Patrick Jaenen

1.3k citations

47 papers · 966 indexed · h-index 12

Impact in

Surfaces, Coatings and Films top 5%
- Optical Coatings and Gratings
Electrical and Electronic Engineering top 5%
- Photonic and Optical Devices
- Optical Network Technologies
- Advancements in Photolithography Techniques
- 3D IC and TSV technologies
- Advanced Photonic Communication Systems

Papers in ⓘ

Surfaces, Coatings and Films 9
Electrical and Electronic Engineering 46
- Advancements in Photolithography Techniques 23
- 3D IC and TSV technologies 14
- Integrated Circuits and Semiconductor Failure Analysis 12
- Photonic and Optical Devices 10
- Semiconductor materials and devices 9

Co-authors: Pieter Dumon (10 shared papers)Dries Van Thourhout (9 shared papers)Wim Bogaerts (9 shared papers)Roel Baets (5 shared papers)Johan Wouters (7 shared papers)Dirk Taillaert (3 shared papers)S. Beckx (11 shared papers)Vincent Wiaux (3 shared papers)
Journals: Microelectronic Engineering (3 papers)Journal of Photopolymer Science and Technology (2 papers)Optics Express (1 paper)IEEE Transactions on Components Packaging and Manufacturing Technology (1 paper)Japanese Journal of Applied Physics (1 paper)
Partner nations: Belgium Netherlands United States

In The Last Decade

Patrick Jaenen

47 papers receiving 919 citations

Peers

Countries citing papers authored by Patrick Jaenen

Since Specialization

Citations

This map shows the geographic impact of Patrick Jaenen's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Patrick Jaenen with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Patrick Jaenen more than expected).

Fields of papers citing papers by Patrick Jaenen

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Patrick Jaenen. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Patrick Jaenen. The network helps show where Patrick Jaenen may publish in the future.

Co-authors

The 25 scholars most cited alongside Patrick Jaenen, linked wherever they have co-authored with each other. Click a name or a connecting line to browse the papers they share.

Border = papers with Patrick Jaenen Line = papers co-authored together Patrick Jaenen links everyone, so they are left out of the graph.

All Works

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20 of 20 papers shown

Showing the 20 most-cited of 47 papers — load more, or switch the sort, to bring in the rest.

#	Work
1	Compact Wavelength-Selective Functions in Silicon-on-Insulator Photonic Wires IEEE Journal of Selected Topics in Quantum Electronics ·Wim Bogaerts, Pieter Dumon, Dries Van Thourhout, Dirk Taillaert, Patrick Jaenen, Johan Wouters, S. Beckx, Vincent Wiaux, Roel Baets	2006	260
2	Fabrication of Photonic Wire and Crystal Circuits in Silicon-on-Insulator Using 193-nm Optical Lithography Journal of Lightwave Technology ·Shankar Kumar Selvaraja, Patrick Jaenen, Wim Bogaerts, Dries Van Thourhout, Pieter Dumon, Roel Baets	2009	173
3	Compact wavelength router based on a Silicon-on-insulator arrayed waveguide grating pigtailed to a fiber array Optics Express ·Pieter Dumon, Wim Bogaerts, Dries Van Thourhout, Dirk Taillaert, Roel Baets, Johan Wouters, S. Beckx, Patrick Jaenen	2006	104
4	Pitch doubling through dual-patterning lithography challenges in integration and litho budgets Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Mircea Dusa, John Quaedackers, Olaf F. A. Larsen, Jeroen Meessen, Eddy van der Heijden, Gerald Dicker, Onno Wismans, Paul de Haas, Koen van Ingen Schenau, Jo Finders, Bert Vleeming, Geert Storms, Patrick Jaenen, Shaunee Cheng, Mireille Maenhoudt	2007	72
5	Linear and Nonlinear Nanophotonic Devices Based on Silicon-on-Insulator Wire Waveguides Japanese Journal of Applied Physics ·Pieter Dumon, Gino Priem, L.R. Nunes, Wim Bogaerts, Dries Van Thourhout, Peter Bienstman, Tak Keung Liang, Masahiro Tsuchiya, Patrick Jaenen, S. Beckx, Johan Wouters, Roel Baets	2006	62
6	Implementation of an industry compliant, 5×50μm, via-middle TSV technology on 300mm wafers A. Redolfi, Dimitrios Velenis, Sarasvathi Thangaraju, P. Nolmans, Patrick Jaenen, Maarten Kostermans, Ulrich Baier, Els Van Besien, Harold Dekkers, T. Witters, N. Jourdan, A. Van Ammel, K. Vandersmissen, Simon Rodet, Harold Philipsen, Aleksandar Radisic, N. Heylen, Youssef Travaly, Bart Swinnen, Eric Beyne	2011	43
7	3-D Wafer-Level Packaging Die Stacking Using Spin-on-Dielectric Polymer Liner Through-Silicon Vias IEEE Transactions on Components Packaging and Manufacturing Technology ·Yann Civale, Deniz Sabuncuoglu Tezcan, Harold Philipsen, Fabrice Duval, Patrick Jaenen, Youssef Travaly, Philippe Soussan, Bart Swinnen, Eric Beyne	2011	42
8	Evaluation of Megasonic Cleaning for Sub-90nm Technologies Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena ·Guy Vereecke, Frank Holsteyns, Sophia Arnauts, S. Beckx, Patrick Jaenen, Karine Kenis, Marjorie Lismont, Marcel Lux, Rita Vos, James Snow, Paul Mertens	2005	27
9	Die stacking using 3D-wafer level packaging copper/polymer through-si via technology and Cu/Sn interconnect bumping Yann Civale, Deniz Sabuncuoglu Tezcan, Harold Philipsen, Patrick Jaenen, Rahul Agarwal, Fabrice Duval, Philippe Soussan, Youssef Travaly, Eric Beyne	2009	20
10	High Q inductor add-on module in thick Cu/SiLK/sup TM/ single damascene S. Jenei, Stefaan Decoutere, Gillis Winderickx, Herbert Struyf, Zsolt Tökei, I. Vervoort, Ingrid Vos, Patrick Jaenen, L. Carbonell, Brice De Jaeger, R. A. Donaton, S. Vanhaelemeersch, Karen Maex, Bart Nauwelaers	2001	17
11	Split and design guidelines for double patterning Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Vincent Wiaux, Staf Verhaegen, Shaunee Cheng, Fumio Iwamoto, Patrick Jaenen, Mireille Maenhoudt, Takashi Matsuda, Sergei V. Postnikov, Geert Vandenberghe	2008	16
12	Study of novel EUVL mask absorber candidates Journal of Micro/Nanopatterning Materials and Metrology ·Meiyi Wu, Devesh Thakare, Jean‐François de Marneffe, Patrick Jaenen, Laurent Souriau, Karl Opsomer, Jean-Philippe Soulié, Andreas Erdmann, Hazem Mesilhy, Philipp Naujok, Markus Foltin, Victor Soltwisch, Qais Saadeh, Vicky Philipsen	2021	15
13	Via-middle through-silicon via with integrated airgap to zero TSV-induced stress impact on device performance Yann Civale, Stefaan Van Huylenbroeck, A. Redolfi, Wei Guo, Khashayar Babaei Gavan, Patrick Jaenen, Antonio Manna, Gerald Beyer, Bart Swinnen, Eric Beyne	2013	10
14	Silicon-on-insulator nanophotonics Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Wim Bogaerts, Pieter Dumon, Patrick Jaenen, Johan Wouters, S. Beckx, Vincent Wiaux, Dries Van Thourhout, Dirk Taillaert, Bert Luyssaert, Roel Baets	2005	10
15	Basic photonic wire components in silicon-on-insulator Zenodo (CERN European Organization for Nuclear Research) ·Pieter Dumon, Günther Roelkens, Wim Bogaerts, Dries Van Thourhout, Johan Wouters, S. Beckx, Patrick Jaenen, Roel Baets	2005	10
16	Implementation of high-k and metal gate materials for the 45nm node and beyond: gate patterning development Microelectronics Reliability ·S. Beckx, M. Demand, S. Locorotondo, K. Henson, Martine Claes, Vasile Paraschiv, Denis Shamiryan, Patrick Jaenen, Werner Boullart, S. DeGendt, S. Biesemans, S. Vanhaelemeersch, Johan Vertommen, B. Coenegrachts	2005	10
17	Silicon nanophotonic wire structures fabricated by 193nm optical lithography Conference proceedings ·Shankar Kumar Selvaraja, Patrick Jaenen, S. Beckx, Wim Bogaert, Pieter Dumon, Dries Van Thourout, R. W. Bates	2007	10
18	Reduction of mask-induced CD errors by optical proximity correction Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·John N. Randall, Alexander Tritchkov, R. Jonckheere, Patrick Jaenen, Kurt Ronse	1998	6
19	<title>Improving the performance and usability of a wet-developable DUV resist for sub-500nm lithography</title> Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Nandasiri Samarakone, Veerle Van Driessche, Patrick Jaenen, Luc Van den hove, Douglas R. Ritchie, Paul F. Luehrmann	1991	5
20	NA/σ optimization strategies for an advanced DUV stepper applied to 0.25-μm and sub-0.25-μm critical levels Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Maaike Op de Beeck, Kurt Ronse, Kouros Ghandehari, Patrick Jaenen, Harry Botermans, Jo Finders, John A. Lilygren, Daniel C. Baker, Geert Vandenberghe, Peter De Bisschop, Mireille Maenhoudt, Luc Van den hove	1997	4

About Patrick Jaenen

Patrick Jaenen is a scholar working on Surfaces, Coatings and Films, Electrical and Electronic Engineering, Biomedical Engineering, Atomic and Molecular Physics, and Optics and Radiation, having authored 47 papers that have together received 966 indexed citations. Recurring topics across this work include Advancements in Photolithography Techniques (23 papers), 3D IC and TSV technologies (14 papers), Integrated Circuits and Semiconductor Failure Analysis (12 papers), Photonic Crystals and Applications (10 papers), Photonic and Optical Devices (10 papers), Semiconductor materials and devices (9 papers), Nanofabrication and Lithography Techniques (9 papers) and Advanced Surface Polishing Techniques (9 papers). The work is most often cited by research in Surfaces, Coatings and Films (151 citations), Electrical and Electronic Engineering (926 citations), Atomic and Molecular Physics, and Optics (446 citations), Hardware and Architecture (28 citations) and Biomedical Engineering (173 citations). Patrick Jaenen has collaborated with scholars based in Belgium, Netherlands and United States. Frequent co-authors include Pieter Dumon, Dries Van Thourhout, Wim Bogaerts, Roel Baets, Johan Wouters, Dirk Taillaert, S. Beckx, Vincent Wiaux, Shankar Kumar Selvaraja and S. Beckx. Their work appears in journals such as Microelectronic Engineering, Journal of Photopolymer Science and Technology, Optics Express, IEEE Transactions on Components Packaging and Manufacturing Technology and Japanese Journal of Applied Physics.

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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