M. Sanchez

1.3k total citations
30 papers, 946 citations indexed

About

M. Sanchez is a scholar working on Electrical and Electronic Engineering, Biomedical Engineering and Polymers and Plastics. According to data from OpenAlex, M. Sanchez has authored 30 papers receiving a total of 946 indexed citations (citations by other indexed papers that have themselves been cited), including 19 papers in Electrical and Electronic Engineering, 12 papers in Biomedical Engineering and 8 papers in Polymers and Plastics. Recurrent topics in M. Sanchez's work include Advancements in Photolithography Techniques (16 papers), Integrated Circuits and Semiconductor Failure Analysis (13 papers) and Nanofabrication and Lithography Techniques (9 papers). M. Sanchez is often cited by papers focused on Advancements in Photolithography Techniques (16 papers), Integrated Circuits and Semiconductor Failure Analysis (13 papers) and Nanofabrication and Lithography Techniques (9 papers). M. Sanchez collaborates with scholars based in United States, Belgium and Japan. M. Sanchez's co-authors include Frances A. Houle, William D. Hinsberg, John A. Hoffnagle, Gregory M. Wallraff, M. Morrison, Do Y. Yoon, Willi Volksen, F. Stephan, Karen Petrillo and M. Hargrove and has published in prestigious journals such as Macromolecules, Polymer and Optics Letters.

In The Last Decade

M. Sanchez

28 papers receiving 900 citations

Peers — A (Enhanced Table)

Peers by citation overlap · career bar shows stage (early→late) cites · hero ref

Name h Career Trend Papers Cites
M. Sanchez United States 16 636 306 236 225 222 30 946
Veena Rao United States 9 247 0.4× 184 0.6× 84 0.4× 196 0.9× 231 1.0× 26 619
B. K. Furman United States 16 577 0.9× 145 0.5× 47 0.2× 175 0.8× 125 0.6× 41 983
Atsushi Kubono Japan 18 290 0.5× 399 1.3× 67 0.3× 188 0.8× 311 1.4× 62 827
Kyung Joong Kim South Korea 18 583 0.9× 206 0.7× 168 0.7× 63 0.3× 578 2.6× 68 995
Jason D. Myers United States 15 722 1.1× 194 0.6× 53 0.2× 246 1.1× 382 1.7× 64 975
D. L. Mafra United States 14 316 0.5× 243 0.8× 159 0.7× 48 0.2× 674 3.0× 22 993
Robert R. Krchnavek United States 15 444 0.7× 226 0.7× 59 0.3× 54 0.2× 211 1.0× 68 793
He Gao United States 14 312 0.5× 368 1.2× 218 0.9× 42 0.2× 380 1.7× 29 785
C. Feger United States 14 190 0.3× 121 0.4× 33 0.1× 317 1.4× 186 0.8× 30 605
Jan Mistrı́k Czechia 17 497 0.8× 179 0.6× 117 0.5× 66 0.3× 442 2.0× 64 903

Countries citing papers authored by M. Sanchez

Since Specialization
Citations

This map shows the geographic impact of M. Sanchez's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by M. Sanchez with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites M. Sanchez more than expected).

Fields of papers citing papers by M. Sanchez

Since Specialization
Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by M. Sanchez. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by M. Sanchez. The network helps show where M. Sanchez may publish in the future.

Co-authorship network of co-authors of M. Sanchez

This figure shows the co-authorship network connecting the top 25 collaborators of M. Sanchez. A scholar is included among the top collaborators of M. Sanchez based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with M. Sanchez. M. Sanchez is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

