Mitsuru Satô

1.8k total citations
46 papers, 1.5k citations indexed

About

Mitsuru Satô is a scholar working on Electrical and Electronic Engineering, Biomedical Engineering and Surfaces, Coatings and Films. According to data from OpenAlex, Mitsuru Satô has authored 46 papers receiving a total of 1.5k indexed citations (citations by other indexed papers that have themselves been cited), including 36 papers in Electrical and Electronic Engineering, 20 papers in Biomedical Engineering and 8 papers in Surfaces, Coatings and Films. Recurrent topics in Mitsuru Satô's work include Advancements in Photolithography Techniques (28 papers), Nanofabrication and Lithography Techniques (16 papers) and Integrated Circuits and Semiconductor Failure Analysis (12 papers). Mitsuru Satô is often cited by papers focused on Advancements in Photolithography Techniques (28 papers), Nanofabrication and Lithography Techniques (16 papers) and Integrated Circuits and Semiconductor Failure Analysis (12 papers). Mitsuru Satô collaborates with scholars based in Japan, United States and Germany. Mitsuru Satô's co-authors include Ikuo Niikura, Katsumi Maeda, Tsuguo Fukuda, Takahiro Kozawa, Seiichi Tagawa, Hiroki Yamamoto, Hiroji Komano, Tomoyuki Ando, Kazumasa Okamoto and Atsuro Nakano and has published in prestigious journals such as Angewandte Chemie International Edition, Japanese Journal of Applied Physics and Journal of Crystal Growth.

In The Last Decade

Mitsuru Satô

43 papers receiving 1.5k citations

Peers

Mitsuru Satô

EEE

SCF

EOMM

Cheng-Hung Lin United States

P. N. Sanda United States

D. Wiesmann Switzerland

Jay Cheng Taiwan

Geert Hellings Belgium

T.H. Ning United States

Pin Su Taiwan

Dimitrios Kazazis Switzerland

Naoto Horiguchi Belgium

Joost Bekaert Belgium

Cheng-Hung Lin United States

Mitsuru Satô

427 ×0.4

EEE

296 ×0.6

143 ×0.4

143 ×0.5

SCF

90 ×0.4

EOMM

Citations per year, relative to Mitsuru Satô Mitsuru Satô (= 1×) peers Cheng-Hung Lin

Countries citing papers authored by Mitsuru Satô

Since Specialization

Citations

This map shows the geographic impact of Mitsuru Satô's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Mitsuru Satô with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Mitsuru Satô more than expected).

Fields of papers citing papers by Mitsuru Satô

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Mitsuru Satô. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Mitsuru Satô. The network helps show where Mitsuru Satô may publish in the future.

Co-authorship network of co-authors of Mitsuru Satô

This figure shows the co-authorship network connecting the top 25 collaborators of Mitsuru Satô. A scholar is included among the top collaborators of Mitsuru Satô based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with Mitsuru Satô. Mitsuru Satô is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

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20 of 20 papers shown

Yamashita, Tomoko, et al.. (2023). Evaluation of Hallux Valgus Using Rotational Moment of Midfoot Measured by a Three-dimensional Foot Scanner: a Cross-sectional Observational Study. Advanced Biomedical Engineering. 12(0). 154–162. 1 indexed citations

Satô, Mitsuru, et al.. (2018). ATSMF: Automated Tiered Storage with Fast Memory and Slow Flash Storage to Improve Response Time with Concentrated Input-Output (IO) Workloads. IEICE Transactions on Information and Systems. E101.D(12). 2889–2901. 1 indexed citations

Renen, Alexander van, et al.. (2018). Managing Non-Volatile Memory in Database Systems. 1541–1555. 84 indexed citations

Satô, Mitsuru, et al.. (2013). Power dissipation at MOSFET gate port of class E amplifier. 326–329. 2 indexed citations

Jo, Masafumi, et al.. (2012). Origin of the blueshift of photoluminescence in a type-II heterostructure. Nanoscale Research Letters. 7(1). 654–654. 26 indexed citations

Yamamoto, Hiroki, Takahiro Kozawa, Seiichi Tagawa, et al.. (2008). Chemically amplified molecular resist based on fullerene derivative for nanolithography. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 6923. 69230N–69230N. 8 indexed citations

Kozawa, Takahiro, Seiichi Tagawa, Mitsuru Satô, et al.. (2008). X-ray Reflectivity Study on Depth Profile of Acid Generator Distribution in Chemically Amplified Resists. Applied Physics Express. 1. 65004–65004. 52 indexed citations

Fukuzumi, Y., Ryota Katsumata, Masaru Kito, et al.. (2007). Optimal Integration and Characteristics of Vertical Array Devices for Ultra-High Density, Bit-Cost Scalable Flash Memory. 449–452. 162 indexed citations

Yamamoto, Hiroki, et al.. (2007). Single-Component Chemically Amplified Resist Based on Dehalogenation of Polymer. Japanese Journal of Applied Physics. 46(7L). L648–L648. 12 indexed citations

10.

Yamamoto, Hiroki, et al.. (2007). Single component chemically-amplified resist based on dehalogenation of polymer. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 6519. 65192G–65192G. 1 indexed citations

11.

Maeda, Katsumi, Mitsuru Satô, Ikuo Niikura, & Tsuguo Fukuda. (2005). Growth of 2 inch ZnO bulk single crystal by the hydrothermal method. Semiconductor Science and Technology. 20(4). S49–S54. 220 indexed citations

12.

Satô, Mitsuru, et al.. (2005). Resist Elution Study for Immersion Lithography. Japanese Journal of Applied Physics. 44(7S). 5803–5803. 2 indexed citations

13.

Yamamoto, Hiroki, Takahiro Kozawa, Atsuro Nakano, et al.. (2004). Proton Dynamics in Chemically Amplified Electron Beam Resists. Japanese Journal of Applied Physics. 43(7A). L848–L848. 161 indexed citations

14.

Frauenglass, A., S. R. J. Brueck, Will Conley, et al.. (2004). Imaging capabilities of resist in deep ultraviolet liquid immersion interferometric lithography. Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena. 22(6). 3459–3464. 18 indexed citations

15.

Yamamoto, Hiroki, Takahiro Kozawa, Atsuro Nakano, et al.. (2004). Dependence of acid generation efficiency on the protection ratio of hydroxyl groups in chemically amplified electron beam, x-ray and EUV resists. Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena. 22(6). 3522–3524. 40 indexed citations

16.

Satô, Mitsuru, et al.. (2003). Recent Progress in New Acetal-based Resist for Electron Beam Lithography. Journal of Photopolymer Science and Technology. 16(3). 455–458. 2 indexed citations

17.

Jessen, S. W., et al.. (2002). Integration using KrF and ArF resist materials in a full via first dual-damascene process scheme with CVD OSG low-k dielectric. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 4691. 822–822. 1 indexed citations

18.

Satô, Mitsuru, et al.. (1999). Characteristics for negative and positive tone resists with direct write electron beam and SCALPEL exposure systems. Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena. 17(6). 2873–2877. 4 indexed citations

19.

Kadokawa, Jun‐ichi, Mitsuru Satô, Masa Karasu, Hideyuki Tagaya, & Kōji Chiba. (1998). Synthesis of Hyperbranched Aminopolysaccharides. Angewandte Chemie International Edition. 37(17). 2373–2376. 45 indexed citations

20.

Taguchi, Tomohiro, et al.. (1994). Structure of Fe-K Mixed Oxide Catalysts under the Reaction Conditions of Ethylbenzene Dehydrogenation.. NIPPON KAGAKU KAISHI. 619–624. 7 indexed citations

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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