Makoto Sekine
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- Plasma Diagnostics and Applications 124
- Semiconductor materials and devices 115
- Surfaces, Coatings and Films top 2%
- Mechanics of Materials top 1%
- Metal and Thin Film Mechanics 72
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- Copper Interconnects and Reliability 35
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- Plasma Applications and Diagnostics 35
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- Diamond and Carbon-based Materials Research 63
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- Ion-surface interactions and analysis 35
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- GaN-based semiconductor devices and materials 25
- Co-authors
- Masaru HoriKenji IshikawaHiroki KondoKeigo TakedaMiyako MatsuiMasahiro TokumuraTetsuya TatsumiY. Kawase
- Journals
- Japanese Journal of Applied Physics (101 papers)Applied Physics Express (17 papers)Journal of Applied Physics (14 papers)
- Partner nations
- JapanUnited StatesSlovenia
In The Last Decade
Makoto Sekine
281 papers receiving 3.9k citations
Peers
Comparison fields: 5 of 114
- Electrical and Electronic Engineering 2.6k
- Surfaces, Coatings and Films 296
- Mechanics of Materials 816
- Electronic, Optical and Magnetic Materials 580
- Radiology, Nuclear Medicine and Imaging 684
Countries citing papers authored by Makoto Sekine
This map shows the geographic impact of Makoto Sekine's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Makoto Sekine with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Makoto Sekine more than expected).
Fields of papers citing papers by Makoto Sekine
This network shows the impact of papers produced by Makoto Sekine. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Makoto Sekine. The network helps show where Makoto Sekine may publish in the future.
Co-authorship network
The 25 scholars most cited alongside Makoto Sekine, linked wherever they have co-authored with each other. Click a name or a connecting line to browse the papers they share.
All Works
| # | Work | ||
|---|---|---|---|
| 1 | 2024 | 4 | |
| 2 | 2024 | 0 | |
| 3 | 2024 | 0 | |
| 4 | 2022 | 3 | |
| 5 | 2021 | 4 | |
| 6 | 2020 | 22 | |
| 7 | 2020 | 6 | |
| 8 | 2019 | 29 | |
| 9 | 2019 | 3 | |
| 10 | 2018 | 7 | |
| 11 | Suppression of plasma-induced damage on GaN etched by a Cl | 2015 | 7 |
| 12 | Antitumor effect of synergistic contribution of nitrite and hydrogen peroxide in the plasma activated medium | 2015 | 1 |
| 13 | 2013 | 24 | |
| 14 | Impacts of CF+, CF | 2011 | 2 |
| 15 | 2011 | 1 | |
| 16 | Measurement of surface loss probabilities of hydrogen radicals in plasma-enhanced Si CVD process for solar cell | 2010 | 1 |
| 17 | 2010 | 0 | |
| 18 | 2009 | 1 | |
| 19 | Characterization of Highly Selective SiO_2/Si_3N_4 Etching of High-Aspect-Ratio Holes | 1996 | 3 |
| 20 | A New Anisotropic Etching of N+ Poly-Si Using XeCl Excimer Laser Beam | 1984 | 1 |
About Makoto Sekine
Makoto Sekine is a scholar working on Electrical and Electronic Engineering, Mechanics of Materials and Electronic, Optical and Magnetic Materials, having authored 290 papers that have together received 4.1k indexed citations. Recurring topics across this work include Plasma Diagnostics and Applications (124 papers), Semiconductor materials and devices (115 papers), Metal and Thin Film Mechanics (72 papers), Diamond and Carbon-based Materials Research (63 papers), Plasma Applications and Diagnostics (35 papers), Ion-surface interactions and analysis (35 papers), Copper Interconnects and Reliability (35 papers) and GaN-based semiconductor devices and materials (25 papers). The work is most often cited by research in Electrical and Electronic Engineering (2.6k citations), Surfaces, Coatings and Films (296 citations) and Mechanics of Materials (816 citations). Makoto Sekine has collaborated with scholars based in Japan, United States and Slovenia. Frequent co-authors include Masaru Hori, Kenji Ishikawa, Hiroki Kondo, Keigo Takeda, Miyako Matsui, Masahiro Tokumura, Tetsuya Tatsumi, Y. Kawase, Mineo Hiramatsu and H. Okano. Their work appears in journals such as Japanese Journal of Applied Physics, Applied Physics Express, Journal of Applied Physics, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films and Journal of Physics D Applied Physics.
Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.