Grant M. Kloster

617 citations

24 papers · 453 indexed · h-index 14

Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials top 10%
Materials Chemistry
Mechanics of Materials top 10%
Inorganic Chemistry top 10%

Co-authors: Robert G. Bergman Huai Huang Mansour Moinpour Hua‐Tian Shi Stephen P. Watton Fred C. Anson Michael D. Goodner J. Liu
Topics: Copper Interconnects and Reliability (10 papers)Semiconductor materials and devices (10 papers)Metal and Thin Film Mechanics (7 papers)
Cited by: Electronic, Optical and Magnetic Materials Inorganic Chemistry Electrical and Electronic Engineering
Journals: Journal of the American Chemical Society Angewandte Chemie International Edition Applied Physics Letters
Partner nations: United States United Kingdom Germany

In The Last Decade

Grant M. Kloster

24 papers receiving 431 citations

Peers

Countries citing papers authored by Grant M. Kloster

Since Specialization

Citations

This map shows the geographic impact of Grant M. Kloster's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Grant M. Kloster with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Grant M. Kloster more than expected).

Fields of papers citing papers by Grant M. Kloster

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Grant M. Kloster. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Grant M. Kloster. The network helps show where Grant M. Kloster may publish in the future.

Co-authorship network of co-authors of Grant M. Kloster

This figure shows the co-authorship network connecting the top 25 collaborators of Grant M. Kloster. A scholar is included among the top collaborators of Grant M. Kloster based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with Grant M. Kloster. Grant M. Kloster is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

