Ε. Obermeier

4.7k total citations
167 papers, 3.6k citations indexed

About

Ε. Obermeier is a scholar working on Electrical and Electronic Engineering, Biomedical Engineering and Materials Chemistry. According to data from OpenAlex, Ε. Obermeier has authored 167 papers receiving a total of 3.6k indexed citations (citations by other indexed papers that have themselves been cited), including 125 papers in Electrical and Electronic Engineering, 64 papers in Biomedical Engineering and 36 papers in Materials Chemistry. Recurrent topics in Ε. Obermeier's work include Advanced MEMS and NEMS Technologies (62 papers), Gas Sensing Nanomaterials and Sensors (34 papers) and Mechanical and Optical Resonators (26 papers). Ε. Obermeier is often cited by papers focused on Advanced MEMS and NEMS Technologies (62 papers), Gas Sensing Nanomaterials and Sensors (34 papers) and Mechanical and Optical Resonators (26 papers). Ε. Obermeier collaborates with scholars based in Germany, United Kingdom and Greece. Ε. Obermeier's co-authors include H. Steffes, Florian Solzbacher, Cuk Imawan, D Maier-Schneider, Julia Maibach, M. Werner, S. Fischer, H. Schröder, C. Johnston and J. Suski and has published in prestigious journals such as Applied Physics Letters, Journal of Applied Physics and Applied Energy.

In The Last Decade

Ε. Obermeier

164 papers receiving 3.4k citations

Peers

Countries citing papers authored by Ε. Obermeier

Since Specialization

Citations

This map shows the geographic impact of Ε. Obermeier's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Ε. Obermeier with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Ε. Obermeier more than expected).

Fields of papers citing papers by Ε. Obermeier

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Ε. Obermeier. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Ε. Obermeier. The network helps show where Ε. Obermeier may publish in the future.

Co-authorship network of co-authors of Ε. Obermeier

This figure shows the co-authorship network connecting the top 25 collaborators of Ε. Obermeier. A scholar is included among the top collaborators of Ε. Obermeier based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with Ε. Obermeier. Ε. Obermeier is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

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20 of 20 papers shown

#	Work	Indexed citations
1	Liquid-free, piezoresistive, SOI-based pressure sensor for high temperature measurements up to 400 °C 2012 ·Ha-Duong Ngo, (unknown), (unknown), (unknown), (unknown), Ε. Obermeier, Klaus‐Dieter Lang, A. Giuliani, (unknown), (unknown)	13
2	Microsensors for AeroMEMS and High Temperature Applications (20周年記念特集) -- (記念講演) 2008 ·Sensors ·Ε. Obermeier	1
3	Aeromems Wall Hot-Wire Sensor Arrays on Polyimide with Through Foil Vias and Bottom Side Electrical Contacts 2007 ·TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference ·(unknown), (unknown), Alexander Neumann, Ε. Obermeier	13
4	Thermal analysis of silicon carbide based micro hotplates for metal oxide gas sensors 2005 ·Sensors and Actuators A Physical ·Gerhard Wiche, (unknown), H. Steffes, Ε. Obermeier	36
5	An electromagnetically actuated bi-stable MEMS optical microswitch 2004 ·Hans H. Gatzen, Ε. Obermeier, (unknown), Thomas Budde, (unknown), Biswajit Mukhopadhyay, M Farr	10
6	Effect of the silicon content of aqueous KOH on the etching behaviour of convex corners in >100< single crystalline silicon 2002 ·(unknown), (unknown), Ε. Obermeier	4
7	Simulation of Orientation-Dependent Etching of Silicon Using a New Step Flow Model of 3D Structuring 2000 ·TechConnect Briefs ·(unknown), Ε. Obermeier, H. Schröder, G. Wachutka	8
8	A new model for Si_{100}convex corner undercutting in anisotropic KOH etching 2000 ·Journal of Micromechanics and Microengineering ·H. Schröder, Ε. Obermeier	28
9	<title>Material-related effects on wet chemical micromachining of smart MEMS devices</title> 1999 ·Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·(unknown), S. Finkbeiner, Jiří Marek, Ε. Obermeier	1
10	Effects of the etchmask properties on the anisotropy ratio in anisotropic etching of silicon in aqueous KOH 1998 ·Journal of Micromechanics and Microengineering ·H. Schröder, Ε. Obermeier, A. Steckenborn	13
11	High Temperature Piezoresistive β-SiC-on-SOI Pressure Sensor for Combustion Engines 1998 ·Materials science forum ·(unknown), (unknown), W. Reichert, Ε. Obermeier, Martin Eickhoff, G. Krötz, (unknown), (unknown), (unknown), (unknown)	14
12	Design and fabrication of surface micromachined micromotors with large dimensions 1997 ·Journal of Micromechanics and Microengineering ·(unknown), Marcel Baltzer, Ε. Obermeier	8
13	Fabrication of smooth β-SiC surfaces by reactive ion etching using a graphite electrode 1997 ·Materials Science and Engineering B ·W. Reichert, (unknown), Ε. Obermeier, W. Wondrak	13
14	Variations in Young's modulus and intrinsic stress of LPCVD-polysilicon due to high-temperature annealing 1995 ·Journal of Micromechanics and Microengineering ·D Maier-Schneider, Julia Maibach, Ε. Obermeier, Dieter Schneider	81
15	Digital programmable pressure sensor with on-chip CMOS signal processing and data storage 1993 ·Fraunhofer-Publica (Fraunhofer-Gesellschaft) ·(unknown), (unknown), Ε. Obermeier, (unknown), (unknown), B.J. Hosticka	2
16	Supramolecular detection of solvent vapours with QMB and SAW devices 1993 ·Sensors and Actuators B Chemical ·Franz L. Dickert, (unknown), (unknown), (unknown), (unknown), Ε. Obermeier, W.-E. Bulst, (unknown), (unknown)	26
17	Computer-aided characterization of the elastic properties of thin films 1992 ·Journal of Micromechanics and Microengineering ·D Maier-Schneider, Julia Maibach, Ε. Obermeier	26
18	Contacts to doped and undoped polycrystalline diamond films 1992 ·Diamond and Related Materials ·(unknown), C. Johnston, Paul R. Chalker, (unknown), I.M. Buckley-Golder, M. Werner, Ε. Obermeier, M. Van Rossum	10
19	CMOS integrated capacitive pressure transducer with on-chip electronics and digital calibration capability 1991 ·TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers ·(unknown), (unknown), W. Brockherde, (unknown), T. A. Mehlhorn, Ε. Obermeier, (unknown)	17
20	Thin-film gas sensors with organically modified silicates for the measurement of SO2 1991 ·Sensors and Actuators B Chemical ·(unknown), Sebastian Möller, Ε. Obermeier	20

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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