20 of 20 papers shown
1.
Ekdahl, Carl, H. Vernon Smith, W. Broste, et al.. (2022). Noninvasive beam-size measurements for linear induction accelerators. Physical Review Accelerators and Beams. 25(10).
2.
Bozano, Luisa, M. Sanchez, Ratnam Sooriyakumaran, et al.. (2014). Characterization of a new polarity switching negative tone e-beam resist for 14nm and 10nm logic node mask fabrication and beyond. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 9235. 92350P–92350P. 2 indexed citations
3.
Sanchez, M., Linda K. Sundberg, G. M. Wallraff, et al.. (2013). Monitoring the evolution of line edge roughness during resist development using an analog of quenched flow kinetics. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 8682. 868218–868218. 2 indexed citations
4.
Sanchez, M., et al.. (2013). Defects on high-resolution negative-tone resist: "The revenge of the blobs". Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 8880. 88800V–88800V. 1 indexed citations
5.
Wallraff, Gregory M., David R. Medeiros, Carl E. Larson, et al.. (2005). Studies of acid diffusion in low Ea chemically amplified photoresists. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 5753. 309–309. 3 indexed citations
6.
McClelland, Gary M., Charles Rettner, M. W. Hart, et al.. (2005). Contact mechanics of a flexible imprinter for photocured nanoimprint lithography. Tribology Letters. 19(1). 59–63. 10 indexed citations
7.
Houle, Frances A., William D. Hinsberg, & M. Sanchez. (2004). Acid–base reactions in a positive tone chemically amplified photoresist and their effect on imaging. Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena. 22(2). 747–757. 21 indexed citations
8.
Wallraff, G. M., David R. Medeiros, M. Sanchez, et al.. (2004). Sub-50nm half-pitch imaging with a low activation energy chemically amplified photoresist. Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena. 22(6). 3479–3484. 14 indexed citations
9.
Oldiges, P., et al.. (2002). Modeling line edge roughness effects in sub 100 nanometer gate length devices. 131–134. 94 indexed citations
10.
Houle, Frances A., William D. Hinsberg, M. Sanchez, & John A. Hoffnagle. (2002). Influence of resist components on image blur in a patterned positive-tone chemically amplified photoresist. Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena. 20(3). 924–931. 39 indexed citations
11.
Houle, Frances A., William D. Hinsberg, M. Morrison, et al.. (2000). Determination of coupled acid catalysis-diffusion processes in a positive-tone chemically amplified photoresist. Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena. 18(4). 1874–1885. 77 indexed citations
12.
Hoffnagle, John A., William D. Hinsberg, M. Sanchez, & Frances A. Houle. (1999). Liquid immersion deep-ultraviolet interferometric lithography. Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena. 17(6). 3306–3309. 73 indexed citations
13.
Hedrick, J. L., Hugh R. Brown, W. Volksen, et al.. (1997). Low-stress polyimide block copolymers. Polymer. 38(3). 605–613. 15 indexed citations
14.
Hedrick, James L., Kenneth R. Carter, M. Sanchez, et al.. (1997). Crosslinked polyimide foams derived from poly(imidepropylene oxide) copolymers. Macromolecular Chemistry and Physics. 198(2). 549–559. 9 indexed citations
15.
Hedrick, James L., Thomas P. Russell, M. Sanchez, et al.. (1996). Polyimide Nanofoams from Caprolactone-Based Copolymers. Macromolecules. 29(10). 3642–3646. 34 indexed citations
16.
Hedrick, James L., Kenneth R. Carter, Craig J. Hawker, et al.. (1996). High-temperature polyimide nanofoams for microelectronic applications. Reactive and Functional Polymers. 30(1-3). 43–53. 44 indexed citations
17.
Sanchez, M., J. L. Hedrick, & Thomas P. Russell. (1996). Nanofoam Porosity Measured by Infrared Spectroscopy and Refractive Index. MRS Proceedings. 431. 1 indexed citations
18.
Carter, Kenneth R., Richard A. DiPietro, Craig J. Hawker, et al.. (1995). Polyimide Nanofoams For Low Dielectric Applications. MRS Proceedings. 381. 27 indexed citations
19.
Sanchez, M., James L. Hedrick, & Thomas P. Russell. (1995). Nanofoam porosity by infrared spectroscopy. Journal of Polymer Science Part B Polymer Physics. 33(2). 253–257. 15 indexed citations
20.
Sanchez, M., et al.. (1994). On-line NIR analysis and advanced control improve gasoline blending. Oil & gas journal. 3 indexed citations

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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