Chemical Vapor Deposition 23.8k citations
1.0k papers ·
indexed · active since 1950
Topics Semiconductor materials and devices Electronic and Structural Properties of Oxides Copper Interconnects and Reliability Overview Impact Peers Geography Research Space Peers Chemical Vapor Deposition
Comparison fields: 5 of 136 Materials Chemistry 15.6k Electrical and Electronic Engineering 13.9k Electronic, Optical and Magnetic Materials 4.2k Biomedical Engineering 2.8k Renewable Energy, Sustainability and the Environment 2.4k Mechanics of Materials 2.1k Atomic and Molecular Physics, and Optics 1.6k Organic Chemistry 1.6k Polymers and Plastics 1.5k Inorganic Chemistry 1.3k Surfaces, Coatings and Films 1.2k Mechanical Engineering 998 Catalysis 822 Ceramics and Composites 710 Computational Mechanics 692 Condensed Matter Physics 650 Radiology, Nuclear Medicine and Imaging 414 Bioengineering 310 Oncology 276 Atmospheric Science 272 Biomaterials 266 Water Science and Technology 240 Spectroscopy 229 Aerospace Engineering 219 Molecular Biology 196 Electrochemistry 186 Ocean Engineering 133 Automotive Engineering 129 Geophysics 122 Physical and Theoretical Chemistry 117 Cellular and Molecular Neuroscience 113 Structural Biology 86 Industrial and Manufacturing Engineering 77 Civil and Structural Engineering 68 Toxicology 66 Analytical Chemistry 66 Fluid Flow and Transfer Processes 59 Process Chemistry and Technology 58 Pharmaceutical Science 51 Environmental Chemistry 50 Applied Mathematics 48 Radiation 43 Surgery 40 Pollution 39 Building and Construction 26 Environmental Engineering 23 Orthodontics 23 Astronomy and Astrophysics 22 Pulmonary and Respiratory Medicine 18 Global and Planetary Change 18 Artificial Intelligence 16 Cognitive Neuroscience 16 Health, Toxicology and Mutagenesis 16 Molecular Medicine 16 Geochemistry and Petrology 15 Statistical and Nonlinear Physics 15 Oral Surgery 15 Computer Networks and Communications 14 Food Science 13 General Materials Science 12 Plant Science 12 Nuclear and High Energy Physics 12 Infectious Diseases 10 Earth-Surface Processes 10 Hematology 9 Control and Systems Engineering 9 Genetics 8 Computational Theory and Mathematics 7 Microbiology 7 General Dentistry 7 Metals and Alloys 7 Safety, Risk, Reliability and Quality 7 Industrial and Manufacturing Engineering 7 Public Health, Environmental and Occupational Health 6 Cell Biology 6 Instrumentation 6 Epidemiology 6 Computer Vision and Pattern Recognition 5 Nutrition and Dietetics 5 Biophysics 5 Insect Science 5 Energy Engineering and Power Technology 5 Ecology 4 Neurology 4 Acoustics and Ultrasonics 4 Periodontics 4 Cancer Research 3 Biochemistry 3 Media Technology 3 Archeology 3 Complementary and alternative medicine 3 Conservation 3 Emergency Medical Services 3 Statistics, Probability and Uncertainty 3 Filtration and Separation 3 Pharmacology 3 Dermatology 2 Biotechnology 2 Genetics 2 Developmental Neuroscience 2 Immunology and Allergy 2 Immunology 2 Paleontology 2 Pathology and Forensic Medicine 2 Pediatrics, Perinatology and Child Health 2 Geometry and Topology 2 Nuclear Energy and Engineering 2 Physiology 2 Modeling and Simulation 2 Hardware and Architecture 2 Safety Research 1 Information Systems 1 Mathematical Physics 1 Oceanography 1 Economics and Econometrics 1 Computer Science Applications 1 Strategy and Management 1 Orthopedics and Sports Medicine 1 Rehabilitation 1 Urology 1 Philosophy 1 Endocrine and Autonomic Systems 1 Sensory Systems 1 Management of Technology and Innovation 1 Geology 1 Forestry 1 General Health Professions 1 Psychiatry and Mental health 1 Virology 1 Management, Monitoring, Policy and Law 1 Rheumatology 1 Nature and Landscape Conservation 1 Complementary and Manual Therapy 1 Animal Science and Zoology 1 Architecture 1 Physiology 1
Materials Chemistry 15.6k Electrical and Electronic Engineering 13.9k Electronic, Optical and Magnetic Materials 4.2k Biomedical Engineering 2.8k Renewable Energy, Sustainability and the Environment 2.4k Applied Physics Reviews China
Progress in Surface Science United States
Nanostructured Materials United States
Advanced Composites and Hybrid Materials China
New Carbon Materials China
Carbon letters South Korea
Nanotechnology Reviews China
Surface Science Spectra United States
MRS Communications United States
Citations per field
0 0.5× 1.5×
Applied Physics Reviews · 1× This map shows the geographic impact of research published in Chemical Vapor Deposition. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by papers published in Chemical Vapor Deposition with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Chemical Vapor Deposition more than expected).
This network shows the impact of papers published in Chemical Vapor Deposition. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers published in Chemical Vapor Deposition.
About Chemical Vapor Deposition The 1.0k papers published in Chemical Vapor Deposition in the last decades have received a total of 23.8k indexed citations . Papers published in Chemical Vapor Deposition usually cover Materials Chemistry (660 papers), Electronic, Optical and Magnetic Materials (247 papers) and Electrical and Electronic Engineering (668 papers) specifically the topics of Semiconductor materials and devices (468 papers), Electronic and Structural Properties of Oxides (167 papers) and Copper Interconnects and Reliability (161 papers). The most active scholars publishing in Chemical Vapor Deposition are Riikka L. Puurunen , Mikko Ritala , Markku Leskelä , C. Gómez‐Aleixandre , Roberto Muñoz , Ivan P. Parkin , Karen K. Gleason , Anthony C. Jones , Manfred Bochmann and Klaus J. Hüttinger .
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