Markku Leskelä

39.1k citations

830 papers · 33.0k indexed · 3 hit papers · h-index 83

Impact in

Process Chemistry and Technology top 0.2%
Materials Chemistry top 0.05%
- Electronic and Structural Properties of Oxides
- Catalytic Processes in Materials Science
- ZnO doping and properties
- Quantum Dots Synthesis And Properties

Papers in

Process Chemistry and Technology 33
Materials Chemistry 468
- Electronic and Structural Properties of Oxides 145
- Catalytic Processes in Materials Science 84
- ZnO doping and properties 76
- Quantum Dots Synthesis And Properties 70
- Luminescence Properties of Advanced Materials 59

Co-authors: Mikko Ritala Kaupo Kukli Timo Repo Marianna Kemell Lauri Niinistö Timo Sajavaara Martti Klinga Timo Hatanpää
Journals: Acta chemica Scandinavica/Acta chemica Scandinavica. B, Organic chemistry and biochemistry/Acta chemica Scandinavica. A, Physical and inorganic chemistry/Acta chemica Scandinavica. Series B. Organic chemistry and biochemistry/Acta chemica Scandinavica. Series A, Physical and inorganic chemistry (65 papers)Chemistry of Materials (53 papers)Journal of The Electrochemical Society (46 papers)Thin Solid Films (45 papers)Chemical Vapor Deposition (40 papers)
Partner nations: Finland Estonia Germany

In The Last Decade

Markku Leskelä

821 papers receiving 31.9k citations

Hit Papers

align trajectories log scale

Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends 2013 · 1.2k citations

What are hit papers?

Hit papers significantly outperform the citation benchmark for their cohort. A paper qualifies if any of the following hold:

it has ≥500 total citations;
it reaches ≥1.5× the top-1% citation threshold for papers in the same subfield and year (the threshold is the minimum needed to enter the top 1%, not the average within it);
it reaches the top citation threshold in at least one of its specific research topics.

2013 Journal of Applied Physics
2003 Angewandte Chemie International Edition
2002 Thin Solid Films

Peers

Countries citing papers authored by Markku Leskelä

Since Specialization

Citations

This map shows the geographic impact of Markku Leskelä's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Markku Leskelä with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Markku Leskelä more than expected).

Fields of papers citing papers by Markku Leskelä

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Markku Leskelä. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Markku Leskelä. The network helps show where Markku Leskelä may publish in the future.

Co-authors

The 25 scholars most cited alongside Markku Leskelä, linked wherever they have co-authored with each other. Click a name or a connecting line to browse the papers they share.

Border = papers with Markku Leskelä Line = papers co-authored together Markku Leskelä links everyone, so they are left out of the graph.

