Kathleen Nafus

588 citations
69 papers · 409 indexed · h-index 12
Topics
Advancements in Photolithography Techniques (59 papers)Integrated Circuits and Semiconductor Failure Analysis (31 papers)Electron and X-Ray Spectroscopy Techniques (25 papers)

In The Last Decade

Kathleen Nafus

61 papers receiving 371 citations

Peers

Kathleen Nafus
Comparison fields: 5 of 34
  • Electrical and Electronic Engineering 309
  • Materials Chemistry 176
  • Biomedical Engineering 155
  • Surfaces, Coatings and Films 107
  • Organic Chemistry 45
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S. Barnola France
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Paulina Rincon Delgadillo Belgium
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Citations per field
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Citations per year

Countries citing papers authored by Kathleen Nafus

Since Specialization
Citations

This map shows the geographic impact of Kathleen Nafus's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Kathleen Nafus with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Kathleen Nafus more than expected).

Fields of papers citing papers by Kathleen Nafus

Since Specialization
Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Kathleen Nafus. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Kathleen Nafus. The network helps show where Kathleen Nafus may publish in the future.

Co-authorship network of co-authors of Kathleen Nafus

This figure shows the co-authorship network connecting the top 25 collaborators of Kathleen Nafus. A scholar is included among the top collaborators of Kathleen Nafus based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with Kathleen Nafus. Kathleen Nafus is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

20 of 20 papers shown
#WorkIndexed citations
1 0
2 2
3 2
4 10
5 2
6 0
7 2
8 1
9 11
10
Study of DSA Interaction Range using Gaussian Convolution
0
11 12
12
Manufacturability improvements in EUV resist processing toward NXE:3300 processing
2
13 10
14 39
15 1
16 18
17 12
18 5
19 0
20 2

About Kathleen Nafus

Kathleen Nafus is a scholar working on Surfaces, Coatings and Films, Electrical and Electronic Engineering and Industrial and Manufacturing Engineering, having authored 69 papers that have together received 409 indexed citations. Recurring topics across this work include Advancements in Photolithography Techniques (59 papers), Integrated Circuits and Semiconductor Failure Analysis (31 papers) and Electron and X-Ray Spectroscopy Techniques (25 papers). The work is most often cited by research in Surfaces, Coatings and Films (107 citations), Electrical and Electronic Engineering (309 citations) and Acoustics and Ultrasonics (4 citations). Kathleen Nafus has collaborated with scholars based in Belgium, Japan and United States. Frequent co-authors include Roel Gronheid, Mark Somervell, Paul F. Nealey, Christopher J. Thode, Yi Cao, Guanyang Lin, Todd R. Younkin, Boon Teik Chan, Paulina Rincon Delgadillo and Dieter Van den Heuvel. Their work appears in journals such as ECS Journal of Solid State Science and Technology, ECS Transactions and Journal of Micro/Nanolithography MEMS and MOEMS.

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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