Vicky Philipsen

1.2k total citations
126 papers, 915 citations indexed

About

Vicky Philipsen is a scholar working on Electrical and Electronic Engineering, Surfaces, Coatings and Films and Radiation. According to data from OpenAlex, Vicky Philipsen has authored 126 papers receiving a total of 915 indexed citations (citations by other indexed papers that have themselves been cited), including 109 papers in Electrical and Electronic Engineering, 88 papers in Surfaces, Coatings and Films and 28 papers in Radiation. Recurrent topics in Vicky Philipsen's work include Advancements in Photolithography Techniques (107 papers), Electron and X-Ray Spectroscopy Techniques (75 papers) and Integrated Circuits and Semiconductor Failure Analysis (39 papers). Vicky Philipsen is often cited by papers focused on Advancements in Photolithography Techniques (107 papers), Electron and X-Ray Spectroscopy Techniques (75 papers) and Integrated Circuits and Semiconductor Failure Analysis (39 papers). Vicky Philipsen collaborates with scholars based in Belgium, Germany and Netherlands. Vicky Philipsen's co-authors include Eric Hendrickx, Andreas Erdmann, Peter Evanschitzky, Peter Lievens, E. Vandeweert, Frank Scholze, R. E. Silverans, Christian Laubis, Dongbo Xu and Karl Opsomer and has published in prestigious journals such as Physical Review Letters, Physical review. B, Condensed matter and Analytical Chemistry.

In The Last Decade

Vicky Philipsen

112 papers receiving 820 citations

Peers — A (Enhanced Table)

Peers by citation overlap · career bar shows stage (early→late) cites · hero ref

Name h Career Trend Papers Cites
Vicky Philipsen Belgium 17 756 544 231 157 141 126 915
Jos Benschop Netherlands 14 413 0.5× 154 0.3× 52 0.2× 182 1.2× 80 0.6× 42 604
Stefan Wurm United States 14 505 0.7× 243 0.4× 43 0.2× 207 1.3× 62 0.4× 59 647
A. V. Rakov Russia 18 421 0.6× 513 0.9× 45 0.2× 80 0.5× 72 0.5× 76 681
Mark van de Kerkhof Netherlands 12 377 0.5× 157 0.3× 56 0.2× 98 0.6× 44 0.3× 57 487
Toshihisa Tomie Japan 14 370 0.5× 132 0.2× 68 0.3× 55 0.4× 48 0.3× 50 493
Nigel R. Farrar United States 12 246 0.3× 65 0.1× 21 0.1× 95 0.6× 65 0.5× 46 366
Yasuhiro Torii Japan 12 411 0.5× 100 0.2× 85 0.4× 120 0.8× 55 0.4× 35 482
Masataka Hourai Japan 14 530 0.7× 36 0.1× 30 0.1× 77 0.5× 43 0.3× 44 637
Yi‐Sha Ku Taiwan 10 186 0.2× 116 0.2× 13 0.1× 107 0.7× 59 0.4× 48 365
G. Vergara Spain 14 380 0.5× 55 0.1× 14 0.1× 185 1.2× 20 0.1× 45 567

Countries citing papers authored by Vicky Philipsen

Since Specialization
Citations

This map shows the geographic impact of Vicky Philipsen's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Vicky Philipsen with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Vicky Philipsen more than expected).

Fields of papers citing papers by Vicky Philipsen

Since Specialization
Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Vicky Philipsen. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Vicky Philipsen. The network helps show where Vicky Philipsen may publish in the future.

Co-authorship network of co-authors of Vicky Philipsen

This figure shows the co-authorship network connecting the top 25 collaborators of Vicky Philipsen. A scholar is included among the top collaborators of Vicky Philipsen based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with Vicky Philipsen. Vicky Philipsen is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

20 of 20 papers shown
1.
Lee, Inhwan, Joern-Holger Franke, Vicky Philipsen, et al.. (2025). Extending logic metal printing with sub-resolution grating in high and hyper NA EUV lithography. Lirias (KU Leuven). 39–39. 1 indexed citations
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Lee, Inhwan, Joern-Holger Franke, Vicky Philipsen, et al.. (2025). Study on Next-Generation EUV Lithography Technology: Hyper NA, the Highest Potential for Practical Implementation. ACS Applied Materials & Interfaces. 17(33). 47719–47735.
4.
Philipsen, Vicky, Andreas Frommhold, Inhwan Lee, et al.. (2024). Mask innovations on the eve of high NA EUV lithography. Japanese Journal of Applied Physics. 63(4). 40804–40804. 2 indexed citations
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Gillijns, Werner, et al.. (2024). OPC and modeling solution towards 0.55NA EUV stitching. 29–29. 2 indexed citations
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Dorney, Kevin M., Fabian Holzmeier, Esben W. Larsen, et al.. (2024). Actinic inspection of the extreme ultraviolet optical parameters of lithographic materials enabled by a table-top, coherent extreme ultraviolet source. Journal of Micro/Nanopatterning Materials and Metrology. 23(4). 1 indexed citations
10.
Marneffe, Jean‐François de, et al.. (2023). Ru/Ta bilayer approach to EUV mask absorbers: Experimental patterning and simulated imaging perspective. Micro and Nano Engineering. 20. 100223–100223. 2 indexed citations
11.
Gillijns, Werner, et al.. (2023). EUV single patterning of random logic via using bright field mask. 41–41.
12.
Philipsen, Vicky, et al.. (2023). Feasibility of logic metal scaling with 0.55NA EUV single patterning. 29–29. 4 indexed citations
13.
Philipsen, Vicky, et al.. (2022). Nested Sampling aided determination of tantalum optical constants in the EUV spectral range. Applied Optics. 61(33). 10032–10032. 2 indexed citations
14.
Philipsen, Vicky, et al.. (2022). On the optical constants of cobalt in the M-absorption edge region. Optik. 273. 170455–170455. 1 indexed citations
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Marneffe, Jean‐François de, Karl Opsomer, Christophe Detavernier, et al.. (2021). Characterization of Ru4-xTax (x = 1,2,3) alloy as material candidate for EUV low-n mask. Micro and Nano Engineering. 12. 100089–100089. 10 indexed citations
17.
Erdmann, Andreas, et al.. (2018). Attenuated phase shift mask for extreme ultraviolet: can they mitigate three-dimensional mask effects?. Journal of Micro/Nanolithography MEMS and MOEMS. 18(1). 1–1. 19 indexed citations
18.
Gao, Weimin, Víctor Blanco, Vicky Philipsen, et al.. (2017). Modeling EUVL patterning variability for metal layers in 5nm technology node and its effect on electrical resistance. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 10143. 101430I–101430I. 5 indexed citations
19.
Philipsen, Vicky, et al.. (2005). Through-pitch characterization and printability for 65nm half-pitch alternating aperture phase shift applications. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 5853. 211–211. 1 indexed citations
20.
Philipsen, Vicky, et al.. (2003). Velocity dependent electron transfer during emission of ion-beam sputtered Cu atoms. Physical review. B, Condensed matter. 68(7). 4 indexed citations

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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