Hiroji Komano

466 total citations
11 papers, 428 citations indexed

About

Hiroji Komano is a scholar working on Electrical and Electronic Engineering, Biomedical Engineering and Surfaces, Coatings and Films. According to data from OpenAlex, Hiroji Komano has authored 11 papers receiving a total of 428 indexed citations (citations by other indexed papers that have themselves been cited), including 11 papers in Electrical and Electronic Engineering, 6 papers in Biomedical Engineering and 4 papers in Surfaces, Coatings and Films. Recurrent topics in Hiroji Komano's work include Advancements in Photolithography Techniques (11 papers), Integrated Circuits and Semiconductor Failure Analysis (8 papers) and Nanofabrication and Lithography Techniques (5 papers). Hiroji Komano is often cited by papers focused on Advancements in Photolithography Techniques (11 papers), Integrated Circuits and Semiconductor Failure Analysis (8 papers) and Nanofabrication and Lithography Techniques (5 papers). Hiroji Komano collaborates with scholars based in Japan. Hiroji Komano's co-authors include Takahiro Kozawa, Mitsuru Satô, Hiroki Yamamoto, Seiichi Tagawa, Kazumasa Okamoto, Tomoyuki Ando, Atsuro Nakano, Yukio Yamamoto, Akinori Saeki and Hiroo Kinoshita and has published in prestigious journals such as Japanese Journal of Applied Physics, Journal of Photopolymer Science and Technology and Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena.

In The Last Decade

Hiroji Komano

10 papers receiving 423 citations

Peers

Hiroji Komano

EEE

SCF

Atsuro Nakano Japan

Sergio L. S. Freire Canada

Ui-Chong Yi United States

Erin Mclellan United States

Debalina Chatterjee United States

Yao-Ching Ku Taiwan

Alexandre Gaucher France

Christopher Berge Germany

A. Lee United States

Blair Unger United States

Atsuro Nakano Japan

Hiroji Komano

678 ×1.6

EEE

381 ×1.7

SCF

272 ×1.5

14 ×1.4

11 ×1.8

Citations per year, relative to Hiroji Komano Hiroji Komano (= 1×) peers Atsuro Nakano

Countries citing papers authored by Hiroji Komano

Since Specialization

Citations

This map shows the geographic impact of Hiroji Komano's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Hiroji Komano with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Hiroji Komano more than expected).

Fields of papers citing papers by Hiroji Komano

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Hiroji Komano. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Hiroji Komano. The network helps show where Hiroji Komano may publish in the future.

Co-authorship network of co-authors of Hiroji Komano

This figure shows the co-authorship network connecting the top 25 collaborators of Hiroji Komano. A scholar is included among the top collaborators of Hiroji Komano based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with Hiroji Komano. Hiroji Komano is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

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11 of 11 papers shown

Yamamoto, Hiroki, et al.. (2007). Single-Component Chemically Amplified Resist Based on Dehalogenation of Polymer. Japanese Journal of Applied Physics. 46(7L). L648–L648. 12 indexed citations

Yamamoto, Hiroki, et al.. (2007). Single component chemically-amplified resist based on dehalogenation of polymer. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 6519. 65192G–65192G. 1 indexed citations

Yamamoto, Hiroki, Takahiro Kozawa, Akinori Saeki, et al.. (2007). Effect of Acid Diffusion and Polymer Structure on Line Edge Roughness. Japanese Journal of Applied Physics. 46(9S). 6187–6187. 16 indexed citations

Watanabe, Takeo, et al.. (2006). Optimization of photoacid generator in CA resist for EUVL. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 6153. 615343–615343. 5 indexed citations

Yamamoto, Hiroki, Takahiro Kozawa, Kazumasa Okamoto, et al.. (2006). Reaction mechanism of fluorinated chemically amplified resists. Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena. 24(4). 1833–1836. 22 indexed citations

Yamamoto, Hiroki, Takahiro Kozawa, Atsuro Nakano, et al.. (2005). Study on acid generation from polymer. Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena. 23(6). 2728–2732. 26 indexed citations

Yamamoto, Hiroki, Takahiro Kozawa, Atsuro Nakano, et al.. (2005). Reaction Mechanisms of Brominated Chemically Amplified Resists. Japanese Journal of Applied Physics. 44(6L). L842–L842. 16 indexed citations

Hada, Hideo, Takeo Watanabe, Hiroo Kinoshita, & Hiroji Komano. (2005). Outgassing Analysis in EUV Resist. Journal of Photopolymer Science and Technology. 18(4). 475–480. 5 indexed citations

Yamamoto, Hiroki, Takahiro Kozawa, Atsuro Nakano, et al.. (2005). Potential Cause of Inhomogeneous Acid Distribution in Chemically Amplified Resists for Post Optical Lithography. Japanese Journal of Applied Physics. 44(7S). 5836–5836. 124 indexed citations

10.

Yamamoto, Hiroki, Takahiro Kozawa, Atsuro Nakano, et al.. (2004). Proton Dynamics in Chemically Amplified Electron Beam Resists. Japanese Journal of Applied Physics. 43(7A). L848–L848. 161 indexed citations

11.

Yamamoto, Hiroki, Takahiro Kozawa, Atsuro Nakano, et al.. (2004). Dependence of acid generation efficiency on the protection ratio of hydroxyl groups in chemically amplified electron beam, x-ray and EUV resists. Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena. 22(6). 3522–3524. 40 indexed citations

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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