T. Smith

516 total citations
18 papers, 367 citations indexed

About

T. Smith is a scholar working on Mechanical Engineering, Biomedical Engineering and Statistics, Probability and Uncertainty. According to data from OpenAlex, T. Smith has authored 18 papers receiving a total of 367 indexed citations (citations by other indexed papers that have themselves been cited), including 8 papers in Mechanical Engineering, 8 papers in Biomedical Engineering and 7 papers in Statistics, Probability and Uncertainty. Recurrent topics in T. Smith's work include Advanced Surface Polishing Techniques (7 papers), Advanced Statistical Process Monitoring (7 papers) and Manufacturing Process and Optimization (5 papers). T. Smith is often cited by papers focused on Advanced Surface Polishing Techniques (7 papers), Advanced Statistical Process Monitoring (7 papers) and Manufacturing Process and Optimization (5 papers). T. Smith collaborates with scholars based in United States and Canada. T. Smith's co-authors include Duane S. Boning, James Moyne, Arnon Hurwitz, Jerry A. Stefani, Stephanie Watts Butler, John E. Taylor, Enrique Del Castillo, Zhe Ning, Jinn‐Yi Yeh and Dennis O. Ouma and has published in prestigious journals such as Journal of The Electrochemical Society, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films and IEEE Transactions on Semiconductor Manufacturing.

In The Last Decade

T. Smith

18 papers receiving 345 citations

Peers — A (Enhanced Table)

Peers by citation overlap · career bar shows stage (early→late) cites · hero ref

Name	h						Papers	Cites
T. Smith United States	10	154	134	131	114	104	18	367
Jerry A. Stefani United States	8	165 1.1×	61 0.5×	170 1.3×	105 0.9×	126 1.2×	24	383
Brian K. Lambert United States	10	15 0.1×	78 0.6×	14 0.1×	218 1.9×	151 1.5×	20	331
C. H. Yu Taiwan	11	18 0.1×	48 0.4×	22 0.2×	33 0.3×	75 0.7×	18	299
Kyu‐Seob Kim South Korea	9	123 0.8×	8 0.1×	22 0.2×	147 1.3×	26 0.3×	25	337
Joan Rull‐Duran Spain	8	128 0.8×	73 0.5×	39 0.3×	20 0.2×	9 0.1×	20	319
Da Xu China	15	394 2.6×	56 0.4×	14 0.1×	81 0.7×	5 0.0×	38	574
Sanka Ganesan United States	6	58 0.4×	13 0.1×	21 0.2×	94 0.8×	26 0.3×	9	315
Nishad Patil United States	10	60 0.4×	17 0.1×	18 0.1×	33 0.3×	12 0.1×	13	483
M. A. El-Kady Canada	12	117 0.8×	13 0.1×	50 0.4×	28 0.2×	7 0.1×	26	556
S. Beineke Germany	12	199 1.3×	67 0.5×	37 0.3×	169 1.5×	2 0.0×	18	436

Countries citing papers authored by T. Smith

Since Specialization

Citations

This map shows the geographic impact of T. Smith's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by T. Smith with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites T. Smith more than expected).

Fields of papers citing papers by T. Smith

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by T. Smith. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by T. Smith. The network helps show where T. Smith may publish in the future.

Co-authorship network of co-authors of T. Smith

This figure shows the co-authorship network connecting the top 25 collaborators of T. Smith. A scholar is included among the top collaborators of T. Smith based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with T. Smith. T. Smith is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

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18 of 18 papers shown

Economikos, Laertis, et al.. (2009). Hotspot detection and design recommendation using silicon calibrated CMP model. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 7275. 72751R–72751R. 9 indexed citations

Li, Song, et al.. (2008). Hotspot Prevention Using CMP Model in Design Implementation Flow. 365–368. 7 indexed citations

Smith, T., et al.. (2003). A study of within-wafer non-uniformity metrics. 46–49. 5 indexed citations

Smith, T., et al.. (2002). Bias and variance in single and multiple response surface modeling. 60–63. 2 indexed citations

Ning, Zhe, James Moyne, T. Smith, et al.. (2002). A comparative analysis of run-to-run control algorithms in the semiconductor manufacturing industry. 375–381. 20 indexed citations

Boning, Duane S., et al.. (2002). Run by run control of chemical-mechanical polishing. 25. 81–87. 58 indexed citations

Smith, T. & Duane S. Boning. (2002). A self-tuning EWMA controller utilizing artificial neural network function approximation techniques. 355–363. 5 indexed citations

Smith, T., et al.. (2000). Optimization of the Chemical Mechanical Polishing Process for Premetal Dielectrics. Journal of The Electrochemical Society. 147(2). 682–682. 9 indexed citations

Smith, T., et al.. (1999). On-line patterned wafer thickness control of chemical-mechanical polishing. Journal of Vacuum Science & Technology A Vacuum Surfaces and Films. 17(4). 1384–1390. 6 indexed citations

10.

Smith, T., et al.. (1999). A statistical analysis of single and multiple response surface modeling. IEEE Transactions on Semiconductor Manufacturing. 12(4). 419–430. 6 indexed citations

11.

Boning, Duane S., et al.. (1999). Pattern Dependent Modeling for CMP Optimization and Control. MRS Proceedings. 566. 21 indexed citations

12.

Smith, T., Duane S. Boning, Jerry A. Stefani, & Stephanie Watts Butler. (1998). Run by run advanced process control of metal sputter deposition. IEEE Transactions on Semiconductor Manufacturing. 11(2). 276–284. 42 indexed citations

13.

Rosenthal, P., A. Bonanno, Duane S. Boning, et al.. (1998). Infrared spectroscopy for process control and fault detection of advanced semiconductor processes. 213–219. 2 indexed citations

14.

Smith, T. & Duane S. Boning. (1997). Artificial neural network exponentially weighted moving average controller for semiconductor processes. Journal of Vacuum Science & Technology A Vacuum Surfaces and Films. 15(3). 1377–1384. 21 indexed citations

15.

Smith, T., et al.. (1997). A matrix math library for Java. Concurrency Practice and Experience. 9(11). 1127–1137. 6 indexed citations

16.

Smith, T. & Duane S. Boning. (1997). A self-tuning EWMA controller utilizing artificial neural network function approximation techniques. 20(2). 121–132. 49 indexed citations

17.

Boning, Duane S., et al.. (1996). Run by run control of chemical-mechanical polishing. 19(4). 307–314. 74 indexed citations

18.

Boning, Duane S., et al.. (1995). Practical issues in run by run process control. 25. 201–208. 25 indexed citations

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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