). 2808–2813. 4 indexed citations

Hartley, John G., H. C. Pfeiffer, T. R. Groves, et al.. (1998). EL5: One tool for advanced x-ray and chrome on glass mask making. Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena. 16(6). 3164–3167. 5 indexed citations

10.

Butsch, R., Michael Gordon, T. R. Groves, et al.. (1995). Performance enhancements on IBM’s EL-4 electron-beam lithography system. Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena. 13(6). 2478–2482. 6 indexed citations

11.

Butsch, R., et al.. (1995). Performance of IBM's EL-4 e-beam lithography system. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 2437. 160–160. 8 indexed citations

12.

Groves, T. R.. (1994). Efficiency enhancement of Monte Carlo simulation of particle beam interaction by separation of stochastic and continuum contributions. Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena. 12(6). 3483–3488. 4 indexed citations

13.

Pfeiffer, H. C., et al.. (1993). EL-4, a new generation electron-beam lithography system. Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena. 11(6). 2332–2341. 16 indexed citations

14.

Groves, T. R.. (1993). Efficiency of electron-beam proximity effect correction. Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena. 11(6). 2746–2753. 21 indexed citations

15.

Pfeiffer, H. C. & T. R. Groves. (1991). Progress in E-beam mask making for optical and x-ray lithography. Microelectronic Engineering. 13(1-4). 141–149. 6 indexed citations

16.

Groves, T. R.. (1991). Statistics of pattern placement errors in lithography. Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena. 9(6). 3555–3561. 2 indexed citations

17.

Pfeiffer, H. C., et al.. (1988). Recent advances with the variable axis immersion lens. Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena. 6(6). 1995–1998. 7 indexed citations

18.

Groves, T. R., et al.. (1985). Energy broadening in electron beams: A comparison of existing theories and Monte Carlo simulation. Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena. 3(1). 190–193. 17 indexed citations

19.

Groves, T. R., et al.. (1983). Space charge effects in focused ion beams. Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena. 1(4). 1141–1144. 4 indexed citations

20.

Groves, T. R., et al.. (1983). A large area deflection system with very low aberration. Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena. 1(4). 1316–1321. 4 indexed citations

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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