Michael C. Smayling

956 total citations
58 papers, 762 citations indexed

About

Michael C. Smayling is a scholar working on Electrical and Electronic Engineering, Biomedical Engineering and Materials Chemistry. According to data from OpenAlex, Michael C. Smayling has authored 58 papers receiving a total of 762 indexed citations (citations by other indexed papers that have themselves been cited), including 51 papers in Electrical and Electronic Engineering, 22 papers in Biomedical Engineering and 7 papers in Materials Chemistry. Recurrent topics in Michael C. Smayling's work include Advancements in Photolithography Techniques (33 papers), Integrated Circuits and Semiconductor Failure Analysis (16 papers) and Semiconductor materials and devices (13 papers). Michael C. Smayling is often cited by papers focused on Advancements in Photolithography Techniques (33 papers), Integrated Circuits and Semiconductor Failure Analysis (16 papers) and Semiconductor materials and devices (13 papers). Michael C. Smayling collaborates with scholars based in United States, Japan and Germany. Michael C. Smayling's co-authors include R. Sauerbrey, Frank K. Tittel, David Baglee, G. Marowsky, William L. Wilson, Brooks J. Story, Thomas Feurer, C. Duvvury, Huayu Liu and J. Antonio Travieso-Rodríguez and has published in prestigious journals such as The Journal of Chemical Physics, Applied Physics Letters and Journal of Applied Physics.

In The Last Decade

Michael C. Smayling

56 papers receiving 713 citations

Peers

Countries citing papers authored by Michael C. Smayling

Since Specialization

Citations

This map shows the geographic impact of Michael C. Smayling's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Michael C. Smayling with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Michael C. Smayling more than expected).

Fields of papers citing papers by Michael C. Smayling

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Michael C. Smayling. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Michael C. Smayling. The network helps show where Michael C. Smayling may publish in the future.

Co-authorship network of co-authors of Michael C. Smayling

This figure shows the co-authorship network connecting the top 25 collaborators of Michael C. Smayling. A scholar is included among the top collaborators of Michael C. Smayling based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with Michael C. Smayling. Michael C. Smayling is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

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20 of 20 papers shown

#	Work	Indexed citations
1	7nm logic optical lithography with OPC-Lite 2015 ·Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Michael C. Smayling, (unknown), Hidetami Yaegashi, (unknown), Ryo Nakayama, (unknown), (unknown), Hiroyuki Ishii, (unknown)	3
2	OPC-Lite for gridded designs at low k1 2014 ·Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·(unknown), Michael C. Smayling, (unknown), (unknown), Hidetami Yaegashi	2
3	Custom source and mask optimization for 20nm SRAM and logic 2011 ·Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Michael C. Smayling, Tamer H. Coskun, Vishnu Kamat	2
4	22nm logic lithography in the presence of local interconnect 2010 ·Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Michael C. Smayling, Robert Socha, Mircea Dusa	13
5	Joint-optimization for SRAM and logic for 28nm node and below 2010 ·Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·(unknown), Michael C. Smayling, Peter De Bisschop, (unknown)	2
6	Interference assisted lithography for patterning of 1D gridded design 2009 ·Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·(unknown), (unknown), Kwangok Jeong, Andrew B. Kahng, John S. Petersen, (unknown), Michael C. Smayling	20
7	New strategies for gridded physical design for 32nm technologies and beyond 2009 ·(unknown), Michael C. Smayling	3
8	Excimer Laser Induced Electrical Conductivity In Polymers 2005 ·H. M. Phillips, Thomas Feurer, Michael C. Smayling, R. Sauerbrey	0
9	A modular merged technology process including submicron CMOS logic, nonvolatile memories, linear functions, and power components 2002 ·Michael C. Smayling, (unknown), (unknown), Sean Keller, (unknown)	8
10	Enhanced optical microlithography with a Fabry–Perot-based spatial filtering technique 2000 ·Applied Optics ·Miklós Erdélyi, Zsolt Bor, William L. Wilson, Michael C. Smayling, Frank K. Tittel	2
11	Process Synthesis Using TCAD: A Mixed-Signal Case Study 1999 ·IEICE Transactions on Electronics ·(unknown), Michael C. Smayling, J. Rodriguez, (unknown)	2
12	Generation of diffraction-free beams for applications in optical microlithography 1997 ·Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ·Miklós Erdélyi, Z. L. Horváth, G. Szabó, Zs. Bor, Frank K. Tittel, Joseph R. Cavallaro, Michael C. Smayling	62
13	<title>Interferometric phase shift technique for high-resolution deep-UV microlithography</title> 1995 ·Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Frank K. Tittel, Joseph R. Cavallaro, (unknown), Michael C. Smayling, Gábor Szabó, William L. Wilson	1
14	Enhanced Microlithography Using Combined Phase Shifting and Off-axis Illumination 1995 ·Japanese Journal of Applied Physics ·Miklós Erdélyi, Zsolt Bor, Joseph R. Cavallaro, Gábor Szabó, William L. Wilson, (unknown), Michael C. Smayling, (unknown)	3
15	Permanent increase of the electrical conductivity of polymers induced by ultraviolet laser radiation 1991 ·Applied Physics Letters ·(unknown), R. Sauerbrey, Michael C. Smayling	98
16	The effects of write/erase cycling on data loss in EEPROMs 1985 ·David Baglee, Michael C. Smayling	33
17	Leakage at low electric fields in thin oxides 1985 ·Electronics Letters ·David Baglee, Michael C. Smayling	2
18	Dominant formation and quenching kinetics of electron beam pumped Xe2Cl 1981 ·The Journal of Chemical Physics ·G. Marowsky, G. Glass, Michael C. Smayling, Frank K. Tittel, William L. Wilson	25
19	Electron beam pumped broad-band diatomic and triatomic excimer lasers 1981 ·IEEE Journal of Quantum Electronics ·Frank K. Tittel, G. Marowsky, (unknown), Michael C. Smayling	38
20	Blue laser action by the rare-gas halide trimer Kr2F 1980 ·Applied Physics Letters ·Frank K. Tittel, Michael C. Smayling, William L. Wilson, G. Marowsky	25

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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