Petra Alén

638 citations

11 papers · 535 indexed · h-index 9

Co-authors: Markku Leskelä Mikko Ritala Titta Aaltonen J. Keinonen Marika Juppo Timo Sajavaara Kai Arstila Marko Vehkamäki
Topics: Semiconductor materials and devices (10 papers)Copper Interconnects and Reliability (8 papers)Metal and Thin Film Mechanics (7 papers)
Cited by: Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering Mechanics of Materials
Journals: Journal of The Electrochemical Society Thin Solid Films Journal of materials research/Pratt's guide to venture capital sources
Partner nations: Finland Slovakia Belgium

In The Last Decade

Petra Alén

11 papers receiving 504 citations

Peers

Countries citing papers authored by Petra Alén

Since Specialization

Citations

This map shows the geographic impact of Petra Alén's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Petra Alén with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Petra Alén more than expected).

Fields of papers citing papers by Petra Alén

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Petra Alén. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Petra Alén. The network helps show where Petra Alén may publish in the future.

Co-authorship network of co-authors of Petra Alén

This figure shows the co-authorship network connecting the top 25 collaborators of Petra Alén. A scholar is included among the top collaborators of Petra Alén based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with Petra Alén. Petra Alén is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

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11 of 11 papers shown

#	Work	Indexed citations
1	Diffusion Barrier Properties of Atomic Layer Deposited Ultrathin Ta[sub 2]O[sub 5] and TiO[sub 2] Films 2006 ·Journal of The Electrochemical Society ·Petra Alén,Marko Vehkamäki,Mikko Ritala,Markku Leskelä	33
2	The growth and diffusion barrier properties of atomic layer deposited NbNx thin films 2005 ·Thin Solid Films ·Petra Alén,Mikko Ritala,Kai Arstila,J. Keinonen,Markku Leskelä	40
3	Atomic Layer Deposition of Molybdenum Nitride Thin Films for Cu Metallizations 2005 ·Journal of The Electrochemical Society ·Petra Alén,Mikko Ritala,Kai Arstila,J. Keinonen,Markku Leskelä	55
4	Atomic Layer Deposition of TaN, NbN, and MoN Films for Cu Metallizations 2005 ·Työväentutkimus Vuosikirja ·Petra Alén	7
5	Complexation of N-tris[(1,2-dicarboxyethoxy)ethyl]amine with Ca(II), Mn(II), Cu(II) and Zn(II) in aqueous solution 2005 ·Journal of Coordination Chemistry ·(unknown),Marjatta Orama,Petra Alén,Heikki Saarinen,Reijo Aksela,(unknown)	8
6	ALD of Ta(Si)N Thin Films Using TDMAS as a Reducing Agent and as a Si Precursor 2004 ·Journal of The Electrochemical Society ·Petra Alén,Titta Aaltonen,Mikko Ritala,Markku Leskelä,Timo Sajavaara,J. Keinonen,Jacob C. Hooker,Jan Willem Maes	10
7	Ruthenium Thin Films Grown by Atomic Layer Deposition 2003 ·Chemical Vapor Deposition ·Titta Aaltonen,Petra Alén,Mikko Ritala,Markku Leskelä	234
8	Tert-butylamine and Allylamine as Reductive Nitrogen Sources in Atomic Layer Deposition of TaN Thin Films 2002 ·Journal of materials research/Pratt's guide to venture capital sources ·Petra Alén,Marika Juppo,Mikko Ritala,Markku Leskelä,Timo Sajavaara,J. Keinonen	34
9	Atomic Layer Deposition of Titanium Nitride Thin Films Using tert-Butylamine and Allylamine as Reductive Nitrogen Sources 2002 ·Electrochemical and Solid-State Letters ·Marika Juppo,Petra Alén,Mikko Ritala,Timo Sajavaara,J. Keinonen,Markku Leskelä	26
10	Atomic Layer Deposition of Ta(Al)N(C) Thin Films Using Trimethylaluminum as a Reducing Agent 2001 ·Journal of The Electrochemical Society ·Petra Alén,Marika Juppo,Mikko Ritala,Timo Sajavaara,J. Keinonen,Markku Leskelä	44
11	Trimethylaluminum as a Reducing Agent in the Atomic Layer Deposition of Ti(Al)N Thin Films 2001 ·Chemical Vapor Deposition ·Marika Juppo,Petra Alén,Mikko Ritala,Markku Leskelä	44

About Petra Alén

Petra Alén is a scholar working on Electronic, Optical and Magnetic Materials, Mechanics of Materials and Electrical and Electronic Engineering, having authored 11 papers that have together received 535 indexed citations. Recurring topics across this work include Semiconductor materials and devices (10 papers), Copper Interconnects and Reliability (8 papers) and Metal and Thin Film Mechanics (7 papers). The work is most often cited by research in Electronic, Optical and Magnetic Materials (195 citations), Electrical and Electronic Engineering (458 citations) and Mechanics of Materials (143 citations). Petra Alén has collaborated with scholars based in Finland, Slovakia and Belgium. Frequent co-authors include Markku Leskelä, Mikko Ritala, Titta Aaltonen, J. Keinonen, Marika Juppo, Timo Sajavaara, Kai Arstila, Marko Vehkamäki, Marjatta Orama and Heikki Saarinen. Their work appears in journals such as Journal of The Electrochemical Society, Thin Solid Films and Journal of materials research/Pratt's guide to venture capital sources.

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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