G. Owen

473 total citations
32 papers, 329 citations indexed

About

G. Owen is a scholar working on Electrical and Electronic Engineering, Surfaces, Coatings and Films and Biomedical Engineering. According to data from OpenAlex, G. Owen has authored 32 papers receiving a total of 329 indexed citations (citations by other indexed papers that have themselves been cited), including 27 papers in Electrical and Electronic Engineering, 14 papers in Surfaces, Coatings and Films and 9 papers in Biomedical Engineering. Recurrent topics in G. Owen's work include Advancements in Photolithography Techniques (23 papers), Electron and X-Ray Spectroscopy Techniques (10 papers) and Advanced Measurement and Metrology Techniques (7 papers). G. Owen is often cited by papers focused on Advancements in Photolithography Techniques (23 papers), Electron and X-Ray Spectroscopy Techniques (10 papers) and Advanced Measurement and Metrology Techniques (7 papers). G. Owen collaborates with scholars based in United States, Germany and Ireland. G. Owen's co-authors include R. F. W. Pease, C. N. Berglund, Rudolf von Bünau, N.I. Maluf, Andrew Grenville, John T. Sheridan, Feidhlim T. O’Neill, W. R. Trutna, R. Browning and W. C. W. Nixon and has published in prestigious journals such as Journal of Applied Physics, Reports on Progress in Physics and Japanese Journal of Applied Physics.

In The Last Decade

G. Owen

30 papers receiving 298 citations

Peers — A (Enhanced Table)

Peers by citation overlap · career bar shows stage (early→late) cites · hero ref

Name h Career Trend Papers Cites
G. Owen United States 9 228 127 106 71 50 32 329
Bhanwar Singh United States 12 271 1.2× 110 0.9× 73 0.7× 26 0.4× 110 2.2× 44 417
John A. Allgair United States 15 424 1.9× 187 1.5× 274 2.6× 66 0.9× 100 2.0× 64 566
Matthew Sendelbach United States 12 248 1.1× 142 1.1× 210 2.0× 58 0.8× 51 1.0× 45 394
Alok Vaid United States 11 292 1.3× 184 1.4× 237 2.2× 50 0.7× 55 1.1× 61 448
Jan Mulkens Netherlands 13 401 1.8× 218 1.7× 127 1.2× 68 1.0× 40 0.8× 47 467
M.W. Cresswell United States 9 197 0.9× 79 0.6× 74 0.7× 34 0.5× 142 2.8× 51 284
Euclid E. Moon United States 13 255 1.1× 218 1.7× 129 1.2× 36 0.5× 140 2.8× 40 378
Kazuyoshi Sugihara Japan 10 250 1.1× 156 1.2× 62 0.6× 28 0.4× 66 1.3× 41 339
Gaopeng Xue China 9 120 0.5× 80 0.6× 46 0.4× 141 2.0× 70 1.4× 32 292
Mireille Maenhoudt Belgium 12 419 1.8× 211 1.7× 105 1.0× 27 0.4× 32 0.6× 47 457

Countries citing papers authored by G. Owen

Since Specialization
Citations

This map shows the geographic impact of G. Owen's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by G. Owen with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites G. Owen more than expected).

Fields of papers citing papers by G. Owen

Since Specialization
Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by G. Owen. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by G. Owen. The network helps show where G. Owen may publish in the future.

Co-authorship network of co-authors of G. Owen

This figure shows the co-authorship network connecting the top 25 collaborators of G. Owen. A scholar is included among the top collaborators of G. Owen based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with G. Owen. G. Owen is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

20 of 20 papers shown
1.
Zaidi, Sohail, et al.. (2014). Characterization of a High-Power Microwave Induced Plasma inside an MP Torch using Emission Spectroscopy. 52nd Aerospace Sciences Meeting. 3 indexed citations
2.
Owen, G. & W. R. Trutna. (2005). Synchronous acousto-optic tuning of free-space external-cavity lasers. Applied Optics. 44(23). 4972–4972. 6 indexed citations
3.
Berglund, C. N., et al.. (1999). Exact algorithm self-calibration of two-dimensional precision metrology stages. Computer Standards & Interfaces. 21(2). 187–187. 2 indexed citations
4.
Owen, G.. (1997). Suppression of interference effects in spectroscopy using an integrating sphere. Review of Scientific Instruments. 68(3). 1369–1371. 4 indexed citations
5.
Berglund, C. N., et al.. (1997). An exact algorithm for self-calibration of two-dimensional precision metrology stages. Precision Engineering. 20(1). 16–32. 58 indexed citations
6.
Owen, G., et al.. (1994). Workpiece charging in electron beam lithography. Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena. 12(3). 1367–1371. 10 indexed citations
7.
Grenville, Andrew, G. Owen, & R. F. W. Pease. (1994). Characterization of a 193 nm optical lithography system for 0.18 μm and below. Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena. 12(6). 3814–3819. 1 indexed citations
8.
Jeong, Hongsik, et al.. (1993). Optical projection system for gigabit dynamic random access memories. Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena. 11(6). 2675–2679. 1 indexed citations
9.
Bünau, Rudolf von, G. Owen, & R. F. W. Pease. (1992). Depth of focus enhancement in optical lithography. Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena. 10(6). 3047–3054. 19 indexed citations
10.
Hsieh, Robert, Andrew Grenville, G. Owen, & R. F. W. Pease. (1992). All-reflective phase-shifting masks for Markle–Dyson optics. Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena. 10(6). 3042–3046. 1 indexed citations
11.
Berglund, C. N., et al.. (1992). Spatial correlation of electron-beam mask errors and the implications for integrated circuit yield. Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena. 10(6). 2633–2637. 2 indexed citations
12.
Owen, G., et al.. (1992). 1/8 μm optical lithography. Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena. 10(6). 3032–3036. 11 indexed citations
13.
Grenville, Andrew, et al.. (1991). Markle–Dyson optics for 0.25 μm lithography and beyond. Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena. 9(6). 3108–3112. 6 indexed citations
14.
Liu, Huayu & G. Owen. (1990). The effect of resist contrast on linewidth error induced by e-beam proximity exposure. Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena. 8(6). 1872–1876. 1 indexed citations
15.
Owen, G.. (1990). Methods for proximity effect correction in electron lithography. Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena. 8(6). 1889–1892. 45 indexed citations
16.
Owen, G.. (1985). Electron lithography for the fabrication of microelectronic devices. Reports on Progress in Physics. 48(6). 795–851. 13 indexed citations
17.
Owen, G., et al.. (1983). Performance results of an electron beam lithography machine and process by means of dc electrical test structures. Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena. 1(4). 1014–1019. 2 indexed citations
18.
Owen, G.. (1981). Automatic measurement and correction of deflection astigmatism and defocusing in the Hewlett–Packard 605 electron beam lithography system.. Journal of Vacuum Science and Technology. 19(4). 1064–1068. 4 indexed citations
19.
Han, Grace, Pengfei Han, G. Owen, & J. David Johnson. (1977). A New Method for Measurement of Cyclic AMP Phosphodiesterase Activity<xref ref-type="fn" rid="fn1"><sup>1</sup></xref>. The Journal of Biochemistry. 82(2). 387–94. 2 indexed citations
20.
Owen, G., et al.. (1971). Effects of practice on simple reaction time of trainable mental retardates.. PubMed. 24(6). 176–9. 2 indexed citations

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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