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20 of 20 papers shown

#	Work	Indexed citations
1	Selective Layer Transfer: Industry First Heterogeneous Integration Technology Enabling Ultra-Fast Assembly & Sub-1um Chiplet Thickness for Next Generation AI & Compute Applications 2024 ·Adel Elsherbini,Tushar K. Talukdar,Thomas L. Sounart,(unknown),Andrey Vyatskikh,Brandon Rawlings,(unknown),(unknown),(unknown),Grant M. Kloster,F. Bedoya,(unknown),(unknown),(unknown),(unknown),Georgios C. Dogiamis,Qiang Yu,Shawna M. Liff,(unknown)	2
2	Insight into On-Wafer Crystallization of Pure-Silica-Zeolite Films through Nutrient Replenishment 2011 ·Langmuir ·Christopher M. Lew,Yan Liu,David Kisailus,Grant M. Kloster,(unknown),B. I. Boyanov,Minwei Sun,Junlan Wang,Yushan Yan	2
3	EUV Resist Testing Status and Post Lithography LWR Reduction 2011 ·Journal of Photopolymer Science and Technology ·(unknown),E. Steve Putna,(unknown),Todd R. Younkin,Grant M. Kloster,Uday Shah,Manish Chandhok	6
4	Printability of extreme ultraviolet lithography mask pattern defects for 22-40 nm half-pitch features 2010 ·Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Grant M. Kloster,Ted Liang,Todd R. Younkin,E. Steve Putna,Román Caudillo,(unknown)	4
5	Oxygen plasma damage to blanket and patterned ultralow-κ surfaces 2010 ·Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ·(unknown),Hua‐Tian Shi,Huai Huang,Pei‐Shan Ho,(unknown),Michael D. Goodner,Mansour Moinpour,Grant M. Kloster	24
6	On‐Wafer Crystallization of Ultralow‐κ Pure Silica Zeolite Films 2009 ·Angewandte Chemie International Edition ·Yan Liu,Christopher M. Lew,Minwei Sun,Rui Cai,Junlan Wang,Grant M. Kloster,B. I. Boyanov,Yushan Yan	29
7	On‐Wafer Crystallization of Ultralow‐κ Pure Silica Zeolite Films 2009 ·Angewandte Chemie ·(unknown),Christopher M. Lew,Minwei Sun,Rui Cai,Junlan Wang,Grant M. Kloster,B. I. Boyanov,Yushan Yan	5
8	Hydrofluoric-Acid-Resistant and Hydrophobic Pure-Silica-Zeolite MEL Low-Dielectric-Constant Films 2009 ·Langmuir ·Christopher M. Lew,Yan Liu,Brandon Day,Grant M. Kloster,Hugo Tiznado,Minwei Sun,Francisco Zaera,Junlan Wang,Yushan Yan	16
9	Mechanistic study of plasma damage of low k dielectric surfaces 2008 ·Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ·(unknown),Hua‐Tian Shi,J. Liu,Huai Huang,Pei‐Shan Ho,Michael D. Goodner,Mansour Moinpour,Grant M. Kloster	80
10	Origin of dielectric loss induced by oxygen plasma on organo-silicate glass low-k dielectrics 2008 ·Applied Physics Letters ·Hua‐Tian Shi,(unknown),(unknown),Huai Huang,J. Liu,Paul S. Ho,(unknown),Mansour Moinpour,Grant M. Kloster	28
11	Mechanistic Study of Plasma Damage and CH4 Recovery of Low k Dielectric Surface 2007 ·(unknown),Hua‐Tian Shi,(unknown),Huai Huang,Paul S. Ho,Michael D. Goodner,Mansour Moinpour,Grant M. Kloster	7
12	Mechanistic Study of Plasma Damage of Low k Dielectric Surfaces 2007 ·AIP conference proceedings ·(unknown),Hualiang Shi,Junjun Liu,Huai Huang,Paul S. Ho,Michael D. Goodner,Mansour Moinpour,Grant M. Kloster,Shinichi Ogawa,Ehrenfried Zschech	3
13	Challenges for dielectric materials in future integrated circuit technologies 2004 ·Microelectronics Reliability ·C. Michael Garner,Grant M. Kloster,G. Atwood,(unknown),(unknown)	23
14	Coordination Complexes in Sol—Gel Silica Materials 2003 ·ChemInform ·Stephen P. Watton,(unknown),Grant M. Kloster,(unknown)	2
15	Oxidation of immobilized iron(II)-1,10-phenanthroline complexes by cerium(IV): a probe into the site accessibility of metal complexes covalently attached to silica sol–gels 2000 ·Inorganica Chimica Acta ·Grant M. Kloster,Stephen P. Watton	22
16	Effects of Multiple Covalent Attachments on Immobilized Iron(II)−1,10-Phenanthroline Complexes in Silica Sol−Gels 1999 ·Inorganic Chemistry ·Grant M. Kloster,(unknown),Stephen P. Watton	17
17	Nb(OCH(CF3)2)6−: prototype for a new class of weakly coordinating anions based on polyfluoroalkoxide substituents 1997 ·Inorganica Chimica Acta ·(unknown),Grant M. Kloster,William J. DuBay,Paul A. Grieco,Duward F. Shriver,Steven H. Strauss	19
18	Synthesis, Characterization, and Transport Properties of New Mixed Ionic−Electronic Conducting V₂O₅−Polymer Electrolyte Xerogel Nanocomposites 1996 ·Chemistry of Materials ·Grant M. Kloster,(unknown),Paul Brazis,Carl R. Kannewurf,Duward F. Shriver	14
19	Synthesis and reactivity of (pentamethylcyclopentadienyl)iridium bis(thiolate) and thiolate hydride complexes 1990 ·Journal of the American Chemical Society ·(unknown),Grant M. Kloster,Robert G. Bergman	73
20	Effect of iloprost (ZK 36 374) on membrane integrity in ischemic rabbit hearts. 1984 ·PubMed ·(unknown),Grant M. Kloster,(unknown),Karsten Schrör	17

About Grant M. Kloster

Grant M. Kloster is a scholar working on Electronic, Optical and Magnetic Materials, Surfaces, Coatings and Films and Inorganic Chemistry, having authored 24 papers that have together received 453 indexed citations. Recurring topics across this work include Copper Interconnects and Reliability (10 papers), Semiconductor materials and devices (10 papers) and Metal and Thin Film Mechanics (7 papers). The work is most often cited by research in Electronic, Optical and Magnetic Materials (183 citations), Inorganic Chemistry (88 citations) and Electrical and Electronic Engineering (225 citations). Grant M. Kloster has collaborated with scholars based in United States, United Kingdom and Germany. Frequent co-authors include Robert G. Bergman, Huai Huang, Mansour Moinpour, Hua‐Tian Shi, Stephen P. Watton, Fred C. Anson, Michael D. Goodner, J. Liu, Pei‐Shan Ho and Yushan Yan. Their work appears in journals such as Journal of the American Chemical Society, Angewandte Chemie International Edition and Applied Physics Letters.

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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