All Works

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20 of 20 papers shown

#	Work
1	Recent trends in thermal atomic layer deposition chemistry Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ·Georgi Popov, Miika Mattinen, Anton Vihervaara, Markku Leskelä	2025	3
2	Atomic Layer Deposition of Boron‐Doped Al₂O₃ Dielectric Films Advanced Materials Interfaces ·Xinzhi Li, Marko Vehkamäki, Mykhailo Chundak, Kenichiro Mizohata, Anton Vihervaara, Markku Leskelä, Matti Putkonen, Mikko Ritala	2023	2
3	Double Swing Quiescent-Current: An Experimental Detection Method of Ferroelectricity in Very Leaky Dielectric Films ECS Transactions ·S. Dueñas, Helena Castán, Óscar G. Ossorio, Guillermo Vinuesa, H. García, Kaupo Kukli, Markku Leskelä	2020	1
4	Magnetic properties and resistive switching in mixture films and nanolaminates consisting of iron and silicon oxides grown by atomic layer deposition Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ·Kaupo Kukli, Marianna Kemell, Helena Castán, S. Dueñas, Joosep Link, Raivo Stern, Mikko Heikkilä, Taivo Jõgiaas, Jekaterina Kozlova, Mihkel Rähn, Kenichiro Mizohata, Mikko Ritala, Markku Leskelä	2020	10
5	Charge carrier dynamics in tantalum oxide overlayered and tantalum doped hematite photoanodes Journal of Materials Chemistry A ·Tero‐Petri Ruoko, Arto Hiltunen, Tomi Iivonen, Riina Ulkuniemi, Kimmo Lahtonen, Harri Ali‐Löytty, Kenichiro Mizohata, Mika Valden, Markku Leskelä, Nikolai V. Tkachenko	2019	27
6	Atomic Layer Deposition and Properties of HfO₂-Al₂O₃ Nanolaminates ECS Journal of Solid State Science and Technology ·Kaupo Kukli, Marianna Kemell, Helena Castán, S. Dueñas, Helina Seemen, Mihkel Rähn, Joosep Link, Raivo Stern, Mikko Ritala, Markku Leskelä	2018	12
7	Study of the Influence of the Dielectric Composition of Al/Ti/ZrO₂:Al₂O₃/TiN/Si/Al Structures on the Resistive Switching Behavior for Memory Applications ECS Transactions ·Helena Castán, S. Dueñas, Kaupo Kukli, Marianna Kemell, Mikko Ritala, Markku Leskelä	2018	3
8	Towards space-grade 3D-printed, ALD-coated small satellite propulsion components for fluidics Additive manufacturing ·Antti Kestilä, Kalle Nordling, Ville Miikkulainen, Mikko Kaipio, Tuomas Tikka, Mika Salmi, Aleksi Auer, Markku Leskelä, Mikko Ritala	2018	32
9	Surface modification of acetaminophen particles by atomic layer deposition International Journal of Pharmaceutics ·Tommi Kääriäinen, Marianna Kemell, Marko Vehkamäki, Marja‐Leena Kääriäinen, Alexandra Correia, Hélder A. Santos, Luís M. Bimbo, Jouni Hirvonen, Pekka Hoppu, Steven M. George, David Cameron, Mikko Ritala, Markku Leskelä	2017	44
10	Holmium and titanium oxide nanolaminates by atomic layer deposition Thin Solid Films ·Kaupo Kukli, Jun Lu, Joosep Link, Marianna Kemell, Esa Puukilainen, Mikko Heikkilä, Roland Hoxha, Aile Tamm, Lars Hultman, Raivo Stern, Mikko Ritala, Markku Leskelä	2014	7
11	CATALYSED ALKALINE OXIDATION AS A WOOD FRACTIONATION TECHNIQUE BioResources ·Stella Rovio, Anne Kallioinen, Tarja Tamminen, Maija Hakola, Markku Leskelä, Matti Siika‐aho	2012	11
12	Amine-Borane Mediated Metal-Free Hydrogen Activation and Catalytic Hydrogenation Topics in current chemistry ·Victor Sumerin, Konstantin Chernichenko, Felix Schulz, Markku Leskelä, Bernhard Rieger, Timo Repo	2012	15
13	Chemical vapour deposition of In2O3 thin films from a tris-guanidinate indium precursor Dalton Transactions ·Seán T. Barry, Peter G. Gordon, Matthew J. Ward, Mikko Heikkilä, W.H. Monillas, Glenn P. A. Yap, Mikko Ritala, Markku Leskelä	2011	22
14	Liberation of Cellulose from the Lignin Cage: A Catalytic Pretreatment Method for the Production of Cellulosic Ethanol ChemSusChem ·Maija Hakola, Anne Kallioinen, Marianna Kemell, Petro Lahtinen, Elina Lankinen, Markku Leskelä, Timo Repo, Tiina Riekkola, Matti Siika‐aho, Jaana Uusitalo, Satu Vuorela, Niklas von Weymarn	2010	26
15	Atomic Layer Deposition of High‐k Oxides of the Group 4 Metals for Memory Applications (Adv. Eng. Mater. 4/2009) Advanced Engineering Materials ·Jaakko Niinistö, Kaupo Kukli, Mikko Heikkilä, Mikko Ritala, Markku Leskelä	2009	1
16	Atomic layer deposition process with TiF_4 as a precursor for depositing metal fluoride thin films Applied Optics ·Tero Pilvi, Mikko Ritala, Markku Leskelä, Martin Bischoff, Ute Kaiser, Norbert Kaiser	2008	32
17	Enhanced stability of rubbery amylose-rich maize starch films plasticized with a combination of sorbitol and glycerol International Journal of Pharmaceutics ·Karin Krogars, Jyrki Heinämäki, Milja Karjalainen, Antti Niskanen, Markku Leskelä, Jouko Yliruusi	2003	72
18	In Situ Mass Spectrometry Study on Surface Reactions in Atomic Layer Deposition of Al₂O₃ Thin Films from Trimethylaluminum and Water Langmuir ·Marika Juppo, Antti Rahtu, Mikko Ritala, Markku Leskelä	2000	102
19	Synthesis of Diastereomeric Mixtures of 5'-C-Hydroxymethylthymidine and Introduction of a Novel Class of C-Hydroxymethyl Functionalised Oligodeoxynucleotides. Acta chemica Scandinavica/Acta chemica Scandinavica. B, Organic chemistry and biochemistry/Acta chemica Scandinavica. A, Physical and inorganic chemistry/Acta chemica Scandinavica. Series B. Organic chemistry and biochemistry/Acta chemica Scandinavica. Series A, Physical and inorganic chemistry ·Jef Fensholdt, Jesper Wengel, Otto Dahl, Georg Hvistendahl, Markku Leskelä, Mika Polamo, Muhammed Nour Homsi, Frank K. H. Kuske, Monika Haugg, Nathalie Trabesinger-Rüf, Elmar G. Weinhold	1996	16
20	Preparation, thermal properties, solid solution formation and some luminescence properties of rare Earth oxysulfides PhDT ·Markku Leskelä	1980	3

