J. Heidenreich

2.5k total citations · 1 hit paper
24 papers, 1.6k citations indexed

About

J. Heidenreich is a scholar working on Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials and Mechanics of Materials. According to data from OpenAlex, J. Heidenreich has authored 24 papers receiving a total of 1.6k indexed citations (citations by other indexed papers that have themselves been cited), including 17 papers in Electrical and Electronic Engineering, 8 papers in Electronic, Optical and Magnetic Materials and 5 papers in Mechanics of Materials. Recurrent topics in J. Heidenreich's work include Plasma Diagnostics and Applications (9 papers), Copper Interconnects and Reliability (8 papers) and Integrated Circuits and Semiconductor Failure Analysis (5 papers). J. Heidenreich is often cited by papers focused on Plasma Diagnostics and Applications (9 papers), Copper Interconnects and Reliability (8 papers) and Integrated Circuits and Semiconductor Failure Analysis (5 papers). J. Heidenreich collaborates with scholars based in United States, Canada and Germany. J. Heidenreich's co-authors include M. H. Thiemens, Gary S. Selwyn, Kurt Haller, J. Paraszczak, G. Sauvé, R. Goldblatt, Michel Moisan, A. Simon, L.T. Su and N. Lustig and has published in prestigious journals such as Science, The Journal of Chemical Physics and Applied Physics Letters.

In The Last Decade

J. Heidenreich

24 papers receiving 1.5k citations

Hit Papers

The Mass-Independent Frac... 1983 2026 1997 2011 1983 100 200 300 400
What are hit papers?

Hit papers significantly outperform the citation benchmark for their cohort. A paper qualifies if it has ≥500 total citations, achieves ≥1.5× the top-1% citation threshold for papers in the same subfield and year (this is the minimum needed to enter the top 1%, not the average within it), or reaches the top citation threshold in at least one of its specific research topics.

  1. The Mass-Independent Fractionation of Oxygen: A Novel Isotope Effect and Its Possible Cosmochemical Implications
    1983 484 citations M. H. Thiemens, J. Heidenreich Science profile →

Peers — A (Enhanced Table)

Peers by citation overlap · career bar shows stage (early→late) cites · hero ref

Name h Career Trend Papers Cites
J. Heidenreich United States 17 552 495 412 412 199 24 1.6k
M. W. Williams United States 27 554 1.0× 672 1.4× 589 1.4× 269 0.7× 71 0.4× 73 2.5k
P. Müller Germany 24 385 0.7× 433 0.9× 320 0.8× 137 0.3× 120 0.6× 105 1.9k
H. Hidaka Japan 20 294 0.5× 601 1.2× 628 1.5× 445 1.1× 136 0.7× 69 2.0k
E. Kankeleit Germany 28 181 0.3× 1.0k 2.0× 1.1k 2.8× 212 0.5× 87 0.4× 114 3.4k
Shailendra Kumar India 30 676 1.2× 367 0.7× 1.6k 3.9× 480 1.2× 75 0.4× 107 2.9k
N.R.J. Poolton United Kingdom 27 301 0.5× 193 0.4× 246 0.6× 597 1.4× 108 0.5× 87 2.1k
Peter L. Smith United States 24 186 0.3× 836 1.7× 400 1.0× 445 1.1× 53 0.3× 85 1.6k
Guy Cernogora France 25 703 1.3× 377 0.8× 1.1k 2.6× 313 0.8× 167 0.8× 64 2.0k
H. Takahashi Japan 29 414 0.8× 326 0.7× 1.5k 3.7× 160 0.4× 181 0.9× 199 3.0k
Stephen P. Smith United States 19 568 1.0× 378 0.8× 208 0.5× 153 0.4× 67 0.3× 54 1.3k

Countries citing papers authored by J. Heidenreich

Since Specialization
Citations

This map shows the geographic impact of J. Heidenreich's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by J. Heidenreich with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites J. Heidenreich more than expected).

Fields of papers citing papers by J. Heidenreich

Since Specialization
Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by J. Heidenreich. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by J. Heidenreich. The network helps show where J. Heidenreich may publish in the future.

Co-authorship network of co-authors of J. Heidenreich

This figure shows the co-authorship network connecting the top 25 collaborators of J. Heidenreich. A scholar is included among the top collaborators of J. Heidenreich based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with J. Heidenreich. J. Heidenreich is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

20 of 20 papers shown
1.
Stamper, A. K., et al.. (2003). Damascene copper integration. 97. 171–176. 2 indexed citations
2.
Biesemans, S., J. Heidenreich, V. McGahay, et al.. (2002). A modular 0.13 μm bulk CMOS technology for high performance and low power applications. 12–13. 21 indexed citations
3.
Heidenreich, J., D. Edelstein, R. Goldblatt, et al.. (2002). Copper dual damascene wiring for sub-0.25 μm CMOS technology. 11. 151–153. 3 indexed citations
4.
Edelstein, D., J. Heidenreich, R. Goldblatt, et al.. (2002). Full copper wiring in a sub-0.25 μm CMOS ULSI technology. 773–776. 196 indexed citations
5.
Feng, Yong, et al.. (2002). A high reliability metal insulator metal capacitor for 0.18 μm copper technology. 157–160. 35 indexed citations
6.
Ledentsov, N. N., M. V. Maximov, P. S. Kop’ev, et al.. (1995). Optical spectroscopy of self-organized nanoscale hetero-structures involving high-index surfaces. Microelectronics Journal. 26(8). 871–879. 17 indexed citations
7.
Chou, N. J., A. D. Marwick, R. Goldblatt, et al.. (1992). An isotope approach to characterization of microwave water plasma modified polyimide surfaces. Journal of Vacuum Science & Technology A Vacuum Surfaces and Films. 10(1). 248–253. 5 indexed citations
8.
Goldblatt, R., S. Nunes, N. J. Chou, et al.. (1992). Characterization of water vapor plasma‐modified polyimide. Journal of Applied Polymer Science. 46(12). 2189–2202. 21 indexed citations
9.
Selwyn, Gary S., J. Heidenreich, & Kurt Haller. (1991). Rastered laser light scattering studies during plasma processing: Particle contamination trapping phenomena. Journal of Vacuum Science & Technology A Vacuum Surfaces and Films. 9(5). 2817–2824. 97 indexed citations
10.
Selwyn, Gary S., J. Heidenreich, & Kurt Haller. (1990). Particle trapping phenomena in radio frequency plasmas. Applied Physics Letters. 57(18). 1876–1878. 248 indexed citations
11.
Lee, Young Hoon, et al.. (1989). Plasma characterization of an electron cyclotron resonance–radio-frequency hybrid plasma reactor. Journal of Vacuum Science & Technology A Vacuum Surfaces and Films. 7(3). 903–907. 31 indexed citations
12.
Heidenreich, J., J. Paraszczak, Michel Moisan, & G. Sauvé. (1988). Electron energy distributions in oxygen microwave plasmas. Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena. 6(1). 288–292. 19 indexed citations
13.
Paraszczak, J., et al.. (1988). Chemical And Physical Aspects Of Multilayer Resist Processing. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 920. 242–242. 5 indexed citations
14.
Paraszczak, J., et al.. (1987). The use of organosilicon polymers in multilayer plasma resist processing. Microelectronic Engineering. 6(1-4). 453–460. 12 indexed citations
15.
Chou, N. J., et al.. (1987). X-ray photoelectron and infrared spectroscopy of microwave plasma etched polyimide surfaces. Journal of Vacuum Science & Technology A Vacuum Surfaces and Films. 5(4). 1321–1326. 16 indexed citations
16.
Heidenreich, J., J. Paraszczak, Michel Moisan, & G. Sauvé. (1986). Ion energy and anisotropy in microwave plasma etching of polymers. Microelectronic Engineering. 5(1-4). 363–374. 18 indexed citations
17.
Paraszczak, J., J. Heidenreich, M. Hatzakis, & M. Moisan. (1985). Methods of creation and effect of microwave plasmas upon the etching of polymers and silicon. Microelectronic Engineering. 3(1-4). 397–410. 17 indexed citations
18.
Heidenreich, J. & M. H. Thiemens. (1983). A Non-Mass-Dependent Isotope Effect in the Electrodissociation of CO 2. Metic. 18. 310. 2 indexed citations
19.
Thiemens, M. H. & J. Heidenreich. (1983). The Mass-Independent Fractionation of Oxygen: A Novel Isotope Effect and Its Possible Cosmochemical Implications. Science. 219(4588). 1073–1075. 484 indexed citations breakdown →
20.
Heidenreich, J. & M. H. Thiemens. (1983). A non-mass-dependent isotope effect in the production of ozone from molecular oxygen. The Journal of Chemical Physics. 78(2). 892–895. 97 indexed citations

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

Explore authors with similar magnitude of impact

Breakdown of academic impact, for papers by M. W. Williams Breakdown of academic impact, for papers by P. Müller Breakdown of academic impact, for papers by H. Hidaka Breakdown of academic impact, for papers by E. Kankeleit Breakdown of academic impact, for papers by Shailendra Kumar Breakdown of academic impact, for papers by N.R.J. Poolton Breakdown of academic impact, for papers by Peter L. Smith Breakdown of academic impact, for papers by Guy Cernogora Breakdown of academic impact, for papers by H. Takahashi Breakdown of academic impact, for papers by Stephen P. Smith
Rankless by CCL
2026