Oili Ylivaara

904 total citations
32 papers, 655 citations indexed

About

Oili Ylivaara is a scholar working on Electrical and Electronic Engineering, Materials Chemistry and Mechanics of Materials. According to data from OpenAlex, Oili Ylivaara has authored 32 papers receiving a total of 655 indexed citations (citations by other indexed papers that have themselves been cited), including 31 papers in Electrical and Electronic Engineering, 17 papers in Materials Chemistry and 9 papers in Mechanics of Materials. Recurrent topics in Oili Ylivaara's work include Semiconductor materials and devices (25 papers), Diamond and Carbon-based Materials Research (9 papers) and Metal and Thin Film Mechanics (9 papers). Oili Ylivaara is often cited by papers focused on Semiconductor materials and devices (25 papers), Diamond and Carbon-based Materials Research (9 papers) and Metal and Thin Film Mechanics (9 papers). Oili Ylivaara collaborates with scholars based in Finland, Germany and Japan. Oili Ylivaara's co-authors include Riikka L. Puurunen, Sakari Sintonen, Harri Lipsanen, Saima Ali, Simo‐Pekka Hannula, Eero Haimi, Xuwen Liu, Helena Ronkainen, Timo Sajavaara and Lauri Kilpi and has published in prestigious journals such as Journal of Applied Physics, The Journal of Physical Chemistry C and Physical Chemistry Chemical Physics.

In The Last Decade

Oili Ylivaara

32 papers receiving 638 citations

Peers — A (Enhanced Table)

Peers by citation overlap · career bar shows stage (early→late) cites · hero ref

Name h Career Trend Papers Cites
Oili Ylivaara Finland 15 518 371 107 106 65 32 655
Won Mok Kim South Korea 15 415 0.8× 295 0.8× 83 0.8× 167 1.6× 89 1.4× 41 600
Shih‐Hui Jen United States 7 422 0.8× 257 0.7× 96 0.9× 139 1.3× 87 1.3× 9 543
R. Gassilloud France 15 424 0.8× 316 0.9× 176 1.6× 236 2.2× 55 0.8× 38 660
Tai‐Hong Chen Taiwan 14 397 0.8× 184 0.5× 47 0.4× 107 1.0× 99 1.5× 59 591
S. Jakschik Germany 14 772 1.5× 353 1.0× 60 0.6× 64 0.6× 108 1.7× 39 866
Kandabara Tapily United States 16 1.1k 2.1× 654 1.8× 90 0.8× 107 1.0× 111 1.7× 79 1.2k
I. Dói Brazil 10 310 0.6× 228 0.6× 102 1.0× 183 1.7× 31 0.5× 62 510
Shyankay Jou Taiwan 17 328 0.6× 420 1.1× 77 0.7× 180 1.7× 89 1.4× 53 742
J. Elders Netherlands 11 448 0.9× 458 1.2× 163 1.5× 193 1.8× 132 2.0× 16 775
Alan Iacopi Australia 13 383 0.7× 172 0.5× 77 0.7× 183 1.7× 75 1.2× 35 542

Countries citing papers authored by Oili Ylivaara

Since Specialization
Citations

This map shows the geographic impact of Oili Ylivaara's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Oili Ylivaara with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Oili Ylivaara more than expected).

Fields of papers citing papers by Oili Ylivaara

Since Specialization
Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Oili Ylivaara. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Oili Ylivaara. The network helps show where Oili Ylivaara may publish in the future.

Co-authorship network of co-authors of Oili Ylivaara

This figure shows the co-authorship network connecting the top 25 collaborators of Oili Ylivaara. A scholar is included among the top collaborators of Oili Ylivaara based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with Oili Ylivaara. Oili Ylivaara is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

20 of 20 papers shown
1.
Ylivaara, Oili, Andreas Langner, Satu Ek, et al.. (2022). Thermomechanical properties of aluminum oxide thin films made by atomic layer deposition. Journal of Vacuum Science & Technology A Vacuum Surfaces and Films. 40(6). 6 indexed citations
2.
Morits, Dmitry, et al.. (2022). Resonant micromirror with symmetrical AIN thin film actuators. 19–19. 3 indexed citations
3.
Utriainen, Mikko, et al.. (2022). Optical metrology of 3D thin film conformality by LHAR chip assisted method. Aaltodoc (Aalto University). 27–27. 5 indexed citations
4.
Ylivaara, Oili, Andreas Langner, Xuwen Liu, et al.. (2021). Mechanical and optical properties of as-grown and thermally annealed titanium dioxide from titanium tetrachloride and water by atomic layer deposition. Thin Solid Films. 732. 138758–138758. 24 indexed citations
5.
Haimi, Eero, et al.. (2021). Saturation profile measurement of atomic layer deposited film by X-ray microanalysis on lateral high-aspect-ratio structure. Applied Surface Science Advances. 5. 100102–100102. 1 indexed citations
6.
Ylivaara, Oili, Markku Ylilammi, Virpi Korpelainen, et al.. (2020). Saturation profile based conformality analysis for atomic layer deposition: aluminum oxide in lateral high-aspect-ratio channels. Physical Chemistry Chemical Physics. 22(40). 23107–23120. 28 indexed citations
7.
Pelkonen, Anssi, Kestutis Grigoras, Oili Ylivaara, et al.. (2019). Microelectrode Array With Transparent ALD TiN Electrodes. Frontiers in Neuroscience. 13. 226–226. 21 indexed citations
8.
Zhu, Zhen, Oili Ylivaara, Chiara Modanese, et al.. (2019). Low-Temperature Plasma-Enhanced Atomic Layer Deposition of SiO2 Using Carbon Dioxide. Nanoscale Research Letters. 14(1). 55–55. 10 indexed citations
9.
Pensala, Tuomas, Jyrki Kiihamäki, Jukka Kyynäräinen, et al.. (2019). Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications. 18 indexed citations
10.
Zhu, Zhen, S. Merdes, Oili Ylivaara, et al.. (2019). Al2O3 Thin Films Prepared by a Combined Thermal‐Plasma Atomic Layer Deposition Process at Low Temperature for Encapsulation Applications. physica status solidi (a). 217(8). 6 indexed citations
11.
Pelkonen, Anssi, Kestutis Grigoras, Oili Ylivaara, et al.. (2018). (Semi-)transparent ALD TiN microelectrodes. Frontiers in Cellular Neuroscience. 12. 1 indexed citations
12.
Ylilammi, Markku, Oili Ylivaara, & Riikka L. Puurunen. (2018). Modeling growth kinetics of thin films made by atomic layer deposition in lateral high-aspect-ratio structures. Journal of Applied Physics. 123(20). 49 indexed citations
13.
Ek, Satu, et al.. (2017). Biocompatible ALD barrier coatings for medical devices. 56–58. 1 indexed citations
14.
Kilpi, Lauri, Oili Ylivaara, Xuwen Liu, et al.. (2017). Tribological properties of thin films made by atomic layer deposition sliding against silicon. Journal of Vacuum Science & Technology A Vacuum Surfaces and Films. 36(1). 8 indexed citations
15.
Ali, Saima, Taneli Juntunen, Sakari Sintonen, et al.. (2016). Thermal conductivity of amorphous Al2O3/TiO2nanolaminates deposited by atomic layer deposition. Nanotechnology. 27(44). 445704–445704. 29 indexed citations
16.
Ylivaara, Oili, Matti Putkonen, Kristin Pfeiffer, Adriana Szeghalmi, & Riikka L. Puurunen. (2016). Residual stress in SiO2 thin films on silicon. 17. 1 indexed citations
17.
Kilpi, Lauri, Oili Ylivaara, Jari Malm, et al.. (2015). Microscratch testing method for systematic evaluation of the adhesion of atomic layer deposited thin films on silicon. Journal of Vacuum Science & Technology A Vacuum Surfaces and Films. 34(1). 31 indexed citations
18.
Liu, Xuwen, Eero Haimi, Simo‐Pekka Hannula, Oili Ylivaara, & Riikka L. Puurunen. (2013). On the reliability of nanoindentation hardness of Al2O3 films grown on Si-wafer by atomic layer deposition. Journal of Vacuum Science & Technology A Vacuum Surfaces and Films. 32(1). 14 indexed citations
19.
Puurunen, Riikka L., Tommi Suni, Oili Ylivaara, et al.. (2011). Direct wafer bonding of atomic layer deposited TiO<inf>2</inf> and Al<inf>2</inf>O<inf>3</inf> thin films. 978–981. 5 indexed citations
20.
Suni, Tommi, Riikka L. Puurunen, Oili Ylivaara, et al.. (2010). Bonding of ALD Alumina for Advanced SOI Substrates. ECS Transactions. 33(4). 137–144. 7 indexed citations

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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