About Markku Leskelä

Markku Leskelä is a scholar working on Process Chemistry and Technology, Materials Chemistry, Inorganic Chemistry, Electronic, Optical and Magnetic Materials and Electrical and Electronic Engineering, having authored 830 papers that have together received 33.0k indexed citations. Recurring topics across this work include Semiconductor materials and devices (326 papers), Electronic and Structural Properties of Oxides (145 papers), Organometallic Complex Synthesis and Catalysis (87 papers), Catalytic Processes in Materials Science (84 papers), ZnO doping and properties (76 papers), Copper Interconnects and Reliability (73 papers), Quantum Dots Synthesis And Properties (70 papers) and Luminescence Properties of Advanced Materials (59 papers). The work is most often cited by research in Process Chemistry and Technology (1.2k citations), Materials Chemistry (19.4k citations), Electrical and Electronic Engineering (19.7k citations), Inorganic Chemistry (4.0k citations) and Electronic, Optical and Magnetic Materials (4.5k citations). Markku Leskelä has collaborated with scholars based in Finland, Estonia and Germany. Frequent co-authors include Mikko Ritala, Kaupo Kukli, Timo Repo, Marianna Kemell, Lauri Niinistö, Timo Sajavaara, Martti Klinga, Timo Hatanpää, Martin Nieger and Riikka L. Puurunen. Their work appears in journals such as Acta chemica Scandinavica/Acta chemica Scandinavica. B, Organic chemistry and biochemistry/Acta chemica Scandinavica. A, Physical and inorganic chemistry/Acta chemica Scandinavica. Series B. Organic chemistry and biochemistry/Acta chemica Scandinavica. Series A, Physical and inorganic chemistry, Chemistry of Materials, Journal of The Electrochemical Society, Thin Solid Films and Chemical Vapor Deposition.

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