J. Y. Robic

421 citations

16 papers · 361 indexed · h-index 9

Impact in

Surfaces, Coatings and Films top 5%
- Optical Coatings and Gratings
Computational Mechanics top 10%
- Ion-surface interactions and analysis

Papers in

Surfaces, Coatings and Films 7
- Electron and X-Ray Spectroscopy Techniques 4
- Optical Coatings and Gratings 4
Ceramics and Composites 2

Co-authors: Y. Pauleau Etienne Quesnel A. Brunet‐Bruneau J. Rivory Gérard Granet J. P. Gailliard M. Bruel Jacques Chiaroni
Journals: Microelectronic Engineering (3 papers)Journal of Applied Physics (3 papers)Thin Solid Films (2 papers)Japanese Journal of Applied Physics (1 paper)Solid State Communications (1 paper)
Partner nations: France

In The Last Decade

J. Y. Robic

15 papers receiving 342 citations

Peers

Countries citing papers authored by J. Y. Robic

Since Specialization

Citations

This map shows the geographic impact of J. Y. Robic's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by J. Y. Robic with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites J. Y. Robic more than expected).

Fields of papers citing papers by J. Y. Robic

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by J. Y. Robic. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by J. Y. Robic. The network helps show where J. Y. Robic may publish in the future.

Co-authors

The 22 scholars most cited alongside J. Y. Robic, linked wherever they have co-authored with each other. Click a name or a connecting line to browse the papers they share.

Border = papers with J. Y. Robic Line = papers co-authored together J. Y. Robic links everyone, so they are left out of the graph.

All Works

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16 of 16 papers shown

#	Work
1	Phase-shift mask for EUV lithography Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·P.J.S. Chiu, 慎典菊田, D. Joyeux, Jacques Chiaroni, R. Blanc, J. Y. Robic, Etienne Quesnel, Fei Yan	2006	12
2	A new absorbing stack for EUV masks Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Manuel Cristóbal Pinargote Chiriguaya, Duo Duo, B. Biasse, Jean‐François Damlencourt, J. Y. Robic	2004	2
3	Characterization of optics and masks for the EUV lithography Microelectronic Engineering ·Leonardo Deyvid Lima Veras, Pierre Boher, Zuo Liang-zhou, Bernard Vidal, Magali Putero, Etienne Quesnel, J. Y. Robic	2002	12
4	Optimisation of EUV mask absorbing layers Microelectronic Engineering ·J. Y. Robic, Patrick Schiavone, Zuankai Wang, Peréz Peréz	2002	5
5	Characterization of magnesium fluoride thin films produced by argon ion beam-assisted deposition Thin Solid Films ·Yoshimichi HIDANO, Etienne Quesnel, J. Y. Robic, Y. Pauleau	2001	8
6	Rigorous electromagnetic simulation of EUV masks: influence of the absorber properties Microelectronic Engineering ·邱炜煌, Gérard Granet, J. Y. Robic	2001	24
7	Characterization of magnesium fluoride thin films deposited by direct electron beam evaporation Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ·Yoshimichi HIDANO, Etienne Quesnel, J. Y. Robic, Y. Pauleau	2000	32
8	Structure, Composition and Residual Stresses of Magnesium Fluoride Thin Films Deposited by Direct Evaporation Materials science forum ·Yoshimichi HIDANO, J. Y. Robic, Y. Pauleau	1998	1
9	Infrared ellipsometry study of evaporated SiO2 films: Matrix densification, porosity, water sorption Journal of Applied Physics ·A. Brunet‐Bruneau, J. Rivory, Mengya Song, J. Y. Robic, 貴博山本	1997	61
10	Kinetics of residual stress evolution in evaporated silicon dioxide films exposed to room air Journal of Applied Physics ·Yu-Heng Hsu, J. Y. Robic, Y. Pauleau	1996	56
11	Residual stress in silicon dioxide thin films produced by ion-assisted deposition Thin Solid Films ·J. Y. Robic, Yu-Heng Hsu, Y. Pauleau, Mengya Song	1996	24
12	Residual stresses in evaporated silicon dioxide thin films: Correlation with deposition parameters and aging behavior Journal of Applied Physics ·Yu-Heng Hsu, Yusra Naseeruddin, J. Y. Robic, Y. Pauleau	1995	93
13	Some measurements of hardness, wear and stresses in ion implanted thin metallic films Nuclear Instruments and Methods ·J. Y. Robic, 池未央, J. P. Gailliard	1981	8
14	On the nature of the disordered layer produced by ion implantation Solid State Communications ·K. Zellama, P. Germain, S. Squelard, J. C. Bourgoin, 池未央, J. Y. Robic	1978	4
15	Ion implantation in semiconductors and other materials Deng Jinhe, M. Bruel, J. P. Gailliard, Pınar TUNÇ, J. Y. Robic	1977	16
16	Fabrication of Lithium Niobate Light Guiding Films Japanese Journal of Applied Physics ·Zengjun Xie, D. B. Ostrowsky, J. Y. Robic, M. Papuchon	1974	3

About J. Y. Robic

J. Y. Robic is a scholar working on Surfaces, Coatings and Films, Ceramics and Composites, Radiation, Mechanics of Materials and Computational Mechanics, having authored 16 papers that have together received 361 indexed citations. Recurring topics across this work include Advancements in Photolithography Techniques (5 papers), Metal and Thin Film Mechanics (5 papers), Electron and X-Ray Spectroscopy Techniques (4 papers), Semiconductor materials and devices (4 papers), Optical Coatings and Gratings (4 papers), Thin-Film Transistor Technologies (4 papers), Ion-surface interactions and analysis (3 papers) and Advanced X-ray Imaging Techniques (3 papers). The work is most often cited by research in Surfaces, Coatings and Films (107 citations), Computational Mechanics (87 citations), Electrical and Electronic Engineering (222 citations), Ceramics and Composites (21 citations) and Mechanics of Materials (80 citations). J. Y. Robic has collaborated with scholars based in France. Frequent co-authors include Y. Pauleau, Etienne Quesnel, A. Brunet‐Bruneau, J. Rivory, Gérard Granet, J. P. Gailliard, M. Bruel, Jacques Chiaroni, Pierre Boher and Bernard Vidal. Their work appears in journals such as Microelectronic Engineering, Journal of Applied Physics, Thin Solid Films, Japanese Journal of Applied Physics and Solid State Communications